JPS6352546B2 - - Google Patents

Info

Publication number
JPS6352546B2
JPS6352546B2 JP631783A JP631783A JPS6352546B2 JP S6352546 B2 JPS6352546 B2 JP S6352546B2 JP 631783 A JP631783 A JP 631783A JP 631783 A JP631783 A JP 631783A JP S6352546 B2 JPS6352546 B2 JP S6352546B2
Authority
JP
Japan
Prior art keywords
nozzle plate
electric vibrator
hole
nozzle
bonding interface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP631783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59132960A (ja
Inventor
Kazushi Yamamoto
Naoyoshi Maehara
Shinichi Nakane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP631783A priority Critical patent/JPS59132960A/ja
Publication of JPS59132960A publication Critical patent/JPS59132960A/ja
Publication of JPS6352546B2 publication Critical patent/JPS6352546B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • B05B17/0646Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto

Landscapes

  • Special Spraying Apparatus (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP631783A 1983-01-18 1983-01-18 霧化ポンプ Granted JPS59132960A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP631783A JPS59132960A (ja) 1983-01-18 1983-01-18 霧化ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP631783A JPS59132960A (ja) 1983-01-18 1983-01-18 霧化ポンプ

Publications (2)

Publication Number Publication Date
JPS59132960A JPS59132960A (ja) 1984-07-31
JPS6352546B2 true JPS6352546B2 (de) 1988-10-19

Family

ID=11634990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP631783A Granted JPS59132960A (ja) 1983-01-18 1983-01-18 霧化ポンプ

Country Status (1)

Country Link
JP (1) JPS59132960A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7888844B2 (en) 2009-06-30 2011-02-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Temperature control of micromachined transducers

Also Published As

Publication number Publication date
JPS59132960A (ja) 1984-07-31

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