JPS6344451Y2 - - Google Patents

Info

Publication number
JPS6344451Y2
JPS6344451Y2 JP1984132284U JP13228484U JPS6344451Y2 JP S6344451 Y2 JPS6344451 Y2 JP S6344451Y2 JP 1984132284 U JP1984132284 U JP 1984132284U JP 13228484 U JP13228484 U JP 13228484U JP S6344451 Y2 JPS6344451 Y2 JP S6344451Y2
Authority
JP
Japan
Prior art keywords
chamber
vapor deposition
glass
particles
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984132284U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61116761U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984132284U priority Critical patent/JPS6344451Y2/ja
Publication of JPS61116761U publication Critical patent/JPS61116761U/ja
Application granted granted Critical
Publication of JPS6344451Y2 publication Critical patent/JPS6344451Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984132284U 1984-08-31 1984-08-31 Expired JPS6344451Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984132284U JPS6344451Y2 (pm) 1984-08-31 1984-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984132284U JPS6344451Y2 (pm) 1984-08-31 1984-08-31

Publications (2)

Publication Number Publication Date
JPS61116761U JPS61116761U (pm) 1986-07-23
JPS6344451Y2 true JPS6344451Y2 (pm) 1988-11-18

Family

ID=30690851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984132284U Expired JPS6344451Y2 (pm) 1984-08-31 1984-08-31

Country Status (1)

Country Link
JP (1) JPS6344451Y2 (pm)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141562A (en) * 1979-04-23 1980-11-05 Ricoh Co Ltd Metallizing method
JPS59132284U (ja) * 1983-02-21 1984-09-05 三菱電機株式会社 イルミネ−テツドスピ−カシステム

Also Published As

Publication number Publication date
JPS61116761U (pm) 1986-07-23

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