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YOKOKAWA DENKI KK
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YOKOKAWA DENKI KK
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Application filed by YOKOKAWA DENKI KKfiledCriticalYOKOKAWA DENKI KK
Priority to JP4674680ApriorityCriticalpatent/JPS56143938A/ja
Publication of JPS56143938ApublicationCriticalpatent/JPS56143938A/ja
Publication of JPS6352685B2publicationCriticalpatent/JPS6352685B2/ja
G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
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Physics & Mathematics
(AREA)
General Physics & Mathematics
(AREA)
Measuring Fluid Pressure
(AREA)
Transmission And Conversion Of Sensor Element Output
(AREA)