JPS6352546B2 - - Google Patents
Info
- Publication number
- JPS6352546B2 JPS6352546B2 JP631783A JP631783A JPS6352546B2 JP S6352546 B2 JPS6352546 B2 JP S6352546B2 JP 631783 A JP631783 A JP 631783A JP 631783 A JP631783 A JP 631783A JP S6352546 B2 JPS6352546 B2 JP S6352546B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- electric vibrator
- hole
- nozzle
- bonding interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
- B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
Landscapes
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Special Spraying Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP631783A JPS59132960A (ja) | 1983-01-18 | 1983-01-18 | 霧化ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP631783A JPS59132960A (ja) | 1983-01-18 | 1983-01-18 | 霧化ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59132960A JPS59132960A (ja) | 1984-07-31 |
| JPS6352546B2 true JPS6352546B2 (enrdf_load_stackoverflow) | 1988-10-19 |
Family
ID=11634990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP631783A Granted JPS59132960A (ja) | 1983-01-18 | 1983-01-18 | 霧化ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59132960A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7888844B2 (en) | 2009-06-30 | 2011-02-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Temperature control of micromachined transducers |
-
1983
- 1983-01-18 JP JP631783A patent/JPS59132960A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59132960A (ja) | 1984-07-31 |