JPS635003Y2 - - Google Patents
Info
- Publication number
- JPS635003Y2 JPS635003Y2 JP15440282U JP15440282U JPS635003Y2 JP S635003 Y2 JPS635003 Y2 JP S635003Y2 JP 15440282 U JP15440282 U JP 15440282U JP 15440282 U JP15440282 U JP 15440282U JP S635003 Y2 JPS635003 Y2 JP S635003Y2
- Authority
- JP
- Japan
- Prior art keywords
- tungsten electrode
- electrode
- spacer
- tungsten
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052721 tungsten Inorganic materials 0.000 claims description 39
- 239000010937 tungsten Substances 0.000 claims description 39
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 38
- 125000006850 spacer group Chemical group 0.000 claims description 17
- 238000004458 analytical method Methods 0.000 description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000001637 plasma atomic emission spectroscopy Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000012857 radioactive material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 150000003657 tungsten Chemical class 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15440282U JPS5958351U (ja) | 1982-10-12 | 1982-10-12 | タングステン電極装填用スペ−サ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15440282U JPS5958351U (ja) | 1982-10-12 | 1982-10-12 | タングステン電極装填用スペ−サ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5958351U JPS5958351U (ja) | 1984-04-16 |
| JPS635003Y2 true JPS635003Y2 (OSRAM) | 1988-02-10 |
Family
ID=30341317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15440282U Granted JPS5958351U (ja) | 1982-10-12 | 1982-10-12 | タングステン電極装填用スペ−サ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5958351U (OSRAM) |
-
1982
- 1982-10-12 JP JP15440282U patent/JPS5958351U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5958351U (ja) | 1984-04-16 |
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