JPS6348809Y2 - - Google Patents
Info
- Publication number
- JPS6348809Y2 JPS6348809Y2 JP9206984U JP9206984U JPS6348809Y2 JP S6348809 Y2 JPS6348809 Y2 JP S6348809Y2 JP 9206984 U JP9206984 U JP 9206984U JP 9206984 U JP9206984 U JP 9206984U JP S6348809 Y2 JPS6348809 Y2 JP S6348809Y2
- Authority
- JP
- Japan
- Prior art keywords
- air supply
- air
- movable table
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003068 static effect Effects 0.000 claims description 11
- 230000002706 hydrostatic effect Effects 0.000 description 6
- 239000012530 fluid Substances 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9206984U JPS617617U (ja) | 1984-06-20 | 1984-06-20 | 静圧スライド |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9206984U JPS617617U (ja) | 1984-06-20 | 1984-06-20 | 静圧スライド |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS617617U JPS617617U (ja) | 1986-01-17 |
JPS6348809Y2 true JPS6348809Y2 (es) | 1988-12-15 |
Family
ID=30648526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9206984U Granted JPS617617U (ja) | 1984-06-20 | 1984-06-20 | 静圧スライド |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS617617U (es) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8277123B2 (en) | 2009-02-04 | 2012-10-02 | Fanuc Ltd | Fluid bearing structure and method of forming bearing concaves in fluid bearing structure |
CN112576622A (zh) * | 2020-11-19 | 2021-03-30 | 西北工业大学 | 一种短行程导轨供气的气浮式移动装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0645059Y2 (ja) * | 1988-09-26 | 1994-11-16 | 豊田工機株式会社 | 摺動案内支持装置 |
US5148340A (en) * | 1990-04-18 | 1992-09-15 | International Business Machines Corporation | Bifurcated air bearing actuator assembly for a disk drive system |
JPWO2008004306A1 (ja) * | 2006-07-07 | 2009-12-03 | 平田機工株式会社 | 静圧形直動案内ユニット |
CN113833763A (zh) * | 2021-09-22 | 2021-12-24 | 哈尔滨工业大学 | 一种精密运动气浮支撑装置 |
-
1984
- 1984-06-20 JP JP9206984U patent/JPS617617U/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8277123B2 (en) | 2009-02-04 | 2012-10-02 | Fanuc Ltd | Fluid bearing structure and method of forming bearing concaves in fluid bearing structure |
CN112576622A (zh) * | 2020-11-19 | 2021-03-30 | 西北工业大学 | 一种短行程导轨供气的气浮式移动装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS617617U (ja) | 1986-01-17 |
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