JPS634890A - Washer for small-sized part - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cleaning device, and more particularly, to a cleaning device suitable for cleaning small processed products such as small optical parts, magnetic materials, and ceramics.

[Conventional technology]

In general, cleaning methods include brush cleaning, high-pressure jet cleaning, ultrasonic cleaning, etc. These wet cleaning methods are effective for removing inorganic substances, while dry cleaning methods such as ozone cleaning using ultraviolet rays are effective for removing organic substances. It is said to be effective for

However, even when performing wet cleaning, if the surface of the object to be cleaned has unevenness, it is necessary to use the various types of cleaning described above, and cleaning small and precise parts such as optical parts and magnetic head parts, intermediate parts, etc. If a post-process such as thin film formation is required after cleaning for a finished product, the surface is required to have the same level of cleanliness as a semiconductor wafer.

Conventionally, the above-mentioned small parts and small processed products have been cleaned by storing a large number of them in a cylindrical cleaning container made of metal or plastic and performing steam cleaning or ultrasonic cleaning, as in the invention of JP-A No. 48-41553. What is known is what is done.

[Problem that the invention seeks to solve]

As mentioned above, many of the conventional techniques mainly use ultrasonic cleaning, and therefore, when higher cleanliness is required, the problem is that the cleaning ability is limited. The present invention was made to solve the above-mentioned problems, and it is possible to select and combine various cleaning means such as brush cleaning, high-pressure jet, and ozone cleaning.

The purpose of the present invention is to provide a cleaning device having a high degree of cleaning ability.

[Means for solving problems]

The above object is achieved by installing a flat plate on the circumference equidistant from the center of rotation of the base plate with a rotating shaft to which the object to be cleaned can be detachably fixed.

[Effect]

Since the small object to be cleaned is fixed along its circumference on the rotating shaft-equipped base plate with the surface to be cleaned facing upward, the various types of cleaning described above can be performed while rotating the object once, similar to semiconductor wafers. .

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 10.

1 and 2 are illustrations of an embodiment of the present invention using a mechanical fixing method. In FIG. 1(a), a fixing plate 11 having a recess 11a having larger vertical and horizontal dimensions than the object 2 to be cleaned is arranged on a flat plate 1, and the object 2 to be cleaned is attached to the recess 11a of the fixing plate 11.
a, and is pressed and fixed against the side surface of the object 2 to be cleaned by a fixing screw 12.

Also, as shown in FIG. 1(b), instead of the fixing screw 12, a pin 26. It may be fixed using a spring 27. This embodiment includes other mechanical fixings including chucking.

Figures 3 and 4 show examples of fixing by vacuum suction.

In the figure, an object 2 to be cleaned is suctioned and fixed on a flat plate 1 by a recess 22 having larger vertical and horizontal dimensions than the object 2 and a vacuum hole 25 for vacuum suction. During vacuum suction, the object to be cleaned 2 is suctioned through the vacuum hole 25 of the base plate 3 with a rotating shaft.
is joined to the bottom portion 22a and held airtight, and is fixed together with the flat plate 1 on the base plate 3 with a rotating shaft.

Figures 5 and 6 are illustrations of an embodiment using magnetic force fixation.

In the figure, flat plate 1 is composed of magnet sheet 31 and base 3.
2 and are bonded to each other.

The object 2 to be cleaned is placed on a magnet sheet 31 and fixed by magnetic force.

Figures 7 and 8 show examples of fixing with adhesive or the like.

In the figure, an object to be cleaned 2 is fixed onto a flat plate 1 with adhesive, wax, adhesive tape, or the like.

In each of the above embodiments, the object to be cleaned 2 is arranged and fixed along the circumference of the flat plate 1.

Next, an embodiment of the cleaning operation of the present invention will be described with reference to FIGS. 9 and 10. The object to be cleaned 2 is fixed on a base plate 3 with a rotating shaft inside the cleaning tank 4 . In the case of brush cleaning, the brush 5 installed near the cleaning tank 4 is moved to the object 2 by the brush arm 5a.
Stick it on top. The brush 5 scrubs the surface of the object 2 rotated via the brush arm 5b to remove dirt.

At this time, all the objects 2 to be cleaned come into full contact with the brush 5 by rotating the base plate 3 with a rotating shaft. brush 5
has a cylindrical shape and is flocked in the radial direction, so the object to be cleaned 2
It is suitable for cleaning the concave surfaces of grooves that are continuous in the circumferential direction.

Reference numeral 6 denotes a rinse nozzle, which sprays a cleaning liquid 6a onto the object 2 to be cleaned.

Further, during jet cleaning, the high-pressure jet nozzle 7 is positioned above the object 2 to be cleaned, and the object 2 to be cleaned is sprayed with high-pressure cleaning liquid 7a. In this case as well, all the objects 2 to be cleaned can be completely cleaned by rotating the base plate 3 with a rotating shaft and further reciprocating the high-pressure jet nozzle 7.

In addition to the above, depending on the situation, by attaching an ultrasonic vibrator to the cleaning tank 4 and filling the cleaning tank 4 with cleaning liquid, it is also possible to perform ultrasonic cleaning, which was conventionally applied to small-sized cleaning items. It is also possible to perform ozone cleaning by placing an ultraviolet lamp above the cleaning tank.

After performing brush cleaning, jet cleaning, and ultrasonic cleaning, the liquid adhering to the surface of the object to be cleaned 2 is removed by centrifugal force by rotating the base plate 3 with a rotating shaft at high speed. It is also possible to impart spin.

In addition, although the flat plate is shown in the shape of a disk in each of the above embodiments, it may also be polygonal.

It is also possible to install a running water groove on the upper surface of the flat plate as long as it does not interfere with fixing the object to be cleaned.

Further, as the means for fixing the flat plate and the base plate with a rotating shaft, any of mechanical fixing, vacuum suction, magnetic force, and adhesive can be used, as in the case of fixing the object to be cleaned and the flat plate.

Furthermore, in the above embodiment, the direction of the rotation axis of the flat plate 1 is vertical, but it may be horizontal, vertical, or any other direction.

〔Effect of the invention〕

By carrying out the present invention, small objects to be cleaned, such as electronic components such as magnetic heads and ceramic products, can be removably attached to a flat plate that is integrally fixed to a base plate with a rotating shaft, and can be cleaned with a brush, high-pressure jet, etc. It becomes possible to perform cleaning such as ultrasonic cleaning consistently, and a cleaning effect with a high degree of cleanliness can be obtained.

[Brief explanation of drawings]

FIGS. 1(a) and (b) are plan views of an object to be cleaned mechanically fixed to a flat plate according to the present invention, FIG. 2 is a longitudinal cross-sectional view of FIG. 1(a), and FIG. 3 is a plan view of the present invention. 4 is a vertical sectional view of FIG. 3, FIG. 5 is a plan view of an object to be cleaned fixed to a flat plate according to the present invention by magnetic force, and FIG. The figure is a longitudinal sectional view of Fig. 5, Fig. 7 is a plan view of an object to be cleaned fixed to a flat plate with adhesive according to the present invention, Fig. 8 is a longitudinal sectional view of Fig. 7, and Fig. 9 is a longitudinal sectional view of the present invention. 1 is a side view of FIG. 9. 1... flat plate, 2... object to be cleaned, 3... rotating Base plate with shaft, 4...Cleaning tank, 5...Brush, 6...Rinse nozzle, 7...High pressure jet nozzle. C fp Atsushi 5 Figure Hiroshi 6? η'''' Figure 1 is also 8 Figure 9 Figure is also 10 Figure 5 --- T tsun

Claims (1)

[Claims] 1. A base plate with a rotating shaft, a flat plate in contact with the base plate, means for fixing the flat plate to the base plate with a rotating shaft, and a circumference equidistant from the center of rotation of the flat plate. 1. A cleaning device for small parts, comprising means for detachably fixing small parts at a plurality of locations on the top. 2. Cleaning of small parts according to claim 1, wherein the means for fixing the small parts at a plurality of locations on the circumference equidistant from the center of rotation of the flat plate is mechanical fixation. Device. 3. The cleaning apparatus for small parts according to claim 1, wherein the means for fixing the small parts at a plurality of positions on the circumference equidistant from the center of rotation of the flat plate is vacuum suction. 4. The cleaning device for small parts according to claim 1, wherein the means for fixing the small parts at a plurality of positions on the circumference equidistant from the center of rotation of the flat plate is based on magnetic force. 5. The apparatus for cleaning small parts according to claim 1, wherein the means for fixing the small parts at a plurality of positions on the circumference equidistant from the center of rotation of the flat plate is an adhesive.