JPS6350475A - Shelf for surface treating device - Google Patents

Abstract

PURPOSE:To treat the whole surface of an article to be treated by forming the title shelf with a fixed shelf arm and a movable shelf arm repeatedly passing through the fixed shelf arm in the vertical direction to change the contact surface of the article with the shelf. CONSTITUTION:In the reaction furnace 10 of the heat treating device, an article to be treated such as a metallic product is placed on the shelf 60, and a superhard material is chemically vapor-deposited. The shelf 60 is formed with a fixed shelf arm 30 which is radially provided in plural stages on the outer periphery of a hollow fixed shaft 21 which is vertically mounted on a horizontal base 3, and a movable shelf arm 40 which is vertically moved in the hollow fixed shaft 21 by a driving gear 50 and radially provided in plural stages on the outer periphery of a movable shaft 31. Besides, the fixed shelf arm 30 is formed by a fixed arm 23 horizontally fixed to the fixed shaft 21 and plural circular arms 24a and 24b. Meanwhile, the movable shelf arm 40 is formed with a movable arm 33 which is horizontally fixed to the movable shaft 31, protrudes from the long hole 22 of the fixed shaft 21, and vertically moves through the fixed arm 23 and plural movable circular arms 34a and 34b.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] This invention relates to a stage for a surface treatment apparatus that mainly uses chemical vapor deposition.

[Prior art and its problems]

In the chemical vapor deposition method, a halogen compound is reacted with hydrocarbon or nitrogen gas in a vacuum furnace heated to high temperature, and the surface of metal products etc. is coated with a superhard material. The devices shown in Figs. 9 to 9 are known. In the figure, a reactor 10 is covered with a bell-shaped heating furnace 1 and has a casing 2 formed in the same shape, a horizontal table 3 that closes the lower opening of the casing 2, and a horizontal table 3 that extends through the horizontal table 3. The main parts are composed of a vacuum suction vibrator 49, a reaction gas pipe 5, and an exhaust gas vibro.

The stage 15 that supports the workpiece 7 in the reactor 10 includes a cylindrical frame 11 and a bottom plate 1 made of wire mesh or the like stretched inside the frame 11.
It is shaped like a bamboo steamer and can be stacked in multiple stages. Therefore, depending on the shape of the workpiece 7, the bottom plate 1
It is supported by being placed directly on the base plate 2, by penetrating the bottom plate 12 and hanging it, or by suspending it via a wire 8 or the like. The superhard material chemically reacted in the reactor 10 is deposited on the surface of the workpiece 70 while floating in the reactor. However, when a vapor deposited layer is required on the entire surface of the article 7 to be treated, there is a drawback that the vapor deposited material is not imprinted on the portions that touch the bottom plate 12 or the wire 8, that is, the entire surface cannot be treated.

It is an object of the present invention to provide a stage for a surface treatment apparatus that can generate a vapor deposited layer over the entire surface of an object to be treated.

[Key points of the invention]

The main point of this invention is to provide a mounting stand for a surface treatment apparatus for chemically vapor depositing a superhard material onto the surface of a gold-layered product, etc., in order to achieve the above-mentioned object. a hollow fixed shaft fixed coaxially with the shaft and provided with a plurality of stages of elongated holes extending radially around the outer periphery and extending along the axis; a hollow fixed shaft fixed horizontally around the outer periphery of the hollow fixed shaft and located between the elongated holes; a plurality of radial fixed arms in multiple stages; a fixed side load arm which is fixed to each of the fixed arms in an axially symmetrical manner and is arranged horizontally in a plurality of rows concentrically with the hollow fixed shaft; , a movable shaft that is inserted into the hollow fixed shaft through the through hole of the horizontal table so as to be freely movable, and engages with a drive device installed outside the furnace to reciprocate up and down;

A movable arm that is fixed horizontally around the outer periphery of the movable shaft and protrudes through each of the elongated holes and moves up and down while sandwiching the fixed arm; and a movable side loading arm consisting of a fan-shaped movable circular arc arm in which a plurality of rows intervening between the plurality of rows of the circular arc arms are arranged horizontally, and the contact surface can be adjusted by moving the workpiece up and down during vapor deposition. This makes it possible to generate a vapor deposited layer on the entire surface.

[Embodiments of the invention]

1 to 6 are diagrams showing one embodiment of the stage of the surface treatment apparatus according to the present invention, in which FIG. 1 is a vertical cross-sectional view of the main part, FIG. 2 is a cross-sectional view of the main part, and FIG. 3 is a cross-sectional view of the main part. 4 is an enlarged perspective view of the main part, FIG. 4 is an enlarged longitudinal sectional view of the main part, and FIGS. 5 and 6 are explanatory views of the operation. In the drawings, parts that are the same as those of the conventional device described above are denoted by the same reference numerals, and the differences will be explained.

This embodiment differs from the conventional device in that a fixed load arm 30 and a movable load arm that passes between the fixed load arm 30 and performs vertical movement. 4
By changing the contact surface between the workpiece 7 and the stage 60, a chemically reacted floating superhard material is deposited on the entire surface. The stage 60 is composed of the above-described stationary stage arm 30 and movable stage arm 40, and a drive device 50 for the movable stage arm 40. The fixed side load arm 30 is fixed vertically on the horizontal table 3 of the reactor 10, and has a hollow fixed shaft 21 coaxial with a through hole 3a provided at the center of the horizontal table 3, and a hollow fixed shaft 21 on the outer periphery of the hollow fixed shaft 21. A plurality of elongated holes 22 are provided and arranged radially along the axis in a plurality of stages, and a plurality of elongated holes 22 are fixed horizontally around the outer periphery of the hollow fixed shaft 21 and arranged radially between each of the elongated holes 22 in each of the plurality of stages. a plurality of fixed arms 23; and arcuate arms 2 fixed to each fixed arm 23 axially symmetrically and arranged concentrically with the hollow fixed shaft 21 in a plurality of rows spaced apart in a horizontal fan shape.
4a, 24b... The movable load arm 40 is connected to the hollow fixed shaft 21 from the horizontal table 30 through hole 3a.
A movable shaft 31 that is movable in the inner axis direction and a long hole 22 of the hollow fixed shaft 21 are horizontally fixed to the outer periphery of the movable shaft 31 by screws 32, and the fixed arm 23 is sandwiched by the vertical movement of the movable shaft 31. A movable arm 33 that moves up and down, and circular arc arms 24a, 24b that are fixed to each of the movable arms 33 axially symmetrically and are concentric with the movable shaft 31 and on the fixed side.
...It is possible to pass through the space between the intervening rows of horizontally arranged fan-shaped movable arms 34a, 34b... and the drive device 50 that is pivotally supported on the outer end of the movable shaft 31. The main element is a mating row 235.

The movable load arm 40 is supported by a support base 36 so as to be able to slide vertically in the axial direction, and a bellows 37 is provided between the horizontal base 3 and the support base 36 to seal the gap between the movable shaft 31 and the through hole 3a. A cooling tank 38 for the movable shaft 31 is integrated with the cooling tank 38, and flexible supply and drain pipes 40, 41 such as rubber hoses for circulating cooling water 39 are connected to the cooling tank 38.

The drive device 50 includes an eccentric cam 46 that engages with the roller 35 of the movable load arm 4o, a bearing 47 that rotatably supports the eccentric cam 46, and a drive motor 49 coupled to the shaft 48 of the eccentric cam 46. It is equipped with

Although not clearly shown in the figure, both the fixed and movable arms 23 that constitute the fixed and movable loading arms 30 and 40
．． 33 and arcuate arm 24a.

24b...; 34a, 34b...... In order to reduce the contact area with the workpiece 7, it is preferable to form the cross section in the shape of a cutting edge.

The operation of the stage 60 in the above configuration will be explained with reference to FIGS. 5 and 6. First, FIG. 5 shows a state in which the workpiece 7 is placed on the stationary loading arm 30, and the fixed loading arm 40 and the movable loading arm 40 are placed on the lower side of the fixed loading arm 40. Moreover, it is located at the lowest position. From this position, the eccentric cam 46 is rotated three times by the drive motor (not shown), and the movable load arm 40 is rotated by the fixed load arm 30.
When the workpiece 7 passes through and emerges above it, the workpiece 7 comes into contact with a different part of the stationary load arm 30 than the part it was in contact with, as shown in FIG. 6, and is lifted.

In this way, each time the movable load arm 40 moves up and down, the fixed load arm 30 and the movable load arm 4
Since the contact area with 0 changes, it becomes possible to generate a vapor deposited layer over the entire surface of the article 7 to be treated.

〔Effect of the invention〕

According to this invention, a hollow fixed shaft and a movable shaft that can be moved inside the hollow fixed shaft are provided on the horizontal table of the reactor, and a fan-shaped comb-shaped load arm that can be switched up and down by the vertical movement of the movable shaft is integrated with both shafts. With this structure, it is possible to provide a stage for a surface treatment apparatus that can evenly deposit a superhard material on the surface of an object to be treated.

[Brief explanation of drawings]

1 to 6 are diagrams showing one embodiment of the stage of the surface treatment apparatus according to the present invention, in which FIG. 1 is a vertical cross-sectional view of the main part, FIG. 2 is a cross-sectional view of the main part, and FIG. 3 is a cross-sectional view of the main part. is an enlarged diagonal opening of the main part, Fig. 4 is an enlarged longitudinal sectional view of the main part, Figs. 5 and 6 are operation explanatory diagrams,
7 to 9 are views showing an example of a stage of a conventional surface treatment apparatus, in which FIG. 7 is a longitudinal sectional view, and FIGS. 8 and 9 are enlarged longitudinal sectional views of main parts. 3...Horizontal table, 7...Product to be processed, 10
...Reaction furnace, 21 ...Hollow fixed shaft, 2
2...Long hole, 23...Fixed arm, 2
4a, 24b... Arc arm, 30...
・Fixed side loading arm, 31...Movable axis, 33.
...Movable arm, 34a, 34b...Movable arc arm, 40...Movable side loading arm, 5
0... Drive device, 60... Loading stand. , ) RO 0 listed color 50,! 5R extra movement 1 Figure 1 21 '2 fixed axis Figure 2 69! Competition Figure 5 Figure 6 Figure 7 Figure 8 Figure 9

Claims (1)

[Claims] 1) A stage for surface treatment equipment that chemically vaporizes superhard substances on the surface of metal products, etc., which is fixed to the horizontal stage of the reactor coaxially with the central through hole and radially radially around the outer periphery to align with the axis. a hollow fixed shaft having a plurality of stages of elongated holes along the hollow fixed shaft; a plurality of radial fixed arms arranged in a plurality of stages horizontally fixed to the outer periphery of the hollow fixed shaft and located between the elongated holes; a fixed side load arm consisting of a fan-shaped arcuate arm fixed to each arm axially symmetrically and arranged horizontally in a plurality of rows concentrically with the hollow fixed shaft; A movable shaft that is inserted through the movable shaft and engages with a drive device installed outside the furnace to reciprocate up and down; a movable shaft that is fixed horizontally around the outer periphery of the movable shaft and protrudes from each of the long holes to sandwich the fixed arm; A movable arm that moves up and down, and a fan-shaped movable circular arc arm that is fixed to each of the movable arms axially symmetrically and has a plurality of horizontally arranged rows that are concentric with the movable axis and intervene between the plurality of rows of the arcuate arms. A workpiece stand for a surface treatment apparatus, comprising a movable workpiece arm.