JPS6353022B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to an apparatus for manufacturing an information recording disk (hereinafter simply referred to as a disk) using a radiation-curable resin.

BACKGROUND TECHNOLOGY In this type of device, a liquid radiation-curable resin is applied onto the signal surface of a stamper fixed on a base with an adhesive, etc., a transparent substrate is placed on top of the signal surface, and radiation is irradiated through this. The disk is manufactured by curing the radiation-curable resin, transferring the signal engraved on the stamper, and then peeling the cured resin layer and the transparent substrate together from the stamper. Then, an aluminum vapor-deposited film is applied to the peeled disk, and an overcoat is applied to create the finished product.

Conventionally, when peeling off the cured resin layer from the stamper together with the transparent substrate, there have been two methods: suctioning and pulling up the top surface of the transparent substrate using a vacuum pad, or using mechanical claws to hook the outer periphery of the resin layer and pull it up. However, the former method has a limited pulling force and may not be able to peel off 20 cm or 30 cm discs, and the latter method requires complicated control of the claws and the disc cannot be removed easily. The disadvantage was that it was easy to damage the

DISCLOSURE OF THE INVENTION The present invention has been made to eliminate the drawbacks of the conventional ones as described above, and provides an information recording disk manufacturing apparatus that can quickly and reliably peel off the disk without damaging the disk. The purpose is to

In the manufacturing apparatus according to the present invention, the outer circumferential portion of the transparent substrate is pressed against the stamper, and the inner circumferential portion is lifted relative to the stamper by a member supporting the inner circumferential portion.

Embodiments Hereinafter, embodiments of the present invention will be described based on the drawings.

In FIG. 1, the disk manufacturing apparatus according to the present invention includes a coating device 1 responsible for the process of coating a liquid radiation-curable resin (hereinafter referred to as photopolymer) on the signal surface of a stamper, and a transparent substrate on the photopolymer. A transfer/separation device is responsible for the step of placing and pressurizing the stamper to transfer the signal engraved on the stamper onto the photopolymer, and the step of peeling off the cured resin layer from the stamper together with the transparent substrate through the next irradiation step. 2, and an irradiation device 3 which is responsible for the process of curing the liquid photopolymer filled between the stamper and the transparent substrate by irradiating ultraviolet rays, and a linear slide track 4 provided across each device. By moving the table main body 5 above, the above-mentioned series of steps are performed continuously to manufacture a disk.

In the coating device 1, a base 8 is attached to the rods 7, 7 upright on a base plate 6 so as to be vertically movable, and a shaft 9 is rotatably attached to the base 8. As is clear from FIG. 2, the shaft 9 is connected to the motor 1 supported on the base 8 via a belt 11 suspended over a pulley 10 fixed to the upper end of the shaft 9.
Rotationally driven by 2. A discharge device 13 is attached to the lower end of the shaft 9. The discharge device 13 includes a needle portion 14 provided a predetermined distance L from the axis of the shaft 9, and the needle portion 14 is used to apply liquid photopolymer onto the signal surface of a stamper 15 (see FIG. 2), which will be described later. Discharge a certain amount. At this time, as the motor 12 rotates, the discharge device 13
Since the needle portion 14 is separated by a predetermined distance L from the axis of the shaft 9, the photopolymer discharged onto the signal surface of the stamper 15 has a ring shape with a radius equal to the predetermined distance L. . The predetermined distance L is variable by an adjustment mechanism 16 that adjusts the position of the needle portion 14, and is appropriately set depending on the area of the signal surface of the stamper 15, the viscosity of the photopolymer, and the like. The adjustment mechanism 16 includes a helical shaft 17 screwed onto the main body of the needle portion 14, a handle 18 for rotating the helical shaft 17, and the like.

In FIG. 3, the transfer/separation device 2 has a lower housing 20 supported on the table main body 5 and moved between the devices, and a lower housing 20 that is movable up and down to open a sealed chamber as appropriate. and an upper housing 21 forming the upper housing 21 . A stamper base 22 is fitted into the upper recess 20a of the lower housing 20, and a drive unit main body 23 is fitted into the center hole 20b of the lower housing 20. A shaft 24 is inserted into the center of the drive unit main body 23 so as to be vertically movable, and a center boss 25 serving as a supporting member is fitted onto the upper end of the shaft 24. A scraper 26 and a seal 27 are interposed between the drive unit main body 23 and the shaft 24, and O-rings 52a, 52 are provided at the inner circumference of the base 22.
b cooperates with each other to maintain airtightness between the base 22 and a substrate to be described later, and constitute means for buffering pressurized gas, that is, a pressurizing chamber 36a. A cam follower 29 is rotatably provided at the lower end of the shaft 24 via a cam holder 28, and this cam follower 29 is pressed against the cam surface of a cam 31 fixed to the shaft 30 by the elastic force of a spring 32. There is. The shaft 30 is appropriately driven by a drive source (not shown), and thereby the center boss 2
5 moves up and down, but is normally in the raised position. A stamper 15 is fixed onto the stamper base 22 with adhesive or the like. Annular grooves 33a and 33b are formed along the outermost and innermost peripheries of the stamper 15, and these annular grooves 33a and 33b connect to communication passages 34a and 34b formed in the lower housing 20 and the drive body 23, respectively. It communicates with a vacuum pump (not shown), which is a pressure reducing means, via vacuum pipes 35 and 36.

On the other hand, the upper housing 21 is normally held at a position separated from the lower housing 20, and when the transition from the coating process to the transfer process is completed, it is lowered to form a sealed chamber with the lower housing 20. For example, six vacuum pads 37 are provided on the upper housing 21 at equal angles with respect to its center as suction means for adhering to the upper surface of the substrate, which will be described later. For example, six vacuum pads 38 are provided so as to be movable up and down, respectively. These vacuum pads 37 and 38 are connected to a vacuum pump (not shown) via vacuum pipes 39 and 40, and are moved up and down by jig cylinders 41 and 42 provided on the upper surface of the upper housing 21. The jig cylinder 41 is oil-driven with air-to-oil conversion, and is capable of slow-speed feeding. A center presser 44 for pressing the center of a transparent substrate (hereinafter referred to as a substrate) 43 placed on the center boss 25 is fitted into the central protrusion 21a of the upper housing 21 so as to be movable up and down. . This center presser 44 is urged downward by a spring 45, and is prevented from coming off by a stopper 46. The vacuum pad 37 is held at a height in contact with the upper surface of the substrate 43 in the initial state of the housing being sealed.

An annular seal 47 is provided to cover an annular groove 33a formed along the outermost periphery of the stamper 15. This annular seal 47 is made of quartz glass.
Made of UV-transparent material such as acrylic resin,
A magnetic plate 48 fixed to the upper surface recess is held attached to the upper housing 21 by being attracted to magnets 49 embedded in the housing 21 at appropriate intervals. When the vacuum pad 38 moves up and down in a reduced pressure state, this annular seal 47 moves up and down together with the vacuum pad 38 while being attracted to it, and when it is in the descending state, the vacuum pad 3
8 to constitute a means for pressing the outer circumference of the substrate 43 against the stamper 15, and an O-ring 51 at the outer circumference of the base 22.
The base 22 and the substrate 43 cooperate with each other to maintain airtightness between the base 22 and the substrate 43.

When the transfer process is completed, the upper housing 21 is raised and the lower housing 20 is moved below the irradiation device 3 shown in FIG. Then, ultraviolet rays are irradiated from the irradiation device 3, whereby the liquid photopolymer filled between the stamper 15 and the substrate 43 is cured to form a resin layer.
When the irradiation process is completed, the lower housing 20 moves below the upper housing 21 again, and the peeling process begins.

On the inner and outer circumferential parts of the stamper 15, a fourth
As is particularly clear from the figure, the inclined portions 15a, 15b are preferably formed with an inclination of 45°. When the substrate 43 is placed on top of the liquid photopolymer discharged in an annular manner onto the signal surface of the stamper 15, it travels between the stamper 15 and the substrate 43 over the entire signal surface of the stamper 15. However, at this time, in the inner circumferential portion of the stamper 15, the photopolymer is stopped in a circular shape at the inclined portion 15a due to surface tension and the step. In addition, on the outer periphery of the stamper, when the cured photopolymer is peeled off, the protruding photopolymer tends to remain, but since the inclined portion 15b has an inclination angle of approximately 45°, slippage due to shear stress is prevented. By breaking, the photopolymer can be peeled off without leaving the cured photopolymer, and the peelability of the outermost portion of the photopolymer can be improved.

Next, the operation of the manufacturing apparatus according to the present invention will be explained.

First, in FIG. 1, the lower housing 20 moves together with the table main body 5 to below the discharge device 13, and a coating process begins. In the coating process, the discharge device 13 descends together with the base 8, and the needle portion 14
The tip of the stamper 15 (see FIG. 3) stops at a position close to the signal surface of the stamper 15 (see FIG. 3), and then rotates together with the shaft 9 by the driving force of the motor 12. Accordingly, the needle portion 14 rotates around the shaft 9 and discharges liquid photopolymer onto the signal surface of the stamper 15. As the photopolymer, for example, an acrylic monomer having a viscosity of about several 10 to 1000 cps and whose viscosity, weight, etc. do not change even in a vacuum is used. The discharged photopolymer is attached to the shaft 9
and the needle portion 14 (see Fig. 2)
It becomes a ring shape with a radius of . When the discharge device 13 rotates once, it stops discharging the photopolymer and rises to the initial position. When the coating process is completed, the lower housing 20 moves below the upper housing 21, and the transfer process begins.

Regarding the transfer process, see Fig. 3 and Fig. 5 a to e.
The explanation will be based on. In the initial state of the transfer process, as shown in FIG. 5a, the lower housing 20
The upper housing 21 is spaced apart from the center boss 2 supporting the substrate 43.
5 and vacuum pads 37 and 38 are raised. The upper housing 21 descends from this initial state and forms a sealed chamber with the lower housing 20, as shown in FIG. 5b. upper and lower housings 21,
An O-ring 50 is interposed between the outer edges of the chamber 20 to maintain the airtightness of the sealed chamber. At this time, the center presser 44 presses the substrate 43 against the center boss 25 by the elastic force of the spring 45, and the vacuum pad 37 comes into contact with the upper surface of the substrate 43, and furthermore, the vacuum level is about -650 mmHg. The substrate 43 is adsorbed by being brought into a reduced pressure state. Thereafter, the sealed chamber is connected to the lower housing 2.
The pressure is reduced to a negative pressure of approximately -500 mmHg via communication passages 34a, 34b and vacuum pipes 35, 36 (not shown), and this state is maintained. In this state, vacuum pad 3
There is a pressure difference of approximately 150 mmHg between the inside of the vacuum pad 7 and the sealed chamber, and the substrate 43 is attracted to the vacuum pad 37 due to this pressure difference.

Next, the center boss 25 moves down in response to the rotation of the cam 31. At this time, substrate 4
The outer periphery of 3 is attracted to the vacuum pad 37,
Only the inner periphery of the substrate 43 descends together with the center boss 25, and as shown in FIG. 5c, the inner periphery of the substrate 43 first contacts the photopolymer 2P on the stamper 15. As a result, the photopolymer 2P spreads over the entire inner circumference of the signal surface of the stamper 15 due to its surface tension. Next, as shown in FIG. 5d, when the vacuum pad 37 is lowered, the photopolymer 2P is filled between the stamper 15 and the substrate 43 over the entire surface. In this way, by gradually lowering the substrate 43 relative to the stamper 15 from the inner circumference to the outer circumference in a sealed chamber reduced to a vacuum level of about -500 mmHg, the substrate 43 is deposited into the photopolymer 2P. Entrainment of bubbles can be extremely reduced.

When the photopolymer 2P is filled between the stamper 15 and the substrate 43, as shown in FIG. 43 and covers the annular groove 33a formed along the outermost periphery of the stamper 15. At this time, the annular seal 47
An O-ring 51 is interposed between the annular groove 33a and the lower housing 20, thereby maintaining the airtightness of the annular groove 33a. Next, the airtight chamber above the substrate 43 is returned to atmospheric pressure, but the annular grooves 33a, 33b
is reduced in pressure through the communication paths 34a and 34b, the resin layer made of the photopolymer 2P is in a vacuum state, and the substrate 43 is placed in the stamper 1.
5 at atmospheric pressure, bubbles caught in the resin layer are pushed out toward the vacuum source, that is, toward the inner and outer circumferences of the substrate 43, and are removed. At the same time, the thickness of the resin layer is kept uniform at about 10 μm or less. After that, the upper housing 21 is raised, and at the same time the vacuum pad 37 is also lifted up from the upper housing 21.
rises against. The annular seal 47 is connected to the annular groove 33
Keep a covered.

The lower housing 20 has annular grooves 33a and 33b.
In a state where the pressure is reduced, it is moved to below the irradiation device 3 shown in FIG. 1, and the irradiation process begins. In the irradiation process, the resin layer made of photopolymer 2P has a thickness of about 10 μm due to the reduced pressure in the annular grooves 33a and 33b.
The substrate is irradiated with ultraviolet light by the irradiation device 3 through the substrate 43 while being maintained at the following temperature, and is cured. The thickness of the cured resin layer is about 10 μm or less. An annular seal 47 is present on the outer edge of the substrate 43, and since the seal 47 is made of a material that transmits ultraviolet rays, the entire resin layer is well irradiated with ultraviolet rays. When the irradiation process is completed, the lower housing 20 is again moved below the upper housing 21, and the peeling process begins.

Regarding the peeling process, see Fig. 3 and Fig. 6 a to b.
The explanation will be based on. When the peeling process begins, the upper housing 21 is lowered to form a sealed chamber with the lower housing 20 again as shown in FIG. It comes into contact with the upper surface and presses the outer edge of the substrate 43. Next, the cam 31 rotates, and in response, the center boss 25 and the substrate 43 are integrally hardened with the photopolymer.
The innermost periphery of the 2P (resin layer) is raised to the extent that it can be peeled off from the stamper 15, for example, by about 1 to 3 mm. As a result, the innermost periphery of the resin layer is peeled off. Note that the maximum stroke of the center boss 25 is, for example, about 8 mm.

In this state, the vacuum piping 36, the communication path 34b, and the pressurizing chamber 36 are connected to the air pressure feeding means (not shown).
By sending compressed air (approximately 1 to 5 kg) to the innermost periphery of the resin layer through a, the outer edge of the substrate 43 is held down by the annular seal 47.
The compressed air flows over the entire surface of the substrate 43 without leaking from the outer edge, and as a result, the resin layer is peeled off over the entire surface except for the outermost edge pressed by the annular seal 47, as shown in FIG. 6b. . Vacuum pad 38 is then depressurized and annular seal 47
rises after suctioning. At the same time, the vacuum pad 37 is lowered and the substrate 43 is lowered as shown in FIG. 6c.
touches the top surface of the The vacuum pad 37 is then reduced to a degree of vacuum of about -650 mmHg, thereby sucking the substrate 43, and rising in this state to peel off the outermost portion of the resin layer. After that, the reduced pressure state is released. Subsequently, in response to the rotation of the cam 31, the center boss 25 moves to the substrate 4.
3 and rises, returning to the initial state shown in FIG. 6d. After that, the upper housing 21 is raised to complete the peeling process. After that, an aluminum vapor-deposited film is applied and an overcoat is applied to complete the optical disc.

In the above embodiment, after maintaining the airtightness of both the inner and outer circumferential parts of the substrate 43 and slightly lifting the inner circumferential part of the substrate 43, the inner circumferential part of the substrate 43 is buffered via the pressurizing chamber 36a. The resin layer is separated from the substrate 43 by pumping pressurized air, but basically, the bonding force between the resin layer and the stamper is relatively weak due to the materials of each material, so the substrate By simply maintaining the airtightness of the inner periphery of 43 and pumping air, the resin layer can be peeled off.

However, peeling using only pressurized air requires highly pressurized air, so when introducing highly pressurized air, it is necessary to mechanically lift the inner periphery of the substrate and peel it off, which is buffered by a pressurized chamber. By feeding air, the minute pits transferred to the surface of the resin layer can be reliably protected.

Effects As explained above, according to the present invention, the outer circumferential portion of the substrate is held against the stamper while the inner circumferential portion is lifted relative to the stamper by the member supporting the inner circumferential portion. A disk manufacturing apparatus capable of quickly and reliably peeling off the disk without damaging the disk can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a front view including a partial cross section of the manufacturing device according to the present invention, FIG. 2 is a side view including a partial cross section of the coating device in FIG. 1, and FIG. 4 is an enlarged view of the main part of FIG. 3, FIGS. 5 a to 5 e are explanatory diagrams of the operation in the transfer process, and FIGS. 6 a to d are explanatory diagrams of the operation in the peeling process. Explanation of symbols of main parts, 1... Coating device, 2...
...Transfer/peeling device, 3...Irradiation device, 13...Discharge device, 14...Needle section, 15...Stamper, 20...Lower housing, 21...Upper housing, 25...Center boss, 31... cam,
37, 38... Vacuum pad, 43... Substrate, 47... Annular seal, 49... Magnet.

Claims (1)

[Claims] 1. In order to peel off the resin layer cured by radiation irradiation between the signal surface of the stamper fixed on the base and the transparent substrate from the stamper together with the transparent substrate, an annular member that presses the transparent substrate against the stamper; and an annular flange that supports the inner circumferential portion of the transparent substrate, and is surrounded at the center of the base and moves so as to separate the inner circumferential portion from the stamper. manufacturing an information recording disk comprising: a center boss that moves together with the center boss and cooperates with the annular flange to airtightly clamp the inner circumferential portion; and pressurized gas supply means. A pressurizing chamber is formed between the center boss and the base around the center boss, and the pressurized gas is supplied from the pressurized gas supply means to the inner peripheral portion through the pressurizing chamber while moving the center boss. An apparatus for manufacturing an information recording disk, characterized in that pressurized gas is fed between the entire edge and the stamper.