JPS6342406B2 - - Google Patents

Info

Publication number
JPS6342406B2
JPS6342406B2 JP56030113A JP3011381A JPS6342406B2 JP S6342406 B2 JPS6342406 B2 JP S6342406B2 JP 56030113 A JP56030113 A JP 56030113A JP 3011381 A JP3011381 A JP 3011381A JP S6342406 B2 JPS6342406 B2 JP S6342406B2
Authority
JP
Japan
Prior art keywords
semiconductor
polycrystalline silicon
resistor
heat treatment
semiconductor thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56030113A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57143803A (en
Inventor
Kazuo Nishama
Takao Kobayashi
Akio Kashiwanuma
Ario Mita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP56030113A priority Critical patent/JPS57143803A/ja
Publication of JPS57143803A publication Critical patent/JPS57143803A/ja
Publication of JPS6342406B2 publication Critical patent/JPS6342406B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Recrystallisation Techniques (AREA)
JP56030113A 1981-03-03 1981-03-03 Method of forming resisotr Granted JPS57143803A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56030113A JPS57143803A (en) 1981-03-03 1981-03-03 Method of forming resisotr

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56030113A JPS57143803A (en) 1981-03-03 1981-03-03 Method of forming resisotr

Publications (2)

Publication Number Publication Date
JPS57143803A JPS57143803A (en) 1982-09-06
JPS6342406B2 true JPS6342406B2 (enExample) 1988-08-23

Family

ID=12294718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56030113A Granted JPS57143803A (en) 1981-03-03 1981-03-03 Method of forming resisotr

Country Status (1)

Country Link
JP (1) JPS57143803A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6242238U (enExample) * 1985-08-31 1987-03-13
JPH05251377A (ja) * 1992-10-05 1993-09-28 Seiko Epson Corp 半導体装置の製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JAPANESE JOURNAL OF APPLIED PHYSICS=1980 *

Also Published As

Publication number Publication date
JPS57143803A (en) 1982-09-06

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