JPS6347808Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a temperature and humidity control device for an air cleaning unit in a clean room.

In clean rooms such as semiconductor manufacturing factories, multiple air purifying units are arranged in series along the manufacturing line, but some processes on the manufacturing line or production equipment are exposed to high temperature and humidity. If control is required, a small room is formed at that location, and the small room is equipped with an air purifying unit and a temperature/humidity control device.

By the way, recently in semiconductor manufacturing factories, etc., production equipment, equipment, etc. have been rapidly changed, and as a result, many changes have been made to the production line, and when the production line is changed, the temperature and humidity control device must be removed. , not easy to install, move, or change.

Therefore, the present invention aims to construct a temperature and humidity control device that can be easily attached and detached from an air purification unit, thereby facilitating removal, installation, and movement, and facilitating changes to the production line.

As shown in the illustrated embodiment, the present invention provides a temperature and humidity control device for an air purifying unit, which includes an air cooling means 2 in a casing 1 and an automatic control means 3 for controlling the air cooling means. The cooling coil 21 of the air cooling means 2 and the sensor 31 of the automatic control means 3 are made to protrude from the front surface of the casing 1, and are detachably attached to the rear of the air purifying unit as a whole. 31 inserted into the air passage, and the casing 1 is further equipped with an air heating means 4 controlled by the automatic control means 3, with a heater 41 of the air heating means protruding from the front surface of the casing 1. Then, the heater is also inserted into the air passage.

The illustrated embodiment will be described below.

Figures 1 to 3 show an example of implementation, and in the figures, A is a clean room and B is a clean room.
is a maintenance zone, C is a slab, and D is a floor plate with a floating floor structure stretched over the slab with an appropriate space between them.
E is a ceiling plate, F is a partition wall that separates the clean room and maintenance zone, G... is a plurality of air cleaning units attached to the partition wall or ceiling plate, H is
This is a temperature and humidity control device that is detachably attached to one of the air cleaning units.

The partition wall F that separates the clean room A and the maintenance zone B is a so-called steel partition, in which a large number of steel panels Fa are arranged vertically and horizontally, and each is connected by a crescent or other connecting means through a packing material or the like. They are removably connected to each other, and are constructed so that they can be assembled and disassembled as desired. Once assembled, they form a highly airtight wall.

A plurality of air cleaning units G... are continuously arranged in a line along the partition wall F in the clean room A and corresponding to the panels Fa... A vertical duct Ga is provided using the partition wall as a part of the structural member, and a return grill Gb that opens into the clean room and a retan grill Gc that opens to the bottom of the floor are provided at the lower end of the duct. ,Also,
An electric fan Gd... is provided at the upper end of the duct, and an air outlet Ge... with a bottom opening is provided in series with the fan and along the ceiling plate E, and an air purifying filter Gf... is installed in the air outlet. Then, by operating the fan Gd..., the circulating air Gc... that has passed under the floor in the clean room A and through the gas vent Gb is introduced into the duct Ga..., and the air purifying filter Gf... removes dust and smoke particles. The air is removed and blown out as clean air into the clean room A from the outlet Ge.

The temperature and humidity control device H includes a water-cooled air cooling means 2
The casing 1 is equipped with an energized air heating means 4, and an automatic control means 3 for electrically controlling these.

The casing 1 is provided with wheels 11 on the lower surface so that it can move on the slab C, and the upper part of the front surface protrudes forward, and the periphery of the protrusion corresponds to one panel Fa in the middle of the partition wall F. flange 12,
12 is provided in a protruding manner, and coupling means such as crescents 13, 13 shown in FIG. And the flanges 12, 12 are inserted into the partition wall F instead of one panel Fa... (panel used as an inspection door) in the middle of the partition wall F, and are detachably connected to the partition wall F by a coupling means. I have to. In other words, the protrusions and flanges 12, 12 replace the panels, and the air purifying unit G
It also serves as a component of the duct Gb... of...

The water-cooled air cooling means 2 has a cooling coil 21 (evaporator) projecting upward at a slight angle on the front surface of the casing 1 and at a lower point of the above-mentioned protrusion, and directly below the lower end (base) of the cooling coil. A drain tray 22 is disposed, an electric compressor 23 with a water-cooled condenser is provided in the lower part of the casing 1, and piping is appropriately connected between these compressors, the water-cooled condenser, and the cooling coil to form a cooling cycle. , then,
Insert the cooling coil 21 into the duct Gb of the air purifying unit G, connect the drain tray 22 to the drain pipe outside the casing 1, and connect the water-cooled condenser to an outdoor cooling water cooling tower for water cooling. Furthermore, the compressor 23 is connected to a power source (indoor wiring) via the automatic control means 3.

The energized air heating means 4 mainly includes an electric heater 41, which is horizontally protruded from the front surface of the casing 1 and at the upper point of the protrusion, and is connected to the air cleaning unit. It is inserted into the duct Gb of G and connected to the power source (indoor wiring) via the automatic control means 3.

The automatic control means 3 includes a temperature and humidity sensor 31 extending from the protrusion of the casing 1, and an appropriate control circuit for introducing a detection signal from the sensor into the upper part of the casing 1, a recorder, and a recorder from the outside.
A control panel 32 is provided with an operating mechanism capable of turning ON, OFF, adjusting, etc., and the control panel is electrically connected to the compressor 23 of the water-cooled air cooling means 2 and the heater 41 of the energized air heating means 4. Then, the sensor 31 is inserted into the upper part of the duct Gb of the air purifying unit G, and the control panel 32 is connected to the power supply (indoor wiring), and the The compressor 23 and the heater 41 are energized, and the control panel turns them on and off according to the detection signal of the sensor 31.
It is controlled by OFF or proportional type.

Next, FIG. 4 shows, as another example of the air cooling means 2, a temperature/humidity control device H equipped with an air cooling type air cooling means.

In this case, the casing 1 is made slightly larger, and on the back side of the casing, an intake port 16 is provided at the bottom and an exhaust port 14 is provided at the top, and a ventilation path leading to these is formed inside the casing, and an exhaust port is provided inside the casing. An electric fan 15 is provided in series with the port 14, an air-cooled condenser 24 is provided in the cooling cycle of the air cooling means, and the air-cooled condenser is disposed in the ventilation passage, and the piping for the drain tray 22 is placed inside the casing. It is drawn in and opened in the ventilation passage, and then,
The operation of the fan 15 causes the air in the maintenance zone B to flow into the casing 1 and to the air-cooled condenser 2.
4 is air-cooled, and the drain water is evaporated using the ventilation and waste heat from the air-cooled condenser.

The temperature and humidity control device H is arranged behind the required air cleaning unit G in the maintenance zone B, and one panel thereof is mounted on the partition wall F.
Insert the cooling coil 21, heater 41, and sensor 31 into the duct Ga of the air purifying unit G and use it in place of the Fa, and when it is not needed, disconnect it from the partition wall F, pull it out, and move it. The remaining opening in the partition wall F is closed by incorporating the panel Fa.

Temperature and humidity control device H incorporated as described above
, due to the operation of air cleaning unit G, the duct
Cooling coil 2 according to the detection of sensor 31 in Ga
1 and a heater 41 appropriately condition the air flowing through the air.

According to the present invention, it can be attached and detached from the air cleaning unit extremely easily, and it can be easily removed, installed, and moved when changing the production line, and the production line can be easily changed.

Furthermore, the structure can be simplified and manufacturing is easy.
Can be provided at low cost.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention; FIG. 1 is a cutaway side view of an example, FIG. 2 is a cutaway plan view of the same example, and FIG.
The figure is an enlarged view of the main part of the same example, and FIG. 4 is a cutaway enlarged side view of the main part of another example. 1...Casing, 2...Air cooling means, 3...
... automatic control means, 4 ... air heating means, 21 ...
Cooling coil, 31...sensor, 41...heater.

Claims (1)

[Claims for Utility Model Registration] (1) In a temperature and humidity control device for an air purifying unit, the casing 1 includes an air cooling means 2 and an automatic control means 3 for controlling the air cooling means 2. The cooling coil 21 and the sensor 31 of its automatic control means 3 are made to protrude from the front surface of the casing 1, and are detachably attached to the back of the air purifying unit.
1. A temperature and humidity control device for an air cleaning unit, characterized in that the temperature and humidity control device is configured such that the sensor 1 and the sensor 31 are inserted into an air passage. (2) The casing 1 is provided with an air heating means 4 controlled by the automatic control means 3, and the heater 41 of the air heating means is made to protrude from the front surface of the casing 1,
The temperature and humidity control device for an air cleaning unit according to claim 1, wherein the heater is also inserted into the air passage of the air cleaning unit.