JPS6340845Y2 - - Google Patents

Info

Publication number
JPS6340845Y2
JPS6340845Y2 JP16399682U JP16399682U JPS6340845Y2 JP S6340845 Y2 JPS6340845 Y2 JP S6340845Y2 JP 16399682 U JP16399682 U JP 16399682U JP 16399682 U JP16399682 U JP 16399682U JP S6340845 Y2 JPS6340845 Y2 JP S6340845Y2
Authority
JP
Japan
Prior art keywords
bellows
vacuum
annular space
vacuum pump
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16399682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5967849U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16399682U priority Critical patent/JPS5967849U/ja
Publication of JPS5967849U publication Critical patent/JPS5967849U/ja
Application granted granted Critical
Publication of JPS6340845Y2 publication Critical patent/JPS6340845Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)
  • Joints Allowing Movement (AREA)
JP16399682U 1982-10-29 1982-10-29 真空排気系の防振装置 Granted JPS5967849U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16399682U JPS5967849U (ja) 1982-10-29 1982-10-29 真空排気系の防振装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16399682U JPS5967849U (ja) 1982-10-29 1982-10-29 真空排気系の防振装置

Publications (2)

Publication Number Publication Date
JPS5967849U JPS5967849U (ja) 1984-05-08
JPS6340845Y2 true JPS6340845Y2 (enEXAMPLES) 1988-10-25

Family

ID=30359665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16399682U Granted JPS5967849U (ja) 1982-10-29 1982-10-29 真空排気系の防振装置

Country Status (1)

Country Link
JP (1) JPS5967849U (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009097673A (ja) * 2007-10-18 2009-05-07 Kurashiki Kako Co Ltd 防振継手

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007008859A1 (de) * 2007-02-23 2008-08-28 Oerlikon Leybold Vacuum Gmbh Vakuumleitung
WO2016101978A1 (en) * 2014-12-22 2016-06-30 Applied Materials, Inc. Apparatus for inspecting a substrate, method for inspecting a substrate, large area substrate inspection apparatus and method of operating thereof
CN108351602B (zh) * 2015-11-10 2020-08-18 Asml荷兰有限公司 振动隔离系统和光刻设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009097673A (ja) * 2007-10-18 2009-05-07 Kurashiki Kako Co Ltd 防振継手

Also Published As

Publication number Publication date
JPS5967849U (ja) 1984-05-08

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