JPS6354085U - - Google Patents
Info
- Publication number
- JPS6354085U JPS6354085U JP14752586U JP14752586U JPS6354085U JP S6354085 U JPS6354085 U JP S6354085U JP 14752586 U JP14752586 U JP 14752586U JP 14752586 U JP14752586 U JP 14752586U JP S6354085 U JPS6354085 U JP S6354085U
- Authority
- JP
- Japan
- Prior art keywords
- detector
- detection circuit
- difference
- output
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986147525U JPH0515116Y2 (pt) | 1986-09-25 | 1986-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986147525U JPH0515116Y2 (pt) | 1986-09-25 | 1986-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6354085U true JPS6354085U (pt) | 1988-04-11 |
| JPH0515116Y2 JPH0515116Y2 (pt) | 1993-04-21 |
Family
ID=31060968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986147525U Expired - Lifetime JPH0515116Y2 (pt) | 1986-09-25 | 1986-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0515116Y2 (pt) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001267400A (ja) * | 2000-03-16 | 2001-09-28 | Kyocera Corp | ウエハ支持部材 |
| US7116091B2 (en) * | 2004-03-04 | 2006-10-03 | Zircon Corporation | Ratiometric stud sensing |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58171690A (ja) * | 1982-03-11 | 1983-10-08 | ロバ−ト・シ−・フランクリン | 電子的壁間柱センサ |
| JPS5945585U (ja) * | 1982-09-20 | 1984-03-26 | ホーチキ株式会社 | 桟検出器 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5945585B2 (ja) * | 1976-08-24 | 1984-11-07 | 三菱電機株式会社 | エレベ−タの故障検出装置 |
-
1986
- 1986-09-25 JP JP1986147525U patent/JPH0515116Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58171690A (ja) * | 1982-03-11 | 1983-10-08 | ロバ−ト・シ−・フランクリン | 電子的壁間柱センサ |
| JPS5945585U (ja) * | 1982-09-20 | 1984-03-26 | ホーチキ株式会社 | 桟検出器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0515116Y2 (pt) | 1993-04-21 |