JPS6341212B2 - - Google Patents
Info
- Publication number
- JPS6341212B2 JPS6341212B2 JP9245181A JP9245181A JPS6341212B2 JP S6341212 B2 JPS6341212 B2 JP S6341212B2 JP 9245181 A JP9245181 A JP 9245181A JP 9245181 A JP9245181 A JP 9245181A JP S6341212 B2 JPS6341212 B2 JP S6341212B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- annealing
- light irradiation
- irradiation
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
- H01L21/2686—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation using incoherent radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9245181A JPS57207345A (en) | 1981-06-16 | 1981-06-16 | Light irradiation annealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9245181A JPS57207345A (en) | 1981-06-16 | 1981-06-16 | Light irradiation annealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57207345A JPS57207345A (en) | 1982-12-20 |
| JPS6341212B2 true JPS6341212B2 (enrdf_load_stackoverflow) | 1988-08-16 |
Family
ID=14054760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9245181A Granted JPS57207345A (en) | 1981-06-16 | 1981-06-16 | Light irradiation annealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57207345A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002141298A (ja) * | 2000-11-02 | 2002-05-17 | Toshiba Corp | 半導体装置の製造方法 |
| JP2007274007A (ja) * | 2007-06-18 | 2007-10-18 | Toshiba Corp | 半導体装置の製造方法 |
-
1981
- 1981-06-16 JP JP9245181A patent/JPS57207345A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57207345A (en) | 1982-12-20 |
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