JPH01116436U - - Google Patents

Info

Publication number

JPH01116436U

JPH01116436U JP1224088U JP1224088U JPH01116436U JP H01116436 U JPH01116436 U JP H01116436U JP 1224088 U JP1224088 U JP 1224088U JP 1224088 U JP1224088 U JP 1224088U JP H01116436 U JPH01116436 U JP H01116436U

Authority

JP

Japan

Prior art keywords

heat

plate

hydrogen combustion

separation plate

heat ray

Prior art date

1988-02-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
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• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
• 239000001257 hydrogen Substances 0.000 claims description 5
• 229910052739 hydrogen Inorganic materials 0.000 claims description 5
• 238000002485 combustion reaction Methods 0.000 claims description 4
• 238000000926 separation method Methods 0.000 claims description 4
• 238000009423 ventilation Methods 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 3
• 238000004519 manufacturing process Methods 0.000 claims 2
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
• 239000001301 oxygen Substances 0.000 claims 1
• 229910052760 oxygen Inorganic materials 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000010521 absorption reaction Methods 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1