JPS6350132U - - Google Patents
Info
- Publication number
- JPS6350132U JPS6350132U JP14269086U JP14269086U JPS6350132U JP S6350132 U JPS6350132 U JP S6350132U JP 14269086 U JP14269086 U JP 14269086U JP 14269086 U JP14269086 U JP 14269086U JP S6350132 U JPS6350132 U JP S6350132U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holders
- guide
- holder
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14269086U JPS6350132U (enExample) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14269086U JPS6350132U (enExample) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350132U true JPS6350132U (enExample) | 1988-04-05 |
Family
ID=31051656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14269086U Pending JPS6350132U (enExample) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350132U (enExample) |
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1986
- 1986-09-19 JP JP14269086U patent/JPS6350132U/ja active Pending