JPS634657B2 - - Google Patents

Info

Publication number
JPS634657B2
JPS634657B2 JP55188091A JP18809180A JPS634657B2 JP S634657 B2 JPS634657 B2 JP S634657B2 JP 55188091 A JP55188091 A JP 55188091A JP 18809180 A JP18809180 A JP 18809180A JP S634657 B2 JPS634657 B2 JP S634657B2
Authority
JP
Japan
Prior art keywords
gate
gas
thin film
oxide film
field oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55188091A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57111439A (en
Inventor
Katsuhiro Teraishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP55188091A priority Critical patent/JPS57111439A/ja
Publication of JPS57111439A publication Critical patent/JPS57111439A/ja
Publication of JPS634657B2 publication Critical patent/JPS634657B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Computer Hardware Design (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP55188091A 1980-12-29 1980-12-29 Gas detecting element Granted JPS57111439A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55188091A JPS57111439A (en) 1980-12-29 1980-12-29 Gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55188091A JPS57111439A (en) 1980-12-29 1980-12-29 Gas detecting element

Publications (2)

Publication Number Publication Date
JPS57111439A JPS57111439A (en) 1982-07-10
JPS634657B2 true JPS634657B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-29

Family

ID=16217540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55188091A Granted JPS57111439A (en) 1980-12-29 1980-12-29 Gas detecting element

Country Status (1)

Country Link
JP (1) JPS57111439A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62250352A (ja) * 1986-04-23 1987-10-31 Seitai Kinou Riyou Kagakuhin Shinseizou Gijutsu Kenkyu Kumiai 電界効果トランジスタ型酸素ガスセンサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5226292A (en) * 1975-08-23 1977-02-26 Res Dev Corp Of Japan Ion sensor

Also Published As

Publication number Publication date
JPS57111439A (en) 1982-07-10

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