JPS6348809Y2 - - Google Patents

Info

Publication number
JPS6348809Y2
JPS6348809Y2 JP9206984U JP9206984U JPS6348809Y2 JP S6348809 Y2 JPS6348809 Y2 JP S6348809Y2 JP 9206984 U JP9206984 U JP 9206984U JP 9206984 U JP9206984 U JP 9206984U JP S6348809 Y2 JPS6348809 Y2 JP S6348809Y2
Authority
JP
Japan
Prior art keywords
air supply
pocket
air
movable table
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9206984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS617617U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9206984U priority Critical patent/JPS617617U/ja
Publication of JPS617617U publication Critical patent/JPS617617U/ja
Application granted granted Critical
Publication of JPS6348809Y2 publication Critical patent/JPS6348809Y2/ja
Granted legal-status Critical Current

Links

JP9206984U 1984-06-20 1984-06-20 静圧スライド Granted JPS617617U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9206984U JPS617617U (ja) 1984-06-20 1984-06-20 静圧スライド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9206984U JPS617617U (ja) 1984-06-20 1984-06-20 静圧スライド

Publications (2)

Publication Number Publication Date
JPS617617U JPS617617U (ja) 1986-01-17
JPS6348809Y2 true JPS6348809Y2 (es) 1988-12-15

Family

ID=30648526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9206984U Granted JPS617617U (ja) 1984-06-20 1984-06-20 静圧スライド

Country Status (1)

Country Link
JP (1) JPS617617U (es)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8277123B2 (en) 2009-02-04 2012-10-02 Fanuc Ltd Fluid bearing structure and method of forming bearing concaves in fluid bearing structure
CN112576622A (zh) * 2020-11-19 2021-03-30 西北工业大学 一种短行程导轨供气的气浮式移动装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645059Y2 (ja) * 1988-09-26 1994-11-16 豊田工機株式会社 摺動案内支持装置
US5148340A (en) * 1990-04-18 1992-09-15 International Business Machines Corporation Bifurcated air bearing actuator assembly for a disk drive system
JPWO2008004306A1 (ja) * 2006-07-07 2009-12-03 平田機工株式会社 静圧形直動案内ユニット
CN113833763A (zh) * 2021-09-22 2021-12-24 哈尔滨工业大学 一种精密运动气浮支撑装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8277123B2 (en) 2009-02-04 2012-10-02 Fanuc Ltd Fluid bearing structure and method of forming bearing concaves in fluid bearing structure
CN112576622A (zh) * 2020-11-19 2021-03-30 西北工业大学 一种短行程导轨供气的气浮式移动装置

Also Published As

Publication number Publication date
JPS617617U (ja) 1986-01-17

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