JPS6352487B2 - - Google Patents
Info
- Publication number
- JPS6352487B2 JPS6352487B2 JP2614078A JP2614078A JPS6352487B2 JP S6352487 B2 JPS6352487 B2 JP S6352487B2 JP 2614078 A JP2614078 A JP 2614078A JP 2614078 A JP2614078 A JP 2614078A JP S6352487 B2 JPS6352487 B2 JP S6352487B2
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- acoustic wave
- surface acoustic
- piezoelectric body
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012212 insulator Substances 0.000 claims description 22
- 238000010897 surface acoustic wave method Methods 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 229920002120 photoresistant polymer Polymers 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2614078A JPS54118150A (en) | 1978-03-07 | 1978-03-07 | Elastic surface wave element and method of fabricating same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2614078A JPS54118150A (en) | 1978-03-07 | 1978-03-07 | Elastic surface wave element and method of fabricating same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54118150A JPS54118150A (en) | 1979-09-13 |
| JPS6352487B2 true JPS6352487B2 (enrdf_load_stackoverflow) | 1988-10-19 |
Family
ID=12185234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2614078A Granted JPS54118150A (en) | 1978-03-07 | 1978-03-07 | Elastic surface wave element and method of fabricating same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54118150A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008078739A (ja) * | 2006-09-19 | 2008-04-03 | Fujitsu Media Device Kk | 弾性波デバイスおよびフィルタ |
| JP6179593B2 (ja) | 2013-05-27 | 2017-08-16 | 株式会社村田製作所 | 弾性表面波装置 |
-
1978
- 1978-03-07 JP JP2614078A patent/JPS54118150A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54118150A (en) | 1979-09-13 |