JPH02166645A - Manufacture of substrate for optical recording medium - Google Patents
Manufacture of substrate for optical recording mediumInfo
- Publication number
- JPH02166645A JPH02166645A JP32061988A JP32061988A JPH02166645A JP H02166645 A JPH02166645 A JP H02166645A JP 32061988 A JP32061988 A JP 32061988A JP 32061988 A JP32061988 A JP 32061988A JP H02166645 A JPH02166645 A JP H02166645A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- stamper
- recording medium
- optical recording
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 112
- 230000003287 optical effect Effects 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 229920005989 resin Polymers 0.000 claims abstract description 37
- 239000011347 resin Substances 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims abstract description 31
- 230000002093 peripheral effect Effects 0.000 claims description 4
- ILBBNQMSDGAAPF-UHFFFAOYSA-N 1-(6-hydroxy-6-methylcyclohexa-2,4-dien-1-yl)propan-1-one Chemical compound CCC(=O)C1C=CC=CC1(C)O ILBBNQMSDGAAPF-UHFFFAOYSA-N 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 8
- 238000001723 curing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229920005668 polycarbonate resin Polymers 0.000 description 2
- 239000004431 polycarbonate resin Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野コ
本発明は光ビームにより記録、再生を行なうことか可能
な光学的記録媒体用基板の製造方法に関するものである
。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method of manufacturing a substrate for an optical recording medium that can be recorded and reproduced using a light beam.
［従来の技術］
従来、光学的記録媒体用基板の製造方法の１つとして、
スタンパの上に光硬化性スタンパ樹脂を塗布した後、熱
硬化性樹脂、熱可塑性樹脂からなる透明な基板を密着さ
せて基板側から紫外線の如き光エネルギーを封手し、前
記光硬化型樹脂を硬化させてスタンパのレプリカを基板
に転写する、いわゆる２Ｐ法が知られている。この２２
法において、ディスク状の基板とスタンパとの離型方法
として、■基板とスタンパの間に爪状のものを挿入して
離型する方法、■基板を真空チャックして引っ張る方法
、また■基板の中心孔の周辺部を押し上げてＲＩ型する
方法（特開昭５３− ［１３５２号公報）等が知られて
いる。[Prior Art] Conventionally, as one of the methods for manufacturing a substrate for an optical recording medium,
After applying a photocurable stamper resin onto the stamper, a transparent substrate made of a thermosetting resin or a thermoplastic resin is placed in close contact with the stamper, and light energy such as ultraviolet rays is sealed from the substrate side. A so-called 2P method is known in which a replica of the stamper is transferred onto a substrate by curing. This 22
In this method, there are two methods for releasing the disc-shaped substrate and the stamper: ■ a method of inserting a claw-like object between the substrate and the stamper, ■ a method of pulling the substrate by vacuum chuck, and ■ a method of separating the substrate from the stamper. A method is known in which the periphery of the center hole is pushed up to create an RI type (Japanese Patent Application Laid-open No. 1352/1983).
［発明が解決しようとする課８］
しかしながら、上記のいずれの方法においても、下記に
示す様な問題点が残されていた。[Problem 8 to be solved by the invention] However, in any of the above methods, the following problems remain.
すなわち、まず、■の方法の爪状の物を挿入する場合、
離型なかなり容易に行うことができるか、スタンパや光
硬化型樹脂層を傷つけたり、また基板に局所的な力が加
わるため、基板が割れることがあり、歩留り２作業の安
全性に問題があった。In other words, first, when inserting the claw-like object using method ■,
If mold release is fairly easy, it may damage the stamper or photocurable resin layer, and local force may be applied to the substrate, which may cause the substrate to crack, resulting in problems with the safety of the yield 2 work. there were.
次に、■の基板を真空チャックして引っ張る方法は離型
の為に必ずしも適した方法とは言えず、力がうまくかけ
られないため離型が困難である場合が少なくない。また
、部分的に離型するのが困難なため、基板全面を離型し
なければならず、その為には大きな力が必要になり、大
きな装置を必要とする問題があった。Next, the method (2) of vacuum chucking and pulling the substrate is not necessarily suitable for releasing the mold, and it is often difficult to release the mold because the force cannot be applied properly. Furthermore, since it is difficult to release the mold partially, the entire surface of the substrate must be released from the mold, which requires a large force and a large apparatus.
更に、■のディスク状の基板の中心孔の周辺部を押し上
げて離型する方法においては、基板の中心孔付近だけを
押し上げ軸で押し上げるため、基板が大きな場合、離型
が困難になる場合があった。また、離型完了時に、基板
の外周がはね上がるために、離型完了後に押し上げ軸を
下降する際に、はね上がった基板の外周部がスタンパを
傷つける事があった。Furthermore, in the method (3) of pushing up the periphery of the center hole of a disk-shaped substrate to release it from the mold, only the area around the center hole of the substrate is pushed up using the push-up shaft, so if the substrate is large, it may be difficult to release the mold. there were. Furthermore, since the outer periphery of the substrate springs up when the demolding is completed, the outer periphery of the substrate that has sprung up may damage the stamper when the push-up shaft is lowered after the demolding is completed.
本発明は、この様な従来技術の問題点を改善するために
なされたものであり、小さな力で、基板およびスタンパ
を傷つけることがなく、歩留りよく、基板をスタンパか
ら離型することが可能な光学的記録媒体用基板の製造方
法を提供することを目的とするものである。The present invention was made in order to improve the problems of the conventional technology, and it is possible to release the substrate from the stamper with a small force without damaging the substrate or the stamper, and with a high yield. An object of the present invention is to provide a method for manufacturing a substrate for an optical recording medium.
［課題を解決するための手段］
即ち、本発明は、案内溝および記録情報などの凹凸を有
するディスク状のスタンパの上に、光硬化型樹脂を塗布
して中心孔を有するディスク状の基板を積置し、次いで
光を照射して光硬化型樹脂を硬化させて光硬化型樹脂と
基板を一体化した後、スタンパから離型して光学的記録
媒体用基板を製造する方法において、前記光硬化型樹脂
と一体化した基板を真空チャックしてスタンパから引き
上げると共に、その引き上げ方向に基板の中心孔の周辺
部を押し上げて離型することを特徴とする光学的記録媒
体用基板の製造方法である。[Means for Solving the Problems] That is, the present invention coats a photocurable resin on a disc-shaped stamper having unevenness such as guide grooves and recorded information to form a disc-shaped substrate having a center hole. In the method of manufacturing a substrate for an optical recording medium by stacking the photocurable resin and then curing the photocurable resin by irradiating light to integrate the photocurable resin and the substrate, the mold is released from the stamper. A method for manufacturing a substrate for an optical recording medium, characterized in that a substrate integrated with a curable resin is pulled up from a stamper by a vacuum chuck, and the peripheral part of the center hole of the substrate is pushed up in the direction of the lifting direction to release the substrate. be.
以下、本発明を図面に基づいて説明する。Hereinafter, the present invention will be explained based on the drawings.
第１図（ａ）〜（Ｃ）は本発明の光学的記録媒体用基板
の製造方法の一例を示す工程図である。同図において、
本発明の光学的記録媒体用基板の製造方法は、まず、第
１図（ａ）に示す様に、案内溝および記録情報などの凹
凸を有するディスク状のスタンパｌの上に、光硬化型樹
脂２を塗布し、その上に中心孔１０を有するディスク状
の透明な基板３を積置し、次いで透明な基板３側から紫
外線を照射して光硬化型樹脂２を硬化させて光硬化型樹
脂２と基板３を一体化した後、中心部に中心軸７を上下
方向に可動自在に設けた相持体４の上にスタンパｌが接
触する様にｖ１置し、また基板３の上部には真空吸引管
６を有し基板よりやや小さい真空チャック５を０リング
８を介して設器し、真空吸引管６，６ａから吸引して基
板３を真空チャックする。FIGS. 1(a) to 1(C) are process diagrams showing an example of the method for manufacturing an optical recording medium substrate of the present invention. In the same figure,
In the method of manufacturing a substrate for an optical recording medium of the present invention, first, as shown in FIG. A disk-shaped transparent substrate 3 having a center hole 10 is placed thereon, and then ultraviolet rays are irradiated from the side of the transparent substrate 3 to harden the photocurable resin 2. 2 and the substrate 3, the stamper 1 is placed on the supporting body 4, which has a center axis 7 movable in the vertical direction, so that the stamper 1 is in contact with the supporting body 4, and a vacuum is placed on the top of the substrate 3. A vacuum chuck 5 having a suction tube 6 and slightly smaller than the substrate is installed via an O-ring 8, and the substrate 3 is vacuum chucked by suction from the vacuum suction tubes 6, 6a.
次いで、第１図（ｂ）に示す様に、光硬化型樹脂２と一
体化した基板３を真空チャックして、担持体４に真空チ
ャックされているスタンパｌから引き上げると共に、中
心軸７を上方に移動しその引き上げ方向に基板３の中心
孔ＩＯの周辺部１１を押し上げる。Next, as shown in FIG. 1(b), the substrate 3 integrated with the photocurable resin 2 is vacuum chucked and pulled up from the stamper 1 vacuum chucked to the carrier 4, and the central axis 7 is moved upward. , and pushes up the peripheral portion 11 of the center hole IO of the substrate 3 in the lifting direction.
その後、第１図（ｃ）に示す様に、真空チャック５を上
昇させる事により、基板３はスタンパｌから全面剥離さ
れて離型を完了し、光学的記録媒体用基板を得ることが
できる。Thereafter, as shown in FIG. 1(c), by raising the vacuum chuck 5, the entire surface of the substrate 3 is peeled off from the stamper I, completing the mold release and obtaining a substrate for an optical recording medium.
次に、第２図（ａ）〜（Ｃ）は本発明の光学的記録媒体
用基板の製造方法の他の例を示す工程図である。同図に
おいては、担持体４の中心部に設けられている中心軸７
にガス吐出口９が形成されており、第１図と同様に、光
硬化型樹脂２と一体化した基板３を真空チャックしてス
タンパｌから引き上げると共に、中心軸７を上方に移動
しその引き上げ方向に基板３の中心孔ＩＯの周辺部１１
を押し上げ、さらにその際に基板３とスタンパ１の間に
形成された間隙１２に中心軸７に形成されているガス吐
出口９からガスを圧送して離型する方法である。Next, FIGS. 2(a) to 2(C) are process diagrams showing another example of the method for manufacturing an optical recording medium substrate of the present invention. In the figure, a central shaft 7 provided at the center of the carrier 4 is shown.
1, the substrate 3 integrated with the photocuring resin 2 is vacuum chucked and pulled up from the stamper 1, and the central axis 7 is moved upward to pull it up. The peripheral part 11 of the center hole IO of the substrate 3 in the direction
This is a method for releasing the mold by pushing up the stamper and then pumping gas from the gas discharge port 9 formed on the central shaft 7 into the gap 12 formed between the substrate 3 and the stamper 1.
上記の本発明における離型方法においては、強力な真空
チャックは必要ではなく、基板をささえる程度で良い。In the above-described mold release method according to the present invention, a strong vacuum chuck is not necessary, and it is sufficient to just support the substrate.
これは、離型の際に最も力が必要な離型の始まりを、上
記の第１図（ｂ）および第２図（ｂ）に示す様に、基板
の真空チャックと同時に基板の基板の中心孔の周辺部を
押し上げるが、または中心孔の周辺部を押し上げると共
にそこにガスを圧送することにより行なうので、その後
の工程には大きな力がなくても離型することができる。As shown in Figures 1 (b) and 2 (b) above, the beginning of mold release, which requires the most force during mold release, occurs at the same time as the vacuum chuck of the substrate and at the center of the substrate. This is done by pushing up the periphery of the hole, or by pushing up the periphery of the center hole and pumping gas there, so that the mold can be released without a large force in the subsequent process.
本発明において、基板Ｉは記録・再生時に用いられる光
に対して透明なものであれば良く、例えばアクリル樹脂
、エポキシ樹脂等の樹脂、ガラス等を用いることができ
る。In the present invention, the substrate I may be any material as long as it is transparent to the light used during recording and reproduction, and may be made of, for example, resin such as acrylic resin or epoxy resin, glass, or the like.
また、光硬化型樹脂としては、ウレタン系、ポリカーボ
ネイト系などの紫外線硬化型スタンパ樹脂や、電子線、
Ｘ線など硬化型スタンパ樹脂を用いる事も可能である。In addition, photo-curable resins include ultraviolet-curable stamper resins such as urethane-based and polycarbonate-based resins, electron beam,
It is also possible to use a stamper resin that is cured by X-rays or the like.
［作用コ
本発明の光学的記録媒体用基板の製造方法は、案内溝お
よび記録情報などの凹凸を有するディスク状のスタンパ
の上に、光硬化型樹脂を塗布して中心孔を有するディス
ク状の基板を積置し、次いで光を照射して光硬化型樹脂
を硬化させて光硬化型樹脂と基板を一体化した後、基板
を真空チャックしてスタンパから引き上げると共に、そ
の引き上げ方向に基板の中心孔の周辺部を押し上げるか
或いはその押し上げと共に基板とスタンパの間に形成さ
れた間隙にガスを圧送して離型するのて、真空チャック
のみで離型する場合に比べて小さな力で、また基板およ
びスタンパを傷つけることかなく、歩留りよく、基板を
スタンパから離型することが可能となる。[Function] The method of manufacturing a substrate for an optical recording medium of the present invention is to apply a photocurable resin onto a disc-shaped stamper having unevenness such as guide grooves and recording information, and to form a disc-shaped stamper having a central hole. After stacking the substrates and then curing the photocurable resin by irradiating light to integrate the photocurable resin and the substrate, vacuum chuck the substrate and lift it from the stamper, and align the center of the substrate in the lifting direction. By pushing up the periphery of the hole, or by pumping gas into the gap formed between the substrate and stamper at the same time as pushing up, the mold can be released with a smaller force than when releasing using only a vacuum chuck. Moreover, it becomes possible to release the substrate from the stamper with a high yield without damaging the stamper.
［実施例］ 以下、実施例を示し本発明をさらに具体的に説明する。[Example] Hereinafter, the present invention will be explained in more detail with reference to Examples.
実施例１
第１図に示す方法により、光学的記録媒体用基板を製造
した。ピッチＬ、Ｓ ｐ−ｍ 、段差９００人のスパイ
ラル状の案内溝を形成したＮｉスタンパｌ上に、紫外線
硬化型のエポキシアクリレート系の光硬化型樹脂（商品
名： ＭＲＡ−５０００，三菱レイヨン■製）２（以下
、樹脂２と記す）を塗布し、その上に直ｆｆｌ：１０ｍ
ｍφ、内径１５ｍｍφ、厚さ１．２ａ＋ｍのガラス製の
基板３を積置した。樹脂２が基板３の内周縁近傍部分ま
てまわり込まない様にしておき、この状態で、基板３側
から波長：１６０ｎｍの紫外線を基板上の光強度２３０
ｍＷ／ａｍ２で照射し、樹脂２を硬化させた。Example 1 An optical recording medium substrate was manufactured by the method shown in FIG. A UV-curable epoxy acrylate-based photocurable resin (product name: MRA-5000, manufactured by Mitsubishi Rayon ■) was placed on a Ni stamp plate with a spiral guide groove of pitch L, S p-m, and 900 steps. ) 2 (hereinafter referred to as resin 2), and directly ffl: 10 m
Glass substrates 3 having an inner diameter of 15 mm and a thickness of 1.2 a+m were stacked. Prevent the resin 2 from reaching near the inner edge of the substrate 3, and in this state, apply ultraviolet light with a wavelength of 160 nm from the substrate 3 side to a light intensity of 230 nm on the substrate.
The resin 2 was cured by irradiation at mW/am2.
次いで、一体化しているスタンパ、樹脂、基板を、スタ
ンパ１が下となるように、中心軸７の設置されている担
持体４上に積置し、続いて真空吸引管６ａからの真空吸
引により、それらを担持体４上に固定した。また、基板
３上に真空チャック５を積置して、基板３を真空チャッ
クした後、中心軸７を３ ｋｇ／ｃｓ”の力で上に押し
上げ、基板３の内周部から離型を始める。次いで、真空
チャック５を上方に引き上げる事により、基板３をスタ
ンパｌから離型して、光学的記録媒体用基板を製造した
。Next, the integrated stamper, resin, and substrate are stacked on the carrier 4 on which the central shaft 7 is installed, with the stamper 1 facing downward, and then vacuum suction is applied from the vacuum suction tube 6a. , and fixed them on a carrier 4. Further, after placing the vacuum chuck 5 on the substrate 3 and vacuum chucking the substrate 3, the central shaft 7 is pushed upward with a force of 3 kg/cs'', and mold release starts from the inner circumference of the substrate 3. Next, by lifting the vacuum chuck 5 upward, the substrate 3 was released from the stamper 1, and an optical recording medium substrate was manufactured.
実施例２
実施例１の基板をチャックして、中心軸を押し上げる際
、第２図に示す様に、中心軸７を２ｋｇ／ｃｎ＋２の力
で押し上げると共に、中心軸７のガス吐出口９より窒素
ガスを１ｋｇ／ｃ１１２の圧力で流したこと以外は、実
施例Ｉと同様にして光学的記録媒体用基板を製造した。Example 2 When chucking the substrate of Example 1 and pushing up the center shaft, as shown in FIG. An optical recording medium substrate was produced in the same manner as in Example I, except that the gas was flowed at a pressure of 1 kg/c112.
上記の窒素ガスを吐出する事により、基板の局所的に力
を加える事かさけられる。また、離型が始−まると、樹
脂とスタンパ間を、ガスが外周に向かって流れるので、
実施例１よりもよりスムーズに剥離できる。By discharging the nitrogen gas mentioned above, it is possible to avoid applying force locally on the substrate. Additionally, when mold release begins, gas flows between the resin and the stamper toward the outer periphery.
It can be peeled off more smoothly than in Example 1.
実施例３，４
基板としてポリカーボネイト樹脂を用いた以外は、実施
例１．２と同様にして、光学的記録媒体用基板を製造し
た。Examples 3 and 4 A substrate for an optical recording medium was manufactured in the same manner as in Example 1.2, except that polycarbonate resin was used as the substrate.
比較例１ 基板として、ポリカーボネート樹脂を用いた。Comparative example 1 Polycarbonate resin was used as the substrate.
実施例１て用いた基板上面の真空チャックを行なわない
以外は、実施例１と同様にして、光学的記録媒体用基板
を製造した。An optical recording medium substrate was manufactured in the same manner as in Example 1, except that the vacuum chuck on the top surface of the substrate used in Example 1 was not performed.
基板として、樹脂基板を用いた場合、比較例に示す従来
法では、基板中心部を持ち上げる離型の力により基板の
変形があったが、上記の実施例の方法では、基板にかか
る力は小さく、変形する事はなかった。When a resin substrate is used as the substrate, in the conventional method shown in the comparative example, the substrate was deformed due to the release force that lifts the center of the substrate, but in the method of the above example, the force applied to the substrate is small. , there was no deformation.
［発明の効果］
以上説明した様に、本発明の方法によれば、スタンパか
ら基板を離型する際に、基板に局所的に力を加える事が
なく、また従来法に比べ小さな力で離型てききるのて、
基板を傷つけることがなく、歩留りが向上される。更に
、剥離による衝撃がないので、スタンパを傷つける事も
ない。[Effects of the Invention] As explained above, according to the method of the present invention, when releasing the substrate from the stamper, no force is applied locally to the substrate, and the separation can be performed with a smaller force than in the conventional method. Once the mold is finished,
The yield is improved without damaging the substrate. Furthermore, since there is no impact due to peeling, the stamper will not be damaged.
また、離型する際に基板の中心孔の周辺部を押し上げる
と共に、そこにガスを圧送する事により、離型がスムー
ズに行なわれる事の他に、離型詩に発生するゴミが、基
板の外周に向かって流れる前記ガスによって、基板及び
スタンパの外に飛ばされる。したがって、スタンパを傷
つけることかないと共に、欠陥の少ない高品質の光学的
記録媒体用基板を得ることができる。In addition, when releasing the mold, by pushing up the periphery of the center hole of the substrate and pumping gas there, not only does the mold release occur smoothly, but also the dust generated in the mold release area is removed from the substrate. The gas flowing toward the outer periphery is blown out of the substrate and stamper. Therefore, it is possible to obtain a high quality optical recording medium substrate that does not damage the stamper and has few defects.
更に、基板の大きさが大きな場合でも、小さな時と同様
にスムーズに離型する事ができる。Furthermore, even if the substrate is large, it can be released from the mold as smoothly as when it is small.
第１図（ａ）〜（Ｃ）は本発明の光学的記録媒体用基板
の製造方法の一例を示す工程図および第２図（ａ）〜（
Ｃ）は本発明の製造方法の他の例を示す工程図である。
ｌ・・・スタンパ
２・・・紫外線硬化スタンパ樹脂FIGS. 1(a) to (C) are process diagrams showing an example of the method for manufacturing an optical recording medium substrate of the present invention, and FIGS. 2(a) to (C)
C) is a process diagram showing another example of the manufacturing method of the present invention. l... Stamper 2... Ultraviolet curing stamper resin
Claims (2)
ク状のスタンパの上に、光硬化型樹脂を塗布して中心孔
を有するディスク状の基板を積置し、次いで光を照射し
て光硬化型樹脂を硬化させて光硬化型樹脂と基板を一体
化した後、スタンパから離型して光学的記録媒体用基板
を製造する方法において、前記光硬化型樹脂と一体化し
た基板を真空チャックしてスタンパから引き上げると共
に、その引き上げ方向に基板の中心孔の周辺部を押し上
げて離型することを特徴とする光学的記録媒体用基板の
製造方法。(1) A photocurable resin is applied onto a disk-shaped stamper with unevenness such as guide grooves and recorded information, and a disk-shaped substrate with a center hole is placed on top of it, and then light is irradiated to photocure it. In a method for manufacturing a substrate for an optical recording medium by curing a mold resin to integrate the photocurable resin and the substrate and then releasing the mold from a stamper, the substrate integrated with the photocurable resin is vacuum chucked. 1. A method of manufacturing a substrate for an optical recording medium, which comprises lifting the substrate from a stamper using a stamper, and releasing the substrate by pushing up the peripheral part of the center hole of the substrate in the direction of the lifting.
クしてスタンパから引き上げると共に、その引き上げ方
向に基板の中心孔の周辺部を押し上げ、さらに基板とス
タンパの間に形成された間隙にガスを圧送して離型する
請求項１記載の光学的記録媒体用基板の製造方法。(2) The substrate integrated with the photocurable resin is vacuum chucked and lifted from the stamper, and the periphery of the center hole of the substrate is pushed up in the lifting direction, and gas is added to the gap formed between the substrate and the stamper. 2. The method for manufacturing an optical recording medium substrate according to claim 1, wherein the mold is released by pressure-feeding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32061988A JPH02166645A (en) | 1988-12-21 | 1988-12-21 | Manufacture of substrate for optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32061988A JPH02166645A (en) | 1988-12-21 | 1988-12-21 | Manufacture of substrate for optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02166645A true JPH02166645A (en) | 1990-06-27 |
Family
ID=18123431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32061988A Pending JPH02166645A (en) | 1988-12-21 | 1988-12-21 | Manufacture of substrate for optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02166645A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5217850A (en) * | 1991-02-07 | 1993-06-08 | Pioneer Electronic Corporation | Optical recording disk and manufacturing method thereof |
| JP2007242098A (en) * | 2006-03-07 | 2007-09-20 | Ricoh Co Ltd | Sheet peeling method, sheet peeling device, transfer device, coat device, disk manufacturing device and holding device |
| JP2007529851A (en) * | 2004-03-22 | 2007-10-25 | オー・ツェー・エリコン・バルザース・アクチェンゲゼルシャフト | Method and apparatus for separating disk-type substrates |
| US7377765B2 (en) | 2006-02-14 | 2008-05-27 | Hitachi Global Storage Technologies | System, method, and apparatus for non-contact and diffuse curing exposure for making photopolymer nanoimprinting stamper |
| JP2008537513A (en) * | 2005-01-31 | 2008-09-18 | モレキュラー・インプリンツ・インコーポレーテッド | Method for separating a mold from a solidified layer disposed on a substrate |
| JP2009056762A (en) * | 2007-09-03 | 2009-03-19 | Toshiba Mach Co Ltd | Mold release device, feed and discharge system, and mold releasing method |
| WO2010143302A1 (en) * | 2009-06-12 | 2010-12-16 | パイオニア株式会社 | Transfer apparatus, and transfer method |
| WO2011077882A1 (en) * | 2009-12-25 | 2011-06-30 | 株式会社日立ハイテクノロジーズ | Double-side imprint device |
| WO2012096076A1 (en) * | 2011-01-10 | 2012-07-19 | Ｓｃｉｖａｘ株式会社 | Demolding device, demolding method, and imprinting device using said demolding device and demolding method |
-
1988
- 1988-12-21 JP JP32061988A patent/JPH02166645A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5217850A (en) * | 1991-02-07 | 1993-06-08 | Pioneer Electronic Corporation | Optical recording disk and manufacturing method thereof |
| JP2007529851A (en) * | 2004-03-22 | 2007-10-25 | オー・ツェー・エリコン・バルザース・アクチェンゲゼルシャフト | Method and apparatus for separating disk-type substrates |
| EP1730737B1 (en) * | 2004-03-22 | 2013-01-16 | Singulus Technologies AG | Method and apparatus for separating disc-shaped substrates |
| JP2008537513A (en) * | 2005-01-31 | 2008-09-18 | モレキュラー・インプリンツ・インコーポレーテッド | Method for separating a mold from a solidified layer disposed on a substrate |
| US7377765B2 (en) | 2006-02-14 | 2008-05-27 | Hitachi Global Storage Technologies | System, method, and apparatus for non-contact and diffuse curing exposure for making photopolymer nanoimprinting stamper |
| US7731889B2 (en) | 2006-02-14 | 2010-06-08 | Hitachi Global Storage Technologies Netherlands B.V. | Method for non-contact and diffuse curing exposure for making photopolymer nanoimprinting stamper |
| JP2007242098A (en) * | 2006-03-07 | 2007-09-20 | Ricoh Co Ltd | Sheet peeling method, sheet peeling device, transfer device, coat device, disk manufacturing device and holding device |
| JP4601565B2 (en) * | 2006-03-07 | 2010-12-22 | 株式会社リコー | Sheet peeling method and sheet peeling apparatus |
| JP2009056762A (en) * | 2007-09-03 | 2009-03-19 | Toshiba Mach Co Ltd | Mold release device, feed and discharge system, and mold releasing method |
| WO2010143302A1 (en) * | 2009-06-12 | 2010-12-16 | パイオニア株式会社 | Transfer apparatus, and transfer method |
| WO2011077882A1 (en) * | 2009-12-25 | 2011-06-30 | 株式会社日立ハイテクノロジーズ | Double-side imprint device |
| WO2012096076A1 (en) * | 2011-01-10 | 2012-07-19 | Ｓｃｉｖａｘ株式会社 | Demolding device, demolding method, and imprinting device using said demolding device and demolding method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0833315B1 (en) | Method of correcting nonalignment of a storage disc | |
| US7964135B2 (en) | Method and apparatus for imprinting energy ray-setting resin, and discs and semiconductor devices with imprinted resin layer | |
| KR20020093960A (en) | Method of manufacturing disk substrate, and method and device for manufacturing optical disk | |
| JPH02166645A (en) | Manufacture of substrate for optical recording medium | |
| JP5416420B2 (en) | Microstructure transfer device | |
| US7221640B2 (en) | Method of manufacturing an optical storage medium and optical storage medium | |
| JP4577522B2 (en) | Pattern transfer apparatus and pattern transfer method | |
| JPH02126434A (en) | Optical disk substrate molding method | |
| WO2003081584A1 (en) | Multi-layered optical information recording medium manufacturing method | |
| US6280661B1 (en) | Apparatus and process for producing optical recording medium | |
| JPS63131352A (en) | Manufacture of substrate for optical recording medium | |
| JP3232665B2 (en) | Optical disk manufacturing equipment | |
| JP4237231B2 (en) | Disc manufacturing method | |
| KR100923816B1 (en) | Method for manufacturing multi-layer optical information recording medium | |
| JPS6381639A (en) | Production of substrate for optical recording medium | |
| US20050048154A1 (en) | Shape replication method | |
| JP2822251B2 (en) | Disk substrate manufacturing equipment | |
| JPS5942933A (en) | Method and apparatus for manufacture of recording carrier for information | |
| JP2638224B2 (en) | Method and apparatus for duplicating optical record carrier | |
| JPS6253338B2 (en) | ||
| JP2007226870A (en) | Disk manufacturing method and transfer device | |
| JPS61206942A (en) | Production of substrate for optical recording medium | |
| JPH09167385A (en) | 2p molding device | |
| JPH10154360A (en) | Disk sticking apparatus | |
| JP2000251335A (en) | Production of optical information recording medium |