JPS6344753U - - Google Patents

Info

Publication number
JPS6344753U
JPS6344753U JP13890486U JP13890486U JPS6344753U JP S6344753 U JPS6344753 U JP S6344753U JP 13890486 U JP13890486 U JP 13890486U JP 13890486 U JP13890486 U JP 13890486U JP S6344753 U JPS6344753 U JP S6344753U
Authority
JP
Japan
Prior art keywords
shaft
pressure roller
pressure
arm
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13890486U
Other languages
Japanese (ja)
Other versions
JPH067883Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986138904U priority Critical patent/JPH067883Y2/en
Publication of JPS6344753U publication Critical patent/JPS6344753U/ja
Application granted granted Critical
Publication of JPH067883Y2 publication Critical patent/JPH067883Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例を示す斜視図、第２
図は、従来の一例を示す斜視図である。 １……スピンドル、２……基板、３……研磨用
テープ、４……加圧用ローラ、８……アーム、９
……回転支点軸、１０……エアーシリンダ、１９
……圧力変換器、２３……切換弁、３０……スピ
ンドル、３１……基板、３２……研磨用テープ、
３３……加圧用ローラ、３６……加圧用スプリン
グ。 Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a perspective view showing a conventional example. DESCRIPTION OF SYMBOLS 1... Spindle, 2... Substrate, 3... Polishing tape, 4... Pressure roller, 8... Arm, 9
... Rotation fulcrum shaft, 10 ... Air cylinder, 19
... Pressure transducer, 23 ... Switching valve, 30 ... Spindle, 31 ... Substrate, 32 ... Polishing tape,
33... Pressure roller, 36... Pressure spring.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 研摩用テープと略同一巾で外周を弾性材料で被
覆した円筒状の加圧用ローラと、前記加圧用ロー
ラの中心を貫ぬき前記加圧用ローラの両端内径を
保持する玉軸受を有するシヤフトと、一端に前記
シヤフトを固定し中央部に回転支点軸を有しその
回転支点軸を中心にして揺動するアームと、前記
加圧用ローラの取付け位置と反対側の端部にジヨ
イントを介して連結し前記アームを揺動するエア
ーシリンダと、前記エアーシリンダの加圧口にチ
ユーブで接続し圧搾空気の圧力を所定の制御信号
に応じて変換し供給する圧力変換器とを含むこと
を特徴とする研磨機構。 a cylindrical pressure roller having approximately the same width as the abrasive tape and whose outer periphery is covered with an elastic material; a shaft having ball bearings that penetrate through the center of the pressure roller and hold the inner diameters of both ends of the pressure roller; The shaft is fixed to the shaft, and the arm having a rotational fulcrum shaft in the center and swinging around the rotational fulcrum shaft is connected via a joint to the end opposite to the mounting position of the pressure roller. A polishing mechanism comprising: an air cylinder that swings an arm; and a pressure converter that is connected to a pressurizing port of the air cylinder through a tube and converts and supplies the pressure of compressed air according to a predetermined control signal. .
JP1986138904U 1986-09-09 1986-09-09 Polishing equipment Expired - Lifetime JPH067883Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986138904U JPH067883Y2 (en) 1986-09-09 1986-09-09 Polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986138904U JPH067883Y2 (en) 1986-09-09 1986-09-09 Polishing equipment

Publications (2)

Publication Number Publication Date
JPS6344753U true JPS6344753U (en) 1988-03-25
JPH067883Y2 JPH067883Y2 (en) 1994-03-02

Family

ID=31044308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986138904U Expired - Lifetime JPH067883Y2 (en) 1986-09-09 1986-09-09 Polishing equipment

Country Status (1)

Country Link
JP (1) JPH067883Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1015802A (en) * 1996-07-10 1998-01-20 Sony Corp Polishing device and polishing method
JP2011224680A (en) * 2010-04-16 2011-11-10 Ebara Corp Polishing method and device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5622211A (en) * 1979-07-30 1981-03-02 Hitachi Ltd Finishing method and its device for magnetic head
JPS6076954A (en) * 1983-09-30 1985-05-01 Victor Co Of Japan Ltd Magnetic disc polishing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5622211A (en) * 1979-07-30 1981-03-02 Hitachi Ltd Finishing method and its device for magnetic head
JPS6076954A (en) * 1983-09-30 1985-05-01 Victor Co Of Japan Ltd Magnetic disc polishing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1015802A (en) * 1996-07-10 1998-01-20 Sony Corp Polishing device and polishing method
JP2011224680A (en) * 2010-04-16 2011-11-10 Ebara Corp Polishing method and device

Also Published As

Publication number Publication date
JPH067883Y2 (en) 1994-03-02

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