JPS6344753U - - Google Patents
Info
- Publication number
- JPS6344753U JPS6344753U JP13890486U JP13890486U JPS6344753U JP S6344753 U JPS6344753 U JP S6344753U JP 13890486 U JP13890486 U JP 13890486U JP 13890486 U JP13890486 U JP 13890486U JP S6344753 U JPS6344753 U JP S6344753U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- pressure roller
- pressure
- arm
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 3
- 239000013013 elastic material Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986138904U JPH067883Y2 (ja) | 1986-09-09 | 1986-09-09 | 研磨装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986138904U JPH067883Y2 (ja) | 1986-09-09 | 1986-09-09 | 研磨装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6344753U true JPS6344753U (de) | 1988-03-25 |
| JPH067883Y2 JPH067883Y2 (ja) | 1994-03-02 |
Family
ID=31044308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986138904U Expired - Lifetime JPH067883Y2 (ja) | 1986-09-09 | 1986-09-09 | 研磨装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH067883Y2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1015802A (ja) * | 1996-07-10 | 1998-01-20 | Sony Corp | 研磨装置および研磨方法 |
| JP2011224680A (ja) * | 2010-04-16 | 2011-11-10 | Ebara Corp | 研磨方法及び研磨装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5622211A (en) * | 1979-07-30 | 1981-03-02 | Hitachi Ltd | Finishing method and its device for magnetic head |
| JPS6076954A (ja) * | 1983-09-30 | 1985-05-01 | Victor Co Of Japan Ltd | 磁気デイスク研摩装置 |
-
1986
- 1986-09-09 JP JP1986138904U patent/JPH067883Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5622211A (en) * | 1979-07-30 | 1981-03-02 | Hitachi Ltd | Finishing method and its device for magnetic head |
| JPS6076954A (ja) * | 1983-09-30 | 1985-05-01 | Victor Co Of Japan Ltd | 磁気デイスク研摩装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1015802A (ja) * | 1996-07-10 | 1998-01-20 | Sony Corp | 研磨装置および研磨方法 |
| JP2011224680A (ja) * | 2010-04-16 | 2011-11-10 | Ebara Corp | 研磨方法及び研磨装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH067883Y2 (ja) | 1994-03-02 |