JPS6344431Y2 - - Google Patents
Info
- Publication number
- JPS6344431Y2 JPS6344431Y2 JP7067083U JP7067083U JPS6344431Y2 JP S6344431 Y2 JPS6344431 Y2 JP S6344431Y2 JP 7067083 U JP7067083 U JP 7067083U JP 7067083 U JP7067083 U JP 7067083U JP S6344431 Y2 JPS6344431 Y2 JP S6344431Y2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- tungsten
- carbon material
- present
- heat shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 13
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 10
- 229910052721 tungsten Inorganic materials 0.000 claims description 10
- 239000010937 tungsten Substances 0.000 claims description 10
- 239000003575 carbonaceous material Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 7
- 229910052715 tantalum Inorganic materials 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 238000002844 melting Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Tunnel Furnaces (AREA)
- Furnace Charging Or Discharging (AREA)
Description
【考案の詳細な説明】
本考案は搬送台に関し、とくにタンタル、タン
グステン等の高融点金属粉末成形体を、高温、高
真空中の焼結時に使用する搬送台の構造に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a conveyor table, and more particularly to the structure of a conveyor table for use in sintering high-melting point metal powder compacts such as tantalum and tungsten at high temperatures and in high vacuum.
一般に、高温、高真空熱処理装置の炉内構造は
その断面を示す第１図の熱処理する製品１（以下
製品と称す）、搬送台２、発熱体３、熱遮蔽体４
からなり、とくに製品１を支える搬送台２には、
第２図に示した構造のように熱変形がしにくく、
高温、高真空中で機械強度と充分な耐荷重性をも
つカーボン材が使用される。また発熱体３、熱遮
蔽体４には、タンタル、タングステン等の高融点
金属が使用される。 Generally, the internal structure of a high-temperature, high-vacuum heat treatment apparatus is shown in FIG.
In particular, the transport platform 2 that supports the product 1 has
Like the structure shown in Figure 2, it is difficult to deform due to heat,
Carbon material is used because it has mechanical strength and sufficient load capacity at high temperatures and high vacuum. Further, for the heating element 3 and the heat shielding body 4, a high melting point metal such as tantalum or tungsten is used.
周知の如く、10-6torr台の真空雰囲気において
は、カーボン材は温度1800℃付近で蒸発を開始す
る。また、タンタル、タングステンは1000℃以上
の温度で、且つカーボンを含む雰囲気ではカーボ
ンと反応し、炭化物を生成する。このため第１図
に示した従来の炉内構造をもつている装置でタン
タル、タングステン等の高融点金属粉末成形体を
高温、高真空中で焼結した時、タンタル、タング
ステン等の発熱体３及び熱遮蔽体４のうち特にカ
ーボン材を使用した搬送台２と対向する部分Ａ
は、局部的に炭化物生成による結晶化と熱変形の
増大が著しく、発熱体３及び熱遮蔽体４を急速に
損傷し、ランニング寿命を短くする欠点を有して
いた。 As is well known, in a vacuum atmosphere on the order of 10 -6 torr, carbon material starts to evaporate at a temperature around 1800°C. Further, tantalum and tungsten react with carbon at temperatures of 1000° C. or higher and in an atmosphere containing carbon to form carbides. Therefore, when a high-melting point metal powder compact such as tantalum or tungsten is sintered in a high-temperature, high-vacuum environment using an apparatus having the conventional furnace structure shown in FIG. and a portion A of the heat shield 4 that faces the transport platform 2, which is made of carbon material in particular.
This had the disadvantage that localized crystallization and thermal deformation due to the formation of carbides were significantly increased, rapidly damaging the heating element 3 and the heat shield 4, and shortening the running life.
本考案はこの点に鑑み、発熱体、熱遮蔽体の寿
命を大幅に延長出来る搬送台を提供することを目
的とする。 In view of this point, it is an object of the present invention to provide a conveyance platform that can significantly extend the life of the heating element and the heat shield.
本考案によれば、搬送台の基材をカーボン材と
し、少なくとも発熱体と対向する面を、タングス
テン金属で被覆したことを特徴とする搬送台が得
られる。 According to the present invention, there is obtained a conveyance table characterized in that the base material of the conveyance table is made of a carbon material, and at least the surface facing the heating element is coated with tungsten metal.
以下、本考案の実施例について第２図、第３図
を参照し説明する。第３図ａに示すように搬送台
として厚さ20mm、直径200mmのカーボン円板５の
外周面を覆うように、厚さ0.5mmmmでカーボン円
板の上面（重力に抗する面）側に一部の折り返し
を付け断面Ｌ字状に接触させたタンタル板６を巻
き付けた。このようにして製作した搬送台とそれ
ぞれ円筒状に設けたタンタル板の発熱体および熱
遮蔽体から構成されている真空焼結装置を使用し
て、最高加熱温度1500〜2000℃、真空度10-5〜
10-6torr台にて、一般的なタンタル粉末成形体の
焼結を繰り返した。また、従来例の第２図に示す
カーボン材からなる搬送台を使用して、同様の試
験を実施した。この結果、発熱体、熱遮蔽体は従
来例では600回の繰り返しで使用出来なくなつた
のに対し、本考案の搬送台では1400回の繰り返し
まで使用出来た。 Hereinafter, embodiments of the present invention will be described with reference to FIGS. 2 and 3. As shown in Fig. 3a, a carbon disc 5 with a thickness of 0.5 mm is placed on the upper surface (the surface that resists gravity) so as to cover the outer peripheral surface of the carbon disc 5 with a thickness of 20 mm and a diameter of 200 mm. A tantalum plate 6 having an L-shaped cross section and brought into contact with each other was wrapped around the plate. Using a vacuum sintering device consisting of the transport platform thus manufactured, a cylindrical tantalum plate heating element, and a heat shield, a maximum heating temperature of 1500 to 2000°C and a vacuum degree of 10 - Five ~
A general tantalum powder compact was repeatedly sintered on a 10 -6 torr machine. Further, a similar test was conducted using a conventional conveyance table made of carbon material as shown in FIG. 2. As a result, the heating element and heat shield could no longer be used after 600 repetitions in the conventional example, whereas the conveyance platform of the present invention could be used up to 1400 repetitions.
以上、実施例で述べたように、カーボン材をタ
ングステン板で覆つた搬送台は、発熱体、熱遮蔽
体の寿命を大幅（２倍）に延長し、装置のランニ
ングコストを低減出来る効果がある。 As described above in the examples, the transport platform made of carbon material covered with a tungsten plate has the effect of significantly extending (doubling) the life of the heating element and heat shield, and reducing the running cost of the equipment. .
なお、本考案の実施例として、第３図ａについ
て述べたが、他の例について述べると第３図ｂで
は、カーボン円板５の外周面をコの字状に被覆し
た、第３図ｃでは、カーボン円板５の下面側の大
部分を除いて被覆した、第３図ｄは、カーボン円
板５の全外周面を被覆した、それぞれの搬送台に
おいても同様の効果があることは明白である。さ
らに、本考案はカーボン材をタングステン板で被
覆した時の実施例を述べたがタングステンをプラ
ズマ溶射等で吹き付けて被覆した時にも適用出来
るものである。なお、本考案は搬送台の形状等に
制限されないことは言及するまでもない。 Although FIG. 3a has been described as an embodiment of the present invention, another example is shown in FIG. Now, it is clear that the same effect is obtained for each conveyance table, as shown in FIG. It is. Furthermore, although the present invention has been described as an embodiment in which a carbon material is coated with a tungsten plate, it can also be applied to a case where tungsten is sprayed and coated by plasma spraying or the like. It goes without saying that the present invention is not limited to the shape of the carrier.
第１図は従来例の熱処理装置内部構造の断面
図、第２図は従来例の搬送台の断面図、第３図
ａ，ｂ，ｃ，ｄは本考案による搬送台の断面図で
ある。
１……熱処理する製品、２……搬送台、３……
発熱体、４……熱遮蔽体、５……カーボン円板、
６……タングステン、Ａ……搬送台と対向する部
分の発熱体及び熱遮蔽体の損傷。
FIG. 1 is a cross-sectional view of the internal structure of a conventional heat treatment apparatus, FIG. 2 is a cross-sectional view of a conventional conveyance table, and FIGS. 3a, b, c, and d are cross-sectional views of a conveyance table according to the present invention. 1...Product to be heat treated, 2...Transportation platform, 3...
heating element, 4... heat shield, 5... carbon disk,
6... Tungsten, A... Damage to the heating element and heat shield in the portion facing the transfer table.
Claims (1)
材をカーボン材とし、少なくとも発熱体と対向す
る面を、タングステン金属で被覆したことを特徴
とする搬送台。 1. A carrier for products to be heat-treated at high temperatures and in a high vacuum, the base material of which is made of carbon material, and at least the surface facing a heating element is coated with tungsten metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7067083U JPS59178328U (en) | 1983-05-12 | 1983-05-12 | Transport platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7067083U JPS59178328U (en) | 1983-05-12 | 1983-05-12 | Transport platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59178328U JPS59178328U (en) | 1984-11-29 |
| JPS6344431Y2 true JPS6344431Y2 (en) | 1988-11-18 |
Family
ID=30200820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7067083U Granted JPS59178328U (en) | 1983-05-12 | 1983-05-12 | Transport platform |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59178328U (en) |
-
1983
- 1983-05-12 JP JP7067083U patent/JPS59178328U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59178328U (en) | 1984-11-29 |
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