JPS6346833Y2 - - Google Patents
Info
- Publication number
- JPS6346833Y2 JPS6346833Y2 JP8027082U JP8027082U JPS6346833Y2 JP S6346833 Y2 JPS6346833 Y2 JP S6346833Y2 JP 8027082 U JP8027082 U JP 8027082U JP 8027082 U JP8027082 U JP 8027082U JP S6346833 Y2 JPS6346833 Y2 JP S6346833Y2
- Authority
- JP
- Japan
- Prior art keywords
- main body
- electrode
- movable electrode
- chamber
- differential pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000003801 milling Methods 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8027082U JPS58182136U (ja) | 1982-05-31 | 1982-05-31 | 差圧伝送器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8027082U JPS58182136U (ja) | 1982-05-31 | 1982-05-31 | 差圧伝送器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58182136U JPS58182136U (ja) | 1983-12-05 |
| JPS6346833Y2 true JPS6346833Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-12-05 |
Family
ID=30089423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8027082U Granted JPS58182136U (ja) | 1982-05-31 | 1982-05-31 | 差圧伝送器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58182136U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1982
- 1982-05-31 JP JP8027082U patent/JPS58182136U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58182136U (ja) | 1983-12-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1218713B1 (en) | Capacitive pressure sensor | |
| US6029525A (en) | Capacitive based pressure sensor design | |
| JP3410095B2 (ja) | 基台装着式容量型圧力センサ | |
| US6205861B1 (en) | Transducer having temperature compensation | |
| US5587601A (en) | Support structure for a semiconductor pressure transducer | |
| US5616844A (en) | Capacitance type acceleration sensor | |
| US5442962A (en) | Capacitive pressure sensor having a pedestal supported electrode | |
| US20010032515A1 (en) | Oil-less differential pressure sensor | |
| JPS6356935B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JP2503290B2 (ja) | 半導体圧力・差圧測定ダイヤフラム | |
| JPH04502508A (ja) | 多係数圧力センサ | |
| JPH10339675A (ja) | 力センサ | |
| JPS5814610B2 (ja) | コンデンサ型感知装置 | |
| EP1309840B1 (en) | Capacitive based pressure sensor design | |
| JPH11295176A (ja) | 差圧センサ | |
| JPS6346833Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| US4653329A (en) | Pressure detector and strain member therefor | |
| JPH07174652A (ja) | 半導体圧力センサ及びその製造方法並びに圧力検出方法 | |
| JP2005121628A (ja) | 圧力センサ | |
| JP2007101222A (ja) | 圧力センサ | |
| WO1995024624A1 (en) | Pressure gauge | |
| JPS6316994Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPS5842943A (ja) | 差動容量式圧力・差圧計 | |
| GB2101331A (en) | Capacitive differential pressure transducer | |
| JPS601402Y2 (ja) | 静電容量式差圧伝送器 |