JPH11287957A - Rough fine movement deriving device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rough fine movement driving device which makes it easy to set a stage to a focus position again, can minimize respective-part damage at the time of a collision between an objective lens and a sample, facilitates switching from motor driving to manual operation and can evade a collision accident due to misoperation. SOLUTION: This device is equipped with a stage 11 where a sample is mounted, a stage position adjusting mechanism 10 which has a rough movement handle 13 and a fine movement handle 12 for rough-finely moving and adjusting the position of the stage 11 and is so provided that when the stage 11 reaches its movement limit by the fine movement handle 12, the fine movement handle 13 beings to rotate, an electric motor 23 which drives and rotates the fine movement handle 12, an index rotary body 27 which rotates together with the rough movement handle 13, a rotation detector 29 which detects the rotation of the index rotary body 27 and means 21, 22, 24 and 10 which set a reference position based on a detection signal outputted from the rotation detector 29 when the stage 11 is made to reach one of the movement limit and position the stage 11 according to the quantity of movement from the reference position.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for a focusing drive of a microscope, etc., and performs coarse and fine adjustments on a stage for mounting a sample to quickly and quickly move the stage to a target position. The present invention relates to a coarse / fine movement driving device for achieving accurate movement, and more particularly, to an improvement in a stage movement limiting means.

[0002]

2. Description of the Related Art Generally, a coarse / fine movement driving device for an optical microscope roughly adjusts a sample to a position near a focal position of an objective lens of a microscope by a coarse movement handle and then finely moves the sample to a focal position with a fine movement handle. It can be adjusted.

[0003] As a document disclosing such a conventional technique, there is Japanese Patent Publication No. 52-43688. In this publication, a fine handle and a coarse handle are provided coaxially,
A "coarse / fine movement device in a precision machine" is disclosed in which the two handles are connected to each other by a reduction gear mechanism so that coarse movement adjustment and fine movement adjustment can be performed by a single guide mechanism.

A coarse and fine movement driving device used in a focusing driving device for a microscope requires a mechanism for preventing the sample and the objective lens from coming into contact with each other so that the sample and the objective lens do not come into contact with each other and be damaged. However, in the case of a coarse / fine movement drive used for a manual focusing drive,
In a normal case, the above problem is often solved because a mechanical stopper for stopping the focusing device at a designated position is provided.

[0005] Further, as a coarse / fine movement driving device for a microscope,
Even if the stage whose movement has been adjusted to an arbitrary position is once lowered for exchanging a sample, it is required that the stage whose movement has been adjusted can be easily reset to the adjusted position.

In recent years, as a focusing drive of a microscope, an electric motor type coarse / fine movement drive is increasing. Since the electric motor type device generally has a large driving ability, when control becomes impossible, there is a possibility that each part of the device including the sample and the objective lens may be greatly damaged as compared with the manual operation. Therefore, when an electric motor-type device becomes uncontrollable, a limit switch is provided at a predetermined position to stop driving the electric motor, and a limit control device that stops the electric motor based on a signal from the limit switch is necessary. Becomes

Japanese Patent Application Laid-Open No. 05-127098 discloses such a limit control device. The apparatus disclosed in this publication stores a focal length between a sample and an objective lens in advance and enables focusing only within a predetermined range from a focal position of the objective lens.

On the other hand, in recent microscope systems such as a confocal scanning laser microscope system and a three-dimensional image construction microscope system, an ordinary optical microscope is often slightly modified as a core microscope or used as it is. In this case, when a general optical microscope that is not motorized for focusing is incorporated in the above-described system, a modification means such as attaching an electric motor to a manual fine-tuning handle or the like is required. However, in order to electrically perform focusing, it is necessary to provide a means for detecting the position of the sample with respect to the focal position of the objective lens. In the absence of such a detecting means, there is a risk that it will take an extremely long time for focusing or that the objective lens and the sample will collide. Therefore, it is necessary to separately provide a means for detecting the position of the sample with respect to the objective lens. However, when the electric motor unit is incorporated in the microscope system, there are disadvantages that the productivity is low and the cost is high because the constituent units are diversified. Further, if the electric motor is attached to a manual handle or the like, inconvenience arises when the stage is to be moved up and down by manual operation. That is, coarse adjustment by manual operation is possible, but in order to perform fine adjustment by manual operation, the excitation of the electric motor must be turned off, and the power supply is turned off.
Operation is required.

[0009]

As described above, the coarse and fine movement driving device used in the conventional focusing driving device of the microscope needs to satisfy various requirements and has a simple structure. It is strongly demanded that it can be manufactured at low cost.

An object of the present invention is to provide a coarse / fine movement which has a simple structure, moves the stage to one movement limit, automatically sets the reference position of the stage, and can easily reset the stage to the focal position. A drive device is provided.

[0011] It is another object of the present invention to provide a coarse motor which can stop the rotation of the electric motor immediately even when the sample collides with the objective lens and can minimize damage to the sample, the objective lens, the stage and the like. An object of the present invention is to provide a fine movement driving device.

[0012]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems and achieve the object, a coarse / fine movement driving device of the present invention is configured as follows. (1) The coarse / fine movement driving device of the present invention has a stage on which a sample for observation is mounted, a coarse movement handle for coarsely adjusting the position of the stage, and a fine movement handle for fine movement adjustment. A stage position adjusting mechanism provided so that the coarse movement handle starts rotating when the stage reaches the movement limit by fine movement adjustment, an electric motor for rotating the fine movement handle, and the coarse movement handle, An index rotator that rotates with the rotation of the coarse movement handle, a rotation detector that detects the rotation of the index rotator, and a rotation detector that is output from the rotation detector when the stage reaches one of the movement limits. Means for setting a reference position based on the detection signal, and performing position adjustment of the stage based on a movement amount from the set reference position. It is a symptom. (2) The coarse / fine movement driving device according to the present invention is the device according to the above (1), further comprising means for stopping rotation of the electric motor when rotation of the index rotating body is detected by the rotation detector. It is characterized by: (3) The coarse / fine movement driving device according to the present invention is the device according to (1), wherein an index rotator having at least two types of information is used, and the rotation direction of the index rotator is determined by a rotation detector. It is characterized by comprising means for detecting and releasing or maintaining the excitation of the electric motor according to the detected rotation direction.

[0013]

(First Embodiment) FIG. 1 is a view showing a configuration of a coarse / fine movement driving device according to a first embodiment of the present invention.
FIG. 1 is a diagram showing an example in which the present invention is applied to a focus driving device of an optical microscope as disclosed in Japanese Patent Publication No. 52-43688. In FIG. 1, reference numeral 10 denotes a stage position adjustment mechanism of the optical microscope, and reference numeral 20 denotes a drive control mechanism. As shown in FIG. 1, a fine adjustment handle 12 and a coarse adjustment handle 13 for moving the stage 11 up and down are attached to a focusing operation portion of the stage position adjustment mechanism 10. 1
4 is a stage stopper, 15 is a sample for observation, and 16 is a rack for driving the stage.

A fine handle and a coarse handle having the same structure as the fine handle 12 and the coarse handle 13 are also provided on the left side of the stage position adjusting mechanism 10 in the figure (not shown). Both are connected so as to interlock with the coarse movement handle 12 and the coarse movement handle 13. Therefore, the manual operation of rotating the fine movement handle 12 and the coarse movement handle 13 can be performed on the left side of the stage position adjustment mechanism 10 in the figure.

FIG. 2 is a view showing the internal structure of the fine movement handle 12 and the coarse movement handle 13. A gear mechanism 30 including a plurality of gears 31 to 35 including a two-stage gear is rotatably mounted inside the coarse movement handle 13 in parallel with the handle axis.

The small gear 31 is directly connected to the fine movement handle (not shown in the figure) 12, and the gear 35 is connected to the stage 11
Is directly connected to a pinion shaft 41 for vertically moving the shaft.
A pinion 42 meshing with the rack 16 is attached to the pinion shaft 41.

The small gear 31 meshes with the large gear portion of the gear 32, the small gear portion of the gear 32 meshes with the large gear portion of the gear 33, and the small gear portion of the gear 33 meshes with the large gear portion of the gear 34. , The small gear portion of the gear 34 meshes with the large gear portion of the large gear 35.

In order to focus by manually operating the stage position adjusting mechanism 10, the observer rotates the fine movement handle 12 and the coarse movement handle 13 to move the stage 11 on which the sample 15 is placed up and down. I just need.

Now, when the observer rotates the fine movement handle 12 rightward in FIG.
The gear 31 that is directly connected to the gear rotates in the direction indicated by the arrow in FIG. The rotation of the gear 31 is transmitted to the gear 35 via the gear 32, the gear 33, and the gear 34 in a reduced manner. As a result, the pinion shaft 41 directly connected to the gear 35 and thus the pinion 42 rotate in the direction of the arrow. Thus, the rack 16 is slightly moved upward in the figure, and the position of the stage 11 is adjusted. If the fine movement handle 12 is rotated counterclockwise in FIG. 2A, the rack 16 provided on the stage 11 is slightly moved downward in the figure to adjust the position of the stage 11.

Next, when the observer turns the coarse movement handle 13 counterclockwise as shown by the arrow in FIG. 2B, the reduction gears 32, of the gear mechanism 30 provided inside the coarse movement handle 13 are provided. 33 and 34 revolve around the small gear 31. At this time, since the shaft of the fine movement handle 12 directly connected to the small gear 31 has a relatively large frictional force, the small gear 31 does not rotate. Therefore, the gear 32 is the small gear 31
Revolves around the circle as shown by the arrow. Accordingly, the gear 33 rotates rightward in the figure, and the gear 34 revolves while rotating leftward in the figure. Therefore, the large gear 35 meshing with the gear 34 rotates clockwise as indicated by the arrow. As a result, the pinion 42 rotates in the arrow direction according to the pinion shaft 41. Thus, the rack 1 provided on the stage 11
6 coarsely moves upward in the figure. If the coarse movement handle 13 is rotated clockwise in FIG. 2B, contrary to the above, the rack 16 provided on the stage 11 moves roughly downward in the figure.

In such a coarse / fine movement operation, when the stage 11 reaches the movement limit position or when the sample 15 collides with an objective lens (not shown), that is, when the stage 11 is prevented from moving for some reason, Since the gear 35 directly connected to the pinion shaft 41 cannot rotate, when the fine movement handle 12 is rotated in this state, the reduction gears 32, 33, and 34 revolve, and the coarse movement handle 13 rotates accordingly. start.

That is, when the fine movement handle 12 is rotated while the stage 11 is stopped, and the small gear 31 is rotated clockwise as shown by an arrow in FIG. 2A, for example, the gear 32 is rotated left and the gear 33 is rotated. Rotates right, and the gear 34 rotates left. At this time, since the large gear 35 does not rotate, the gear 3
4 rolls around the gear 35 and revolves (rotates left in the figure). Accordingly, the other reduction gears 32 and 33 revolve. Thus, the coarse handle 13 rotates counterclockwise as shown by the arrow in FIG.

If the friction force of the stage 11 and the friction force of the coarse movement handle 13 are set appropriately, the stage 1
Coarse handle 1 even if a certain load is applied to 1
3 will rotate.

Returning to FIG. Reference numeral 21 denotes a control unit for controlling the motor. The control unit 21 includes a storage device 22 for storing a motor stop position and the like. The control unit 21 is connected to the drive unit 23.

The drive unit 23 is used to electrically perform the focusing operation, and the stage position adjusting mechanism 10
So that it can be attached integrally to the Drive unit 2
An electric motor 24 is fixed inside the motor 3, and a rotating shaft 25 of the electric motor 24 is provided with a coupling member 26 for transmitting the rotational force of the electric motor 24 to the fine movement handle 12.

On the other hand, an index rotating body 27 is attached to the coarse movement handle 13 of the stage position adjusting mechanism 10. The index rotating body 27 is provided with a marking 28 in which, for example, short linear bodies are arranged at equal intervals in the circumferential direction along the circumferential direction on one end face of the annular member fixedly attached to the coarse movement handle 13. ing. At a predetermined position inside the drive unit 23, the rotation of the marking 28 can be detected.
The rotation detector 29 is fixed. This rotation detector 29
Is connected to the input terminal of the control unit 21, and the input terminal of the electric motor 24 is connected to the output terminal of the control unit 21.

[Basic Operation of Drive Control Mechanism 20] The control unit 21 to the electric motor 2 inside the drive unit 23
When a drive signal is given to 4, the electric motor 24 rotates. Then, the rotation of the electric motor 24 is transmitted to the fine movement handle 12 via the rotation shaft 25 and the coupling member 26, and the fine movement handle 12 rotates. Therefore, the pinion 42 rotates and the rack 16 moves slightly. At this time, since the coarse movement handle 13 does not rotate, the index rotating body 27 does not rotate, and the output of the rotation detector 29 does not change.

However, for some reason, the stage 11
When the fine movement handle 12 rotates with the rotation of the electric motor 24, the coarse movement handle 13 starts rotating as described above. For this reason, the index rotating body 27 closely fixed to the coarse movement handle 13 also rotates.
Then, rotation of the marking 28 provided annularly on one end surface of the index rotating body 27 is detected by the rotation detector 29, and the output of the rotation detector 29 changes. The output change of the rotation detector 29 is transmitted to the control unit 21.
Then, the control unit 21 cuts off the drive signal to the electric motor 24 and stops the rotation of the electric motor 24.

"Focusing operation of drive control mechanism 20" Based on the above basic operation, the actual focusing operation is performed as follows. First, at the time of initial adjustment of the entire apparatus, focusing is performed manually or using an autofocus mechanism. First, the control unit 21 drives the electric motor 24 to move the stage 11 in the first direction in which the sample 15 is separated from the objective lens. When the stage 11 reaches the movement limit, the output of the rotation detector 29 changes and the rotation of the electric motor 24 stops. Therefore, this position is determined as the reference position of the stage 11, and the amount of movement from this reference position to the focus is calculated and stored in the storage device 22. Similarly, the focal position is stored for another objective lens. The position where each objective lens and the stage 11 collide may be stored. Thereafter, when the stage 11 is moved electrically, the position of the stage 11 can be detected and controlled by monitoring the amount of movement from the reference position. This makes it possible to repeatedly and automatically reset the positional relationship between the position of the stage 11 and the focal position when the sample 15 is replaced.
The amount of movement can be controlled by the control unit 21 so that the stage 11 does not move to a position where the sample 15 collides with the objective lens. Therefore, collision between the sample 15 and the objective lens can be prevented.

In the above description, the focal position and the position colliding with the stage 11 are stored for each objective lens. However, the present invention is not limited to this. If the same microscope is used, the focal point of the objective lens is stored. Since the positions are almost the same, the focal position is stored for one objective lens, and the position where the objective lens collides with the stage 11 is calculated and stored from the length of the objective lens based on the focal position. Can be.

During the above-described electric control, the sample 1
5 and the objective lens collide, the coarse movement handle 1
Since the rotation of No. 3 is detected, the control unit 21 stops driving the electric motor 24. Therefore, sample 1
5. Damage to the objective lens, the stage 11 and the like can be minimized.

Generally, the electric motor 2 of the drive unit 23
When the observer 4 is excited, the observer needs a large force exceeding the excitation torque of the electric motor 24 to manually operate the fine movement handle 12 and the coarse movement handle 13.
Therefore, when the electric motor 24 is excited, it is difficult to finely adjust the stage 11 by manual operation. Forcing too much force can damage the focusing mechanism.

In this embodiment, however, the observer moves the coarse movement handle 13 (actually, the stage position adjustment mechanism 10).
When the coarse movement handle provided on the left side of the figure is rotated by manual operation, the excitation of the electric motor 24 is released as soon as it is rotated, so that the coarse movement of the stage 11 can be performed manually. .

As described above, in the present embodiment, by moving the stage 11 to the movement limit, the reference position of the stage 11 can be set, and the focus position of the stage 11 can be easily reset. , By any chance, sample 1
Even when the objective lens 5 collides with the objective lens, the damage can be minimized. When the observer wants to move the stage 11 manually, the excitation of the electric motor 24 is released by rotating the coarse movement handle 13 in the same manner as described above, and the stage 11 can be freely moved.

The index rotating body is not limited to the one shown in this embodiment. As means for detecting the rotation of the coarse moving handle 13, a slit disk or a magnetic piece attached to the coarse moving handle 13 may be used. The movement of the disk on which is attached may be detected by an optical sensor or a magnetic sensor.

(Second Embodiment) FIGS. 3A and 3B
(C) is a diagram showing a second embodiment of the present invention. In the second embodiment, as shown in FIG. 3A, three types of markings 51 and 5 are used instead of the marking 28 shown in FIG.
2 and 53 are provided, and the markings 51, 52 and 53 are attached to three sensors 61, 62 and 63.
This is an example in which the detection is performed by the following.

FIG. 3B shows the markings 51 and 5.
2 and 53 are shown in a linearly developed manner, and three sensors 61, 62 and 63 arranged so as to detect the markings 51, 52 and 53, respectively. is there. As shown, three types of markings 51,
The reference numerals 52 and 53 are arranged repeatedly at predetermined intervals. Therefore, even if the index rotating body 27 moves minutely with the rotation of the coarse movement handle 13, the movement of any one of the markings is detected by the sensors 61, 62, 63. When the coarse movement handle 13 rotates continuously, three types of markings 51, 52,
53 is provided so as to be repeatedly detected by the sensors 61, 62 and 63 in order.

FIG. 3C shows each of the sensors 61, 62, 6.
3 and the relative position of the marking row 50, A, B, C,
Digitize sensor detection signals at D, E, F, G ... ("1")
Is marked and “0” is not marked).

Now, with the rotation of the coarse movement handle 13, the index rotator 27 starts rotating, and the sensors 61, 62, 63
Move relatively in the direction V in the order of A, B, C,..., 63, 61, 62, 63, 6
1, 62, 63... On the contrary, each sensor 6
1, 62, 63 are relatively G, F, E ...
Assuming the case of moving in the direction, the order of the sensors that can obtain the marking detection signal in this case is 63, 62,
61, 63, 62, 61, 63... Therefore, information such as the direction and speed of rotation of the coarse movement handle 13 can be known from the order and timing of the sensors from which the marking detection signal is obtained.

Therefore, in the second embodiment,
The observer manually moves the stage 11 while the electric motor 24 is energized.
When the coarse adjustment handle 13 (actually, the coarse adjustment handle provided on the left side of the stage position adjusting mechanism 10 in the figure) is rotated by hand to move the control unit 2,
Reference numeral 1 denotes whether the rotation direction of the coarse movement handle 13 is the first direction in which the objective lens and the sample 15 are separated or the second direction in which the sample lens 15 approaches, based on the signal timings from the three sensors 61, 62, 63. You can recognize if there is. Therefore, in the case where the objective lens and the sample 15 are in the first direction apart from each other,
When the excitation of the electric motor 14 is released and the manual operation is permitted, and the rotation direction of the coarse movement handle 13 is the second direction in which the objective lens and the sample 15 approach, the excitation of the electric motor 14 is continued, It is possible to control so as to prohibit a rotation operation in which the two approach and cause a collision.

Thus, in the second embodiment, even when the observer switches from electric operation to manual operation, it is possible to prevent collision between the sample 15 and the objective lens due to an operation error of the observer.

As means for detecting the rotation direction of the coarse movement handle 13, three types of markings 51, 52, 53 are provided.
However, the present invention is not limited to the above-described method, and may detect information such as a change in the amount of transmitted light, a change in magnetic force, and a change in capacitance due to the movement of the index rotating body 27.

(Modification) The coarse / fine movement driving device shown in the embodiment includes the following modifications. A plate-shaped indicator rotating body 27 fixed to the coarse movement handle 13 with screws. -A seal-like index rotating body 27 fixed and attached to the coarse movement handle 13. -The thing equivalent to the marking etc. of the indicator rotating body 27 was printed on the surface of the coarse movement handle 13. A rotation detector 29 configured by an infrared sensor configured to irradiate the marking with infrared light and receive the reflected light; -The rotation detector 29 is configured by an imaging device such as a TV camera. The indicator (marking, slit, etc.) of the indicator rotating body 27 is provided on the outer peripheral surface of the coarse movement handle 13.

(Features of Embodiment) [1] The coarse / fine movement driving device described in the embodiment coarsely adjusts the stage (11) on which the sample for observation is mounted and the position of the stage (11). A coarse movement handle (13) for fine adjustment and a fine movement handle (12) for fine adjustment.
A stage position adjusting mechanism (10) provided so that the coarse movement handle (13) starts rotating when the stage (11) reaches the movement limit by the fine movement adjustment by (12), and the fine movement handle (12). An electric motor (23) that is driven to rotate, an index rotator (27) attached to the coarse adjustment handle (13), and rotated with the rotation of the coarse adjustment handle (13), and an index rotator (2
7) a rotation detector (29) for detecting rotation, and the stage (1)
When 1) reaches one of the movement limits, the rotation detector
Means (21, 22, 24, 10) for setting a reference position based on the detection signal output from (29), and performing positioning of the stage (11) by a movement amount from the set reference position;
It is characterized by having.

In the above coarse / fine movement driving device, the stage
By moving (11) to, for example, one of the movement limits on the side remote from the objective lens, the coarse adjustment handle (13) rotates, and the index rotating body (27) rotates accordingly, and this is detected by the rotation detector. (29) detects and the reference position of the stage (11) is automatically set. Then, the position of the stage (11) can be adjusted based on the amount of movement from the set reference position. For this reason, resetting of the focus position of the stage (11) can be performed very easily. [2] The coarse / fine movement driving device described in the embodiment is the same as the above [1].
The apparatus according to claim 1, further comprising: means (21) for stopping rotation of the electric motor (24) when rotation of the index rotating body (27) is detected by the rotation detector (29). I have.

In the coarse / fine movement driving device, when the electric motor (24) is rotated to drive and control the stage position adjusting mechanism (10), the sample (15) and the objective lens collide for some reason. In such a case, the index rotating body (27) rotates together with the coarse movement handle (13), and the rotation is detected by the rotation detector (29).
And the electric motor (2
4) is stopped immediately. Therefore, damage due to the collision can be minimized. Also electric motor (24)
If the observer wants to manually move the stage (11) during the excitation of (1), the excitation of the electric motor (24) is released by manually rotating the coarse adjustment handle (13) once. It is possible to freely perform manual operation without performing any special operation. [3] The coarse / fine movement driving device described in the embodiment is the same as the above [1].
The device according to claim 1, wherein at least two types of information (51,5
The index rotator (2, 53) has an index rotator (27).
7) The rotation direction is detected by the rotation detector (61, 62, 63),
Means (21, 22) for releasing or maintaining the excitation of the electric motor (24) according to the detected rotation direction is provided.

In the coarse / fine movement driving device, the observer manually moves the stage (11) while the electric motor (24) is being excited.
When the coarse adjustment handle (13) is rotated to move the object, the excitation of the electric motor (24) is performed when the rotation direction of the coarse adjustment handle (13) is a direction in which the objective lens and the sample (15) are separated from each other. Is released to allow manual operation, and when the rotation direction of the coarse movement handle (13) is in the direction in which the objective lens and the sample (15) collide, the excitation of the electric motor (24) is continued to The operation can be set so as to prohibit the rotation operation of the observer. Thus, even when the observer switches from the electric operation to the manual operation, it is possible to prevent a collision between the sample (15) and the objective lens due to an operation error of the observer.

[0048]

According to the present invention, the reference position of the stage is automatically set by moving the stage to one of the movement limits, and the resetting of the stage to the focal position can be easily realized. be able to.

Further, even when the sample and the objective lens collide, the rotation of the electric motor is immediately stopped, and damage to the sample, the objective lens, the stage, and the like can be minimized.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a coarse / fine movement driving device according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing an internal structure of a coarse movement handle and a fine movement handle of the coarse / fine movement drive device according to the first embodiment of the present invention.

FIG. 3 is a diagram showing a configuration of a main part of a coarse / fine movement driving device according to a second embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Stage position adjustment mechanism of an optical microscope 11 ... Stage 12 ... Fine movement handle 13 ... Coarse movement handle 15 ... Sample for observation 16 ... Rack for stage drive 21 ... Control unit 22 ... Storage device 23 ... Drive unit 24 ... Electric motor Reference numeral 25: rotating shaft 26: coupling member 27: index rotating body 28: marking 29: rotation detector 30: gear mechanism 31 to 35: gear 41: pinion shaft 42: pinion 50: marking row 51 to 53: marking 61 to 63 … Sensor

Claims (3)

[Claims] A stage on which a sample for observation is mounted; a coarse handle for coarsely adjusting the position of the stage; and a fine handle for finely adjusting the position of the stage. A stage position adjusting mechanism provided so that the coarse movement handle starts rotating when the movement limit is reached; an electric motor for rotating and driving the fine movement handle; and a motor attached to the coarse movement handle for rotating the coarse movement handle. An index rotator that rotates with it, a rotation detector that detects the rotation of the index rotator, and a reference based on a detection signal output from the rotation detector when the stage reaches one of the movement limits. Means for setting a position and adjusting the position of the stage according to the amount of movement from the set reference position. Drive. 2. The coarse / fine movement driving device according to claim 1, further comprising means for stopping rotation of the electric motor when rotation of the index rotating body is detected by the rotation detector. 3. An index rotator having at least two types of information is used, a rotation direction of the index rotator is detected by a rotation detector, and excitation of the electric motor is released or maintained according to the detected rotation direction. 2. The coarse and fine movement driving device according to claim 1, further comprising means.