JPS6352954B2 - - Google Patents

Info

Publication number
JPS6352954B2
JPS6352954B2 JP9726285A JP9726285A JPS6352954B2 JP S6352954 B2 JPS6352954 B2 JP S6352954B2 JP 9726285 A JP9726285 A JP 9726285A JP 9726285 A JP9726285 A JP 9726285A JP S6352954 B2 JPS6352954 B2 JP S6352954B2
Authority
JP
Japan
Prior art keywords
distilled water
piping
purity
pipe
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9726285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61257281A (ja
Inventor
Seiichi Tan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP9726285A priority Critical patent/JPS61257281A/ja
Publication of JPS61257281A publication Critical patent/JPS61257281A/ja
Publication of JPS6352954B2 publication Critical patent/JPS6352954B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
JP9726285A 1985-05-08 1985-05-08 高純度蒸溜水供給装置 Granted JPS61257281A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9726285A JPS61257281A (ja) 1985-05-08 1985-05-08 高純度蒸溜水供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9726285A JPS61257281A (ja) 1985-05-08 1985-05-08 高純度蒸溜水供給装置

Publications (2)

Publication Number Publication Date
JPS61257281A JPS61257281A (ja) 1986-11-14
JPS6352954B2 true JPS6352954B2 (enrdf_load_stackoverflow) 1988-10-20

Family

ID=14187625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9726285A Granted JPS61257281A (ja) 1985-05-08 1985-05-08 高純度蒸溜水供給装置

Country Status (1)

Country Link
JP (1) JPS61257281A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63231899A (ja) * 1987-03-18 1988-09-27 Mitsuji Kubota X線撮影装置
JP6409100B2 (ja) * 2016-07-05 2018-10-17 クリーンメカニカル株式会社 蒸留水製造装置及びその制御方法

Also Published As

Publication number Publication date
JPS61257281A (ja) 1986-11-14

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