JPS6352253B2 - - Google Patents

Info

Publication number
JPS6352253B2
JPS6352253B2 JP56066886A JP6688681A JPS6352253B2 JP S6352253 B2 JPS6352253 B2 JP S6352253B2 JP 56066886 A JP56066886 A JP 56066886A JP 6688681 A JP6688681 A JP 6688681A JP S6352253 B2 JPS6352253 B2 JP S6352253B2
Authority
JP
Japan
Prior art keywords
pressure
guide shaft
fluid
fluid pressure
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56066886A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57184723A (en
Inventor
Hiromasa Fukuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP6688681A priority Critical patent/JPS57184723A/ja
Publication of JPS57184723A publication Critical patent/JPS57184723A/ja
Publication of JPS6352253B2 publication Critical patent/JPS6352253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP6688681A 1981-05-06 1981-05-06 Direct driven guiding device Granted JPS57184723A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6688681A JPS57184723A (en) 1981-05-06 1981-05-06 Direct driven guiding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6688681A JPS57184723A (en) 1981-05-06 1981-05-06 Direct driven guiding device

Publications (2)

Publication Number Publication Date
JPS57184723A JPS57184723A (en) 1982-11-13
JPS6352253B2 true JPS6352253B2 (nl) 1988-10-18

Family

ID=13328823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6688681A Granted JPS57184723A (en) 1981-05-06 1981-05-06 Direct driven guiding device

Country Status (1)

Country Link
JP (1) JPS57184723A (nl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043724U (ja) * 1983-09-02 1985-03-27 東陶機器株式会社 静圧流体軸受スライダー
JPH0749806B2 (ja) * 1986-04-30 1995-05-31 京セラ株式会社 静圧空気直線案内装置
JP2005331048A (ja) * 2004-05-20 2005-12-02 Imv Corp 防振ｘ−ｙテーブル

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53132679A (en) * 1977-04-26 1978-11-18 Masakazu Miyashita Automatic device for correcting position

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53132679A (en) * 1977-04-26 1978-11-18 Masakazu Miyashita Automatic device for correcting position

Also Published As

Publication number Publication date
JPS57184723A (en) 1982-11-13

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