JPH0238732U - - Google Patents
Info
- Publication number
- JPH0238732U JPH0238732U JP11688488U JP11688488U JPH0238732U JP H0238732 U JPH0238732 U JP H0238732U JP 11688488 U JP11688488 U JP 11688488U JP 11688488 U JP11688488 U JP 11688488U JP H0238732 U JPH0238732 U JP H0238732U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cooling
- wafer
- support member
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims 1
- 239000000112 cooling gas Substances 0.000 claims 1
- 238000001073 sample cooling Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11688488U JPH0238732U (enExample) | 1988-09-07 | 1988-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11688488U JPH0238732U (enExample) | 1988-09-07 | 1988-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238732U true JPH0238732U (enExample) | 1990-03-15 |
Family
ID=31359830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11688488U Pending JPH0238732U (enExample) | 1988-09-07 | 1988-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238732U (enExample) |
-
1988
- 1988-09-07 JP JP11688488U patent/JPH0238732U/ja active Pending