JPH02145990U - - Google Patents

Info

Publication number
JPH02145990U
JPH02145990U JP5636289U JP5636289U JPH02145990U JP H02145990 U JPH02145990 U JP H02145990U JP 5636289 U JP5636289 U JP 5636289U JP 5636289 U JP5636289 U JP 5636289U JP H02145990 U JPH02145990 U JP H02145990U
Authority
JP
Japan
Prior art keywords
shaft
outer shaft
motor
holding cylinder
bearing holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5636289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5636289U priority Critical patent/JPH02145990U/ja
Publication of JPH02145990U publication Critical patent/JPH02145990U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
JP5636289U 1989-05-16 1989-05-16 Pending JPH02145990U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5636289U JPH02145990U (de) 1989-05-16 1989-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5636289U JPH02145990U (de) 1989-05-16 1989-05-16

Publications (1)

Publication Number Publication Date
JPH02145990U true JPH02145990U (de) 1990-12-11

Family

ID=31580120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5636289U Pending JPH02145990U (de) 1989-05-16 1989-05-16

Country Status (1)

Country Link
JP (1) JPH02145990U (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009153253A (ja) * 2007-12-19 2009-07-09 Daihen Corp 真空搬送装置
JP2015121265A (ja) * 2013-12-24 2015-07-02 キヤノントッキ株式会社 磁性流体軸受装置並びに真空チャンバ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009153253A (ja) * 2007-12-19 2009-07-09 Daihen Corp 真空搬送装置
JP2015121265A (ja) * 2013-12-24 2015-07-02 キヤノントッキ株式会社 磁性流体軸受装置並びに真空チャンバ

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