JPS6350473Y2 - - Google Patents
Info
- Publication number
- JPS6350473Y2 JPS6350473Y2 JP18061282U JP18061282U JPS6350473Y2 JP S6350473 Y2 JPS6350473 Y2 JP S6350473Y2 JP 18061282 U JP18061282 U JP 18061282U JP 18061282 U JP18061282 U JP 18061282U JP S6350473 Y2 JPS6350473 Y2 JP S6350473Y2
- Authority
- JP
- Japan
- Prior art keywords
- introduction pipe
- gas introduction
- main body
- vacuum gauge
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000004512 die casting Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18061282U JPS5985397U (ja) | 1982-12-01 | 1982-12-01 | タ−ボ分子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18061282U JPS5985397U (ja) | 1982-12-01 | 1982-12-01 | タ−ボ分子ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5985397U JPS5985397U (ja) | 1984-06-09 |
| JPS6350473Y2 true JPS6350473Y2 (enExample) | 1988-12-26 |
Family
ID=30391573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18061282U Granted JPS5985397U (ja) | 1982-12-01 | 1982-12-01 | タ−ボ分子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5985397U (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3508483A1 (de) * | 1985-03-09 | 1986-10-23 | Leybold-Heraeus GmbH, 5000 Köln | Gehaeuse fuer eine turbomolekularvakuumpumpe |
| JP2808470B2 (ja) * | 1990-02-06 | 1998-10-08 | 日本原子力研究所 | 真空ポンプ |
-
1982
- 1982-12-01 JP JP18061282U patent/JPS5985397U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5985397U (ja) | 1984-06-09 |
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