JPS6345467B2 - - Google Patents

Info

Publication number
JPS6345467B2
JPS6345467B2 JP28472485A JP28472485A JPS6345467B2 JP S6345467 B2 JPS6345467 B2 JP S6345467B2 JP 28472485 A JP28472485 A JP 28472485A JP 28472485 A JP28472485 A JP 28472485A JP S6345467 B2 JPS6345467 B2 JP S6345467B2
Authority
JP
Japan
Prior art keywords
substrate
vacuum
chamber
processing
preliminary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28472485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62142791A (ja
Inventor
Katsuzo Ukai
Tsutomu Tsukada
Toshio Adachi
Koji Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP28472485A priority Critical patent/JPS62142791A/ja
Publication of JPS62142791A publication Critical patent/JPS62142791A/ja
Publication of JPS6345467B2 publication Critical patent/JPS6345467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP28472485A 1985-12-18 1985-12-18 真空処理装置 Granted JPS62142791A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28472485A JPS62142791A (ja) 1985-12-18 1985-12-18 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28472485A JPS62142791A (ja) 1985-12-18 1985-12-18 真空処理装置

Publications (2)

Publication Number Publication Date
JPS62142791A JPS62142791A (ja) 1987-06-26
JPS6345467B2 true JPS6345467B2 (enrdf_load_html_response) 1988-09-09

Family

ID=17682162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28472485A Granted JPS62142791A (ja) 1985-12-18 1985-12-18 真空処理装置

Country Status (1)

Country Link
JP (1) JPS62142791A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003168712A (ja) * 2001-11-30 2003-06-13 Japan Steel Works Ltd:The ロードロック装置の基板搬送方法及びその装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0394070A (ja) * 1989-09-05 1991-04-18 Kokusai Electric Co Ltd Ｃｖｄ装置
JP2002198411A (ja) * 2000-12-26 2002-07-12 Tokyo Electron Ltd 圧力制御方法、搬送装置およびクラスタツール
JP2006324367A (ja) * 2005-05-18 2006-11-30 Disco Abrasive Syst Ltd プラズマエッチング装置
JP2010089014A (ja) * 2008-10-08 2010-04-22 Jpe:Kk プラズマ洗浄装置
CN103866282B (zh) * 2012-12-14 2016-12-21 北京北方微电子基地设备工艺研究中心有限责任公司 Pecvd设备
JP6068511B2 (ja) * 2012-12-26 2017-01-25 麒麟麦酒株式会社 薄膜の成膜装置及び成膜方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003168712A (ja) * 2001-11-30 2003-06-13 Japan Steel Works Ltd:The ロードロック装置の基板搬送方法及びその装置

Also Published As

Publication number Publication date
JPS62142791A (ja) 1987-06-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term