JPS6348935Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to a sample moving device such as an electron microscope that minutely moves a sample within a sample chamber by directly connecting a motor to a micrometer head.

Because samples in transmission electron microscopes are observed at extremely high magnification, they must be moved very minutely. Conventionally, the movement of the micrometer head is further slowed down by a lever, and then transmitted to the stage inside the sample chamber. There is. In many past devices, the micrometer head is connected to a knob via a shaft, and the sample is manually moved by rotating the knob. However, in recent years, electron microscopes whose various parts are controlled by microcomputers have come into practical use, and sample movement is also changing from manual to electric.

[Prior art]

FIGS. 1 and 2 are diagrams each schematically explaining a conventional electric sample moving device. In FIG. 1, 1 is a lens barrel of an electron microscope, and the lens barrel is composed of a sample image observation chamber 2, an imaging lens system 3, a sample chamber 4, a focusing lens system 5, and an electron gun (not shown). , is loaded on the pedestal 6. A sample stage for holding a sample is housed in the sample chamber so as to be movable at will within a plane perpendicular to the electron beam optical axis, and the sample can be moved via a lever body 7 provided on the outer wall of the sample chamber. is executed. A micrometer head 8 is connected to the lever body, and the micrometer head is connected to a motor 13 fixed to the frame 6 via a coupling 9, a universal joint 10, a shaft 11, and a universal joint 12. With this device, when the motor 13 is controlled and rotated via a microcomputer etc., the rotation is caused by the rotation of the universal joint 1.
2. It is transmitted to the micrometer head 8 via the shaft 11, the universal joint 10 and the coupling 9, and the spindle of the micrometer head moves linearly in accordance with the amount of rotation. The movement is further decelerated by the lever and transmitted to the stage inside the sample chamber, and the sample is moved by a predetermined minute amount.

The moving device shown in FIG. 2 is configured so that the sample can be moved not only electrically but also manually. 15 and clutch mechanisms 16, 17 are added. If the clutch 16 is turned ON and the clutch 17 is turned OFF so that the rotation of the knob 15 is not transmitted to the bevel gear mechanism 14, the sample can be moved by the motor 13 as in FIG. On the other hand, when the clutch 17 is turned ON and the clutch 16 is turned OFF, the connection between the motor 13 and the bevel gear mechanism 14 is severed, and the sample is manually moved using the knob 15. In addition, when both clutches are activated, it is possible to move the sample both electrically and manually.

In such an apparatus, the reason why the sample is moved by a motor is that it is possible to observe any position on the sample with high reproducibility, but as can be seen from FIGS. Since the coupling ring 9, the universal joint 10, the shaft 11, the universal joint 12, etc. are interposed,
This method has the disadvantage that a large backlash occurs and the sample cannot be precisely moved with sufficient reproducibility.

[Purpose of invention]

In view of the above points, it is an object of the present invention to provide a precise sample moving device that does not cause any backlash when the sample is driven by a motor.

[Structure of the idea]

To achieve this purpose, in a device in which a sample stage placed in a sample chamber is minutely moved by a micrometer head, a motor is held in a frame connected to a supporter of the micrometer head, and the rotation of the motor body is The present invention is characterized in that the frame is provided with a guide mechanism that restricts movement of the motor body in the direction of the movement axis of the micrometer head but allows movement of the motor body in the direction of the movement axis of the micrometer head.

〔Example〕

The present invention will be described below based on embodiments shown in the drawings.

FIG. 3 is a front view of the main parts of the first embodiment, and FIG. 4 is a cross-sectional view taken along line A-A in FIG. . In the figure, reference numeral 18 denotes a cylindrical supporter for the micrometer head 8 fixed to the lever body 7. The micrometer head is fixed within the supporter, and the drive section of the head rotates and rotates within the supporter. Axial movement is possible. The supporter is also provided with a window 19 through which the scale of the micrometer can be read. A cylindrical frame 20 is integrated into the supporter 18, and a motor (pulse motor) 13 is housed within the frame 20. The shaft of the motor is a coupling ring 21
is directly connected to the drive section of the micrometer head 8. The motor may have a precision gear reduction mechanism. One or more guide grooves 22 are formed in the frame 20 in the axial direction of the spindle of the micrometer head 8, and protrusions (keys) 23a and 23b of the guide 23 holding the motor are inserted into these grooves. They are slidably fitted.

In such a configuration, the motor 8 is supplied with a predetermined power source,
For example, when a pulse signal is supplied from a computer, the motor rotates by an angle corresponding to the number of pulses. The rotation of the motor is immediately transmitted via the coupling 21 to the drive of the micrometer head, whereby the spindle of the micrometer is moved up and down in the figure. At this time, the drive section of the micrometer head also rotates and moves up and down, but the motor 8 is connected to the guide groove 20 of the frame 20.
Since it is guided by the protrusions 23a and 23b of the motor guide 23 and moves up and down, there is no problem in driving the sample by the micrometer. Moreover, since the motor is prevented from rotating, there are no restrictions on the supply of pulse signals to the motor.

In the device as described above, the motor 13 and the micrometer head 8 are directly connected by the coupling 21, so there is no backlash due to the coupling mechanism, and the rotation by the motor 13 is transmitted extremely accurately, resulting in good reproducibility. Sample movement becomes possible.

FIGS. 5 to 7 show other embodiments of the present invention, in which motor drive and manual operation can be used as appropriate. FIG. 5 is a schematic diagram and corresponds to FIG. FIG. 6 is a front view of the main part of FIG. 5, and FIG. 7 is a sectional view taken along the line B--B. In these figures, the same reference numerals as up to FIG. 4 indicate the same members. In this embodiment, the frame 20 is not fixed to the supporter 18 of the micrometer head, and the bearings 24, 25 are not fixed to the supporter 18 of the micrometer head.
It is configured so that it can be rotated. Further, a universal joint 10 is connected to the frame 20,
Shaft 11 connected to the joint, universal joint 12
Rotation is applied to the frame 20 by a manual knob 15 via an electromagnetic brake 26 and a bevel gear mechanism 14. 27 is a contact, and a contact ring 28 provided between the bearings 24 and 25.
The terminal contacts the terminal to receive a signal (pulse current) from an external power source, and supplies the signal to the motor 13 via the lead wire 29. Since the ring 28 is in a fixed state, even if the motor 13 rotates at the same time as the frame 20, pulsed current can be supplied to the motor through the contacts 27 without any problem. The connection between the motor 13 and the micrometer head 8 and the guide mechanism of the motor 13 are the same as in the embodiment shown in FIG.

In such a device, when the electromagnetic brake 26 is energized, the brake is activated, and a pulse signal is sent to the motor, the frame 20 is fixed by the brake 26.
It has the same function as the embodiment shown in FIGS. 4 and 4, and the sample is driven by a motor 13 directly connected to the micrometer head 8. Next, when the current to the electromagnetic brake 26 is turned off and the braking is released, the knob 15
can now rotate freely, so if you stop supplying power to the motor and rotate knob 15, shaft 1
1, universal joint 10, frame 20, guide 23
The motor itself rotates via the micrometer head, which in turn rotates the micrometer head. In addition, if you want to use both manual and motor drive, the electromagnetic brake 26
When the knob is rotated and a pulse signal is applied to the motor 13 at the same time in a state where the knob is released, both act simultaneously and can be used for rapid feeding of a sample, etc.

〔effect〕

With the configuration described above, the motor is directly connected to the micrometer head, so
There is no backlash like in the past, and the sample can be moved using a precise motor drive. Furthermore, as can be seen from the figure, the drive mechanism can be formed very compactly, and there is no need to worry about where to install the motor.

[Brief explanation of the drawing]

Figures 1 and 2 are schematic diagrams showing examples of conventional sample moving devices, Figure 3 is a front view of main parts of an embodiment of the present invention, and Figure 4 is a cross section taken along line A-A in Figure 3. figure,
FIG. 5 is a schematic diagram of another embodiment of the present invention, FIG. 6 is a front view of the main part thereof, and FIG. 7 is a sectional view taken along the line B--B in FIG. 6. 1: Lens barrel of electron microscope, 4: Sample chamber, 7: Lever body, 8: Micrometer head, 11: Shaft, 13: Motor, 14: Bevel gear mechanism, 15: Manual knob, 18: Micrometer Head supporter, 20: Frame, 21: Coupling, 2
2: Guide groove, 23: Motor guide, 23a, 2
3b: Guide protrusion, 26: Electromagnetic brake.

Claims (1)

[Claims for Utility Model Registration] (1) In a device for finely moving a sample stage placed in a sample chamber using a micrometer head, a motor is held in a frame connected to a supporter of the micrometer head, and the motor body A sample moving device such as an electron microscope, wherein the frame is provided with a guide mechanism that restricts the rotation of the motor body but allows movement of the motor body in the direction of the movement axis of the micrometer head. (2) The sample moving device for an electron microscope or the like according to claim 1, wherein the frame is rotatable with respect to a supporter, and the frame is connected to a manual knob via a shaft. . (3) A brake mechanism is provided in the middle of the shaft,
A sample moving device for an electron microscope or the like according to claim 2, which is configured to operate the brake mechanism to stop driving by a manual knob when the sample is moved by the motor drive.