JPS6354075B2 - - Google Patents
Info
- Publication number
- JPS6354075B2 JPS6354075B2 JP21169483A JP21169483A JPS6354075B2 JP S6354075 B2 JPS6354075 B2 JP S6354075B2 JP 21169483 A JP21169483 A JP 21169483A JP 21169483 A JP21169483 A JP 21169483A JP S6354075 B2 JPS6354075 B2 JP S6354075B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrafine
- alloy
- metal
- film
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011882 ultra-fine particle Substances 0.000 claims description 43
- 239000007789 gas Substances 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 239000000956 alloy Substances 0.000 claims description 22
- 229910045601 alloy Inorganic materials 0.000 claims description 22
- 239000012159 carrier gas Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 17
- 239000002245 particle Substances 0.000 claims description 13
- 238000005507 spraying Methods 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 description 18
- 239000011521 glass Substances 0.000 description 7
- 239000007921 spray Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910017061 Fe Co Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
Description
本発明は、金属又は合金の超微粒子をノズルよ
りスプレー式でガラス板等のベース面に加熱ガス
による金属又は合金の超微粒子膜を形成する方法
に関する。
出願人は先に上記の膜形成法を、特願昭57−
196085号（特開昭59−87077号）により開示した。
その発明は、微小孔ノズルより金属又は合金の超
微粒子を含むキヤリヤガスをベース面に吹き付け
その金属又は合金の超微粒子をベース面に付着さ
せ、その適当な形状厚さの連続又は不連続の膜を
形成する方法であるが、その実施例としては一般
に不活性ガスの雰囲気下で行なうことが好まし
く、大気中で行なう場合はスプレー中金属又は合
金の超微粒子の表面が酸化し所定の比抵抗値の膜
が得られない場合がある。又その実施例としてそ
の膜のベース面に対する結着性や緻密性の向上、
比抵抗の減少を望む場合は、そのスプレーによる
膜形成後に、該膜面に赤外線等により加熱処理を
行なうことを開示した。しかし、この場合、工程
が２段階となり作業が面倒で且つ非能率であり、
又金属又は合金の超微粒子ごとに所定の加熱が得
られない欠点がある。
本発明はこれを改良し、迅速且つ均一良好な加
熱処理された加熱ガスによる金属又は合金の超微
粒子の膜を形成する方法を提供したもので、微小
孔ノズルより金属又は合金の超微粒子を含むキヤ
リヤガスをベース面に吹き付けその超微粒子をベ
ース面に付着させ、その適当な形状、厚さの連続
又は不連続の膜を形成する金属又は合金の超微粒
子の膜形成法において、該超微粒子を含むキヤリ
ヤガスをベース面に吹き付けるに当り、該キヤリ
ヤガスを予め加熱しておき金属又は合金の超微粒
子を加熱状態でベース面に吹き付けることを特徴
とする。
次に本発明の実施の１例を添付図面につき説明
する。
図面は、本発明を実施する装置を示す。
金属又は合金、例えばNi、Co、FeーNi、Feー
Co等の単独又は、２種以上の混合から成る粒径
0.1〜0.01μｍの超微粒子ａの適量を容器１内に入
れると共に該容器１内にAr、Heなどの不活性ガ
ス、H2などの還元性ガス、N2などの非酸化性ガ
ス等の適当な１種又は２種以上を混合したガスを
ボンベ２よりその導管３をその容器１の下面にキ
ヤリヤガスｂとして吹き込み、超微粒子ａを容器
１内でガスｂで浮遊状態に維持する。超微粒子ａ
はそのキヤリヤガスｂと共に、該容器１の上部か
ら導出した搬送管４へ圧送される。５は、その搬
送管４内に介在させた開閉弁を示し、該開閉弁５
を開けることにより、超微粒子ａ担持のガスｂを
その先端に接続したスプレー用ノズル６より噴出
させるようにするが、本発明によればその噴出前
にその超微粒子ａを予め加熱して噴出せしめるも
ので、その手段は例えば次のような手段で、予め
加熱するようにした。スプレー用ノズル６のノズ
ル口（口径約0.01〜１mmの範囲例えば0.1mm）の
手前の金属製細管部６ａに２本の通電用リード線
７，７をクランプした。かくして電源より適宜の
電圧、電流により該細管部６ａに通電加熱する。
然るときは、該細管部６ａ内を通るキヤリヤガス
ｂが加熱昇温し、この昇温ガスで、これに混在す
る超微粒子ａは、その熱容量は極めて小さいの
で、瞬時にそのガスと略等しい温度まで加熱昇温
される。かくして、所定温度に加熱された超微粒
子ａは、キヤリヤガスｂにより噴出せしめて、そ
の先方のガラス基板等の適宜の材料から成るベー
ス８面に吹き付け、所定の厚さ形状の超微粒子の
みから成る緻密な膜Ｂをベース面８上に生成せし
める。而してこの場合、超微粒子は夫々加熱され
ているので、ベース面８への接着性が良く、又粒
子全ての相互の緻密結着性のよい膜として得られ
る。而してこの吹き付けに際し、加熱昇温した超
微粒子はキヤリヤガスで被包され、大気から遮断
された状態で、ベース８面に付着堆積するので大
気により酸化されることなく良好な金属超微粒子
膜として生成し得られ、大気中で実施することが
容易となり、特に、大気を遮断した容器内を不活
性ガス等の雰囲気とし、その容器内で吹き付けを
行なう手間、設備が省略できる。しかし乍ら、大
気中で本法を実施することに限定するものではな
いことは勿論である。
尚、一般に前記のリード線７に電圧調節器９を
介在させ、そのスプレーガスの加熱温度を適宜調
節するようにすることが好ましい。１０は、ベー
ス８を上面に固定載置する台を示し、台１０は、
その一端に接続の移動装置１１により前後方向に
移動自在とし、ベース８上に線状の超微粒膜が得
られるようにした。ノズル６とベース８との間隔
は0.5〜1.5mm程度とする。噴出時のガス圧は1.2〜
1.5Kg／cm2の範囲が好ましい。ベース８としては、
ガラスの他、セラミツク基板、合成樹脂テープ、
フイルム等従来の磁気記録体導電膜等の電気器機
等用途に応じて各種のものが使用できる。次に具
体的な実施例につき説明する。
実施例 １
低抵抗Ni超微粒子膜の形成
平均粒径200ÅのNi超微粒子（かさ密度0.2g/
cm3）30gを内容積１のガラス容器に入れ、同容
器底部に外部のH2ガスボンベ等のH2ガス源から
流量１／minのH2ガスを吹込み、Ni超微粒子
を浮遊させてH2ガスとNi超微粒子との混合状態
をつくる。同容器上部に接続した内径２mm、長さ
１ｍの搬送管の中間に介在の開閉弁を開き、Ni
超微粒子の混在したH2ガスを搬送管の先端のノ
ズルに送り込む。ノズル細管部の内径は0.2mm、
長さ100mmとし、該細管部に50mmの間隔を存して
２本の通電用リード線をクランプして、これに介
在の電圧調節器により加熱電力を調節するように
設備されている。而して、ノズル細管部内を通る
ときH2ガスを170℃に従て超微粒子を170℃に加
熱するべく、H2ガス流量１／minにおいて加
熱電力4.8W（1.6V×3A）とする。かくしてこの
加熱により、超微粒子は170℃に加熱されてその
キヤリヤガスH2と共にその前方のスライドグラ
ス（幅25mm、長さ76mm、厚さ1.0mm）面に吹き付
ける。この時のノズルとグラスベース面との間隔
は0.6mmとし、スライドグラスは30mm／minの速
度で移動せしめ乍ら吹き付けを行なつた。その結
果そのベース面上に幅0.19mm厚さ2.5μｍの線状の
Ni超微粒子膜を得た。その膜の比抵抗は8.8×
10-4Ω−cmであつた。
尚、比較のため前記の加熱手段を止めて同様の
未加熱の前記と同じ線状のNi超微粒子膜を作成
したが、その膜は同じ測定法では全く導通を示さ
なかつた（比抵抗としては＞104Ω−cmであつ
た。）このように本法による膜は、未加熱では得
られない導通性が得られた。その接着性は、未加
熱のスプレー膜形成後直ちに赤外線加熱のスポツ
トを該膜面に当てて約200℃に加熱した場合と
ほゞ同等であつた。
実施例 ２
実施例１と同じ方法でNi超微粒子膜を形成す
るに当り、ノズル細管の加熱電力を種々調節し、
スプレーガス温度、従て超微粒子温度を色々に変
えてその加熱温度と形成膜の比抵抗との関係を調
べた。その結果の数例を下記表に示す。
The present invention relates to a method for forming an ultrafine metal or alloy particle film on a base surface of a glass plate or the like by spraying ultrafine metal or alloy particles from a nozzle using heated gas. The applicant previously applied for the above-mentioned film formation method in a patent application filed in 1982.
It was disclosed in No. 196085 (Japanese Unexamined Patent Publication No. 59-87077).
The invention involves spraying a carrier gas containing ultrafine metal or alloy particles onto the base surface through a micro-hole nozzle, causing the metal or alloy ultrafine particles to adhere to the base surface, and forming a continuous or discontinuous film of an appropriate shape and thickness. Generally, it is preferable to carry out the process under an inert gas atmosphere.If carried out in the atmosphere, the surface of the ultrafine particles of metal or alloy will be oxidized during spraying, and the specific resistance value will not be reached. A film may not be obtained. In addition, as an example, improving the adhesiveness and denseness of the film to the base surface,
It has been disclosed that when a reduction in specific resistance is desired, after the film is formed by spraying, the surface of the film is subjected to heat treatment using infrared rays or the like. However, in this case, the process is in two stages, making the work cumbersome and inefficient.
Another drawback is that it is not possible to obtain a predetermined amount of heating for each ultrafine particle of metal or alloy. The present invention improves this and provides a method for quickly and uniformly forming a film of ultrafine metal or alloy particles using heated gas that has been subjected to heat treatment. A method for forming a film of ultrafine particles of metal or alloy, in which a carrier gas is blown onto the base surface to cause the ultrafine particles to adhere to the base surface, forming a continuous or discontinuous film of an appropriate shape and thickness, including the ultrafine particles. When the carrier gas is sprayed onto the base surface, the carrier gas is heated in advance and the ultrafine particles of metal or alloy are sprayed onto the base surface in a heated state. Next, one example of implementation of the present invention will be described with reference to the accompanying drawings. The drawing shows an apparatus implementing the invention. Metals or alloys such as Ni, Co, Fe-Ni, Fe-
Particle size consisting of Co, etc. alone or a mixture of two or more types
A suitable amount of ultrafine particles a of 0.1 to 0.01 μm is placed in a container 1, and an appropriate amount of inert gas such as Ar or He, reducing gas such as H2 , non-oxidizing gas such as N2 , etc. is added to the container 1. One or more gases mixed together are blown from a cylinder 2 through a conduit 3 into the lower surface of the container 1 as a carrier gas b, and the ultrafine particles a are kept suspended in the container 1 by the gas b. ultrafine particles a
is, together with the carrier gas b, sent under pressure to a conveying pipe 4 led out from the upper part of the container 1. Reference numeral 5 indicates an on-off valve interposed in the conveying pipe 4, and the on-off valve 5
By opening it, gas b carrying ultrafine particles a is ejected from the spray nozzle 6 connected to its tip, but according to the present invention, the ultrafine particles a are heated in advance before being ejected. For example, the following method was used to heat the material in advance. Two current-carrying lead wires 7, 7 were clamped to the metal thin tube portion 6a in front of the nozzle opening (diameter range of about 0.01 to 1 mm, for example 0.1 mm) of the spray nozzle 6. In this way, the thin tube portion 6a is heated by applying an appropriate voltage and current from the power source.
At this time, the carrier gas b passing through the thin tube portion 6a is heated and heated, and the ultrafine particles a mixed in this heated gas instantly reach a temperature approximately equal to that of the gas because their heat capacity is extremely small. The temperature is raised to . In this way, the ultrafine particles a heated to a predetermined temperature are ejected by a carrier gas b, and are sprayed onto the base 8 made of an appropriate material such as a glass substrate, forming a dense particle consisting only of ultrafine particles with a predetermined thickness. A film B is formed on the base surface 8. In this case, since the ultrafine particles are individually heated, they have good adhesion to the base surface 8, and a film is obtained in which all the particles have good mutual tightness. During this spraying, the heated ultrafine particles are encapsulated in the carrier gas and deposited on the base 8 surface while being shielded from the atmosphere, so they are not oxidized by the atmosphere and form a good ultrafine metal particle film. The method can be easily carried out in the atmosphere, and in particular, it is possible to omit the labor and equipment required to create an atmosphere of an inert gas or the like in a container shut off from the atmosphere and perform spraying in the container. However, it goes without saying that this method is not limited to being carried out in the atmosphere. In addition, it is generally preferable to interpose a voltage regulator 9 on the lead wire 7 to appropriately adjust the heating temperature of the spray gas. Reference numeral 10 indicates a stand on which the base 8 is fixedly mounted, and the stand 10 is
It was made to be movable in the front and back direction by a moving device 11 connected to one end thereof, so that a linear ultrafine particle film could be obtained on the base 8. The distance between the nozzle 6 and the base 8 is approximately 0.5 to 1.5 mm. Gas pressure at the time of ejection is 1.2 ~
A range of 1.5 Kg/cm 2 is preferred. As base 8,
In addition to glass, ceramic substrates, synthetic resin tapes,
Various types of materials can be used depending on the purpose, such as conventional magnetic recording materials such as films, conductive films, and electrical equipment. Next, specific examples will be described. Example 1 Formation of low-resistance Ni ultrafine particle film Ni ultrafine particles with an average particle size of 200 Å (bulk density 0.2 g/
cm 3 ) is placed in a glass container with an internal volume of 1, and H 2 gas is blown into the bottom of the container from an external H 2 gas source such as an H 2 gas cylinder at a flow rate of 1/min to suspend the Ni ultrafine particles. Create a mixed state of 2 gases and ultrafine Ni particles. Open the on-off valve located in the middle of the conveyor pipe with an inner diameter of 2 mm and a length of 1 m connected to the top of the container, and
H2 gas mixed with ultrafine particles is sent into the nozzle at the tip of the conveyor tube. The inner diameter of the nozzle tube is 0.2mm.
The tube has a length of 100 mm, and two current-carrying lead wires are clamped at a distance of 50 mm from the thin tube section, and the heating power is adjusted using an intervening voltage regulator. Therefore, in order to heat the ultrafine particles to 170°C by heating the H 2 gas to 170°C when passing through the nozzle thin tube part, the heating power is set to 4.8 W (1.6 V x 3 A) at a H 2 gas flow rate of 1/min. As a result of this heating, the ultrafine particles are heated to 170°C and are blown along with the carrier gas H 2 onto the surface of the slide glass (width 25 mm, length 76 mm, thickness 1.0 mm) in front of the ultrafine particles. At this time, the distance between the nozzle and the glass base surface was 0.6 mm, and the slide glass was moved at a speed of 30 mm/min while spraying. As a result, a linear pattern with a width of 0.19 mm and a thickness of 2.5 μm was formed on the base surface.
A Ni ultrafine particle film was obtained. The specific resistance of the film is 8.8×
It was 10 -4 Ω-cm. For comparison, the heating means described above was stopped and a similar unheated linear Ni ultrafine particle film was prepared, but the film showed no conductivity at all by the same measurement method (the specific resistance was >10 4 Ω-cm.) Thus, the film produced by this method had conductivity that could not be obtained without heating. The adhesion was almost the same as when an infrared heating spot was applied to the surface of the unheated spray film immediately after it was formed and the film was heated to about 200°C. Example 2 In forming a Ni ultrafine particle film using the same method as in Example 1, the heating power of the nozzle tube was variously adjusted,
The relationship between the heating temperature and the specific resistance of the formed film was investigated by varying the spray gas temperature and therefore the ultrafine particle temperature. Some examples of the results are shown in the table below.
【表】
これから明らかなように、スプレーガス温度の
調節で、形成する超微粒子膜の電気抵抗の値を
種々制御できる。
前記の実施例２のキヤリヤガスとしてH2ガス
に代え、Arガスを使用し、同様に実施したが、
その形成膜の比抵抗はArガス温度をH2ガス温度
より80℃高くすると同じ値のものが得られた。
N2ガスを使用しこれを300℃とした場合は、102
Ω−cmオーダーの高抵抗膜が得られた。
尚、Niに代えFe、Co、Cu、Fe−Ni、Fe−Co
等について夫々実施例１と同様に実施し、Ni超
微粒子膜と同様の10-4Ω−cmオーダーの低抵抗膜
が得られた。尚、本発明の加熱手段として搬送管
４を加熱してもよく、又ノズル６の近傍に加熱器
を設け、輻射加熱する方法、ノズル６に加熱した
導体と接続しこれを熱伝導により加熱する方法ノ
ズル６周囲に誘導コイルをセツトし、高周波誘導
加熱する方法等でもよい。
このように本発明によるときは、ノズルより金
属又は合金の超微粒子をキヤリヤガスを媒体とし
て噴出させベース面に吹き付け所定の金属又は合
金の超微粒子膜を形成せしめるに当り、予め金属
又は合金の超微粒子を加熱状態で吹き付けるよう
にしたので、未加熱の金属又は合金の超微粒子を
吹き付け後、この膜を加熱する方法に比し、良好
な膜を迅速に作成することができ、又金属又は合
金の超微粒子はキヤリヤガスによる保護下で大気
と遮断された状態で加熱されるので、特にその吹
付けをアルゴンガス等の保護雰囲気を別個に作成
して行なうことを必要とせず、その設備費も節約
できる等の効果を有する。[Table] As is clear from this, the electrical resistance value of the formed ultrafine particle film can be controlled in various ways by adjusting the spray gas temperature. The same procedure was carried out using Ar gas instead of H 2 gas as the carrier gas in Example 2, but
The specific resistance of the formed film was the same when the Ar gas temperature was 80°C higher than the H 2 gas temperature.
If N2 gas is used and this is set to 300℃, 10 2
A high resistance film on the order of Ω-cm was obtained. In addition, instead of Ni, Fe, Co, Cu, Fe−Ni, Fe−Co
The same procedure as in Example 1 was carried out for each of these, and a low resistance film on the order of 10 -4 Ω-cm, similar to the Ni ultrafine particle film, was obtained. In addition, the conveying pipe 4 may be heated as a heating means of the present invention, or a heater may be provided near the nozzle 6 and radiant heating may be performed, or the nozzle 6 may be connected to a heated conductor and heated by thermal conduction. A method may also be used in which an induction coil is set around the nozzle 6 and high frequency induction heating is performed. As described above, according to the present invention, when the ultrafine particles of metal or alloy are ejected from the nozzle using the carrier gas and sprayed onto the base surface to form a film of ultrafine particles of a predetermined metal or alloy, the ultrafine particles of metal or alloy are By spraying the metal or alloy in a heated state, it is possible to quickly create a good film compared to the method of spraying unheated ultrafine metal or alloy particles and then heating the film. Since the ultrafine particles are heated while being protected by a carrier gas and isolated from the atmosphere, there is no need to create a separate protective atmosphere such as argon gas for spraying, which can save equipment costs. It has the following effects.
図面は本発明を実施する装置の１例の線図を示
す。
１…容器、６…ノズル、７…電熱線、ａ…超微
粒子、ｂ…キヤリヤガス、８…ベース、Ｂ…膜。
The drawing shows a diagram of an example of an apparatus implementing the invention. DESCRIPTION OF SYMBOLS 1... Container, 6... Nozzle, 7... Heating wire, a... Ultrafine particles, b... Carrier gas, 8... Base, B... Film.
Claims (1)
含むキヤリヤガスをベース面に吹き付けその超微
粒子をベース面に付着させ、その適当な形状、厚
さの連続又は不連続の膜を形成する金属又は合金
の超微粒子の膜形成法において、該超微粒子を含
むキヤリヤガスをベース面に吹き付けるに当り、
該キヤリヤガスを予め加熱しておき、金属又は合
金の超微粒子を加熱状態でベース面に吹き付ける
ことを特徴とする加熱ガスによる金属又は合金の
超微粒子膜形成法。 ２ 金属又は合金の超微粒子とキヤリヤガスとを
混合する混合容器と、該混合容器より導出する搬
送管と、該搬送管に接続するノズルと、該ノズル
より噴出せしめる金属又は合金の超微粒子含有の
キヤリヤガスを噴出前に加熱する加熱器とから成
る加熱ガスによる金属又は合金の超微粒子膜形成
装置。[Claims] 1. A carrier gas containing ultrafine particles of metal or alloy is blown onto the base surface through a micro-hole nozzle to cause the ultrafine particles to adhere to the base surface, forming a continuous or discontinuous film of an appropriate shape and thickness. In the method of forming a film of ultrafine particles of metal or alloy to be formed, when spraying a carrier gas containing the ultrafine particles onto the base surface,
A method for forming an ultrafine particle film of a metal or alloy using a heated gas, characterized in that the carrier gas is heated in advance and ultrafine particles of the metal or alloy are sprayed onto a base surface in a heated state. 2. A mixing container for mixing ultrafine metal or alloy particles and carrier gas, a conveyance pipe leading out from the mixing vessel, a nozzle connected to the conveyance pipe, and a carrier gas containing ultrafine metal or alloy particles ejected from the nozzle. An apparatus for forming a film of ultrafine particles of metal or alloy using a heated gas, comprising a heater that heats the particles before ejecting them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21169483A JPS60106975A (en) | 1983-11-12 | 1983-11-12 | Method and apparatus for forming film of hyperfine particles with heated gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21169483A JPS60106975A (en) | 1983-11-12 | 1983-11-12 | Method and apparatus for forming film of hyperfine particles with heated gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60106975A JPS60106975A (en) | 1985-06-12 |
| JPS6354075B2 true JPS6354075B2 (en) | 1988-10-26 |
Family
ID=16610036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21169483A Granted JPS60106975A (en) | 1983-11-12 | 1983-11-12 | Method and apparatus for forming film of hyperfine particles with heated gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60106975A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011068942A (en) * | 2009-09-25 | 2011-04-07 | Taiyo Nippon Sanso Corp | Method for forming film |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050081252A (en) * | 2004-02-13 | 2005-08-18 | 고경현 | Porous metal coated member and manufacturing method thereof using cold spray |
| WO2009046432A1 (en) * | 2007-10-05 | 2009-04-09 | Diamond Innovations, Inc. | Braze-metal coated articles and process for making same |
-
1983
- 1983-11-12 JP JP21169483A patent/JPS60106975A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011068942A (en) * | 2009-09-25 | 2011-04-07 | Taiyo Nippon Sanso Corp | Method for forming film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60106975A (en) | 1985-06-12 |
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