JPS6348935Y2 - - Google Patents
Info
- Publication number
- JPS6348935Y2 JPS6348935Y2 JP4795383U JP4795383U JPS6348935Y2 JP S6348935 Y2 JPS6348935 Y2 JP S6348935Y2 JP 4795383 U JP4795383 U JP 4795383U JP 4795383 U JP4795383 U JP 4795383U JP S6348935 Y2 JPS6348935 Y2 JP S6348935Y2
- Authority
- JP
- Japan
- Prior art keywords
- motor
- sample
- micrometer head
- frame
- supporter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 13
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4795383U JPS59152657U (ja) | 1983-03-31 | 1983-03-31 | 電子顕微鏡等の試料移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4795383U JPS59152657U (ja) | 1983-03-31 | 1983-03-31 | 電子顕微鏡等の試料移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59152657U JPS59152657U (ja) | 1984-10-13 |
| JPS6348935Y2 true JPS6348935Y2 (de) | 1988-12-15 |
Family
ID=30178493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4795383U Granted JPS59152657U (ja) | 1983-03-31 | 1983-03-31 | 電子顕微鏡等の試料移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59152657U (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0631642Y2 (ja) * | 1988-01-18 | 1994-08-22 | 工業技術院長 | 精密位置決め機構 |
-
1983
- 1983-03-31 JP JP4795383U patent/JPS59152657U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59152657U (ja) | 1984-10-13 |
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