JPS6348133U - - Google Patents

Info

Publication number
JPS6348133U
JPS6348133U JP14330186U JP14330186U JPS6348133U JP S6348133 U JPS6348133 U JP S6348133U JP 14330186 U JP14330186 U JP 14330186U JP 14330186 U JP14330186 U JP 14330186U JP S6348133 U JPS6348133 U JP S6348133U
Authority
JP
Japan
Prior art keywords
vibrator
utility
model registration
pressure sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14330186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14330186U priority Critical patent/JPS6348133U/ja
Publication of JPS6348133U publication Critical patent/JPS6348133U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP14330186U 1986-09-17 1986-09-17 Pending JPS6348133U (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14330186U JPS6348133U (fi) 1986-09-17 1986-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14330186U JPS6348133U (fi) 1986-09-17 1986-09-17

Publications (1)

Publication Number Publication Date
JPS6348133U true JPS6348133U (fi) 1988-04-01

Family

ID=31052856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14330186U Pending JPS6348133U (fi) 1986-09-17 1986-09-17

Country Status (1)

Country Link
JP (1) JPS6348133U (fi)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010197374A (ja) * 2009-01-27 2010-09-09 Epson Toyocom Corp 圧力検出ユニット、及び圧力センサー
JP2017125852A (ja) * 2016-01-13 2017-07-20 国立大学法人 東京大学 真空計測センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554559A (en) * 1978-06-27 1980-01-14 Meisei Electric Co Ltd Pressure sensor using crystal vibrator
JPS604836A (ja) * 1983-06-10 1985-01-11 スペリ−・コ−ポレイシヨン 振動クオ−ツダイアフラム圧力感知器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554559A (en) * 1978-06-27 1980-01-14 Meisei Electric Co Ltd Pressure sensor using crystal vibrator
JPS604836A (ja) * 1983-06-10 1985-01-11 スペリ−・コ−ポレイシヨン 振動クオ−ツダイアフラム圧力感知器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010197374A (ja) * 2009-01-27 2010-09-09 Epson Toyocom Corp 圧力検出ユニット、及び圧力センサー
JP2017125852A (ja) * 2016-01-13 2017-07-20 国立大学法人 東京大学 真空計測センサ

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