JPS6340845Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a vibration isolating device provided in a vacuum evacuation system of an electron microscope or the like.

Conventionally, as shown in Figure 1, an electron microscope a
When installing a vacuum pump b for evacuation, a bellows d made of an elastic material is connected between the vacuum pump b side and the sample chamber so that vibrations from the vacuum pump b are not transmitted to the sample chamber c side of the electron microscope a. It is interposed between it and the chamber c side. And this bellows d
An O-ring e is fitted into the groove portion to prevent the bellows d from being crushed and torn when a vacuum condition is created.

However, in such a conventional vibration isolator, when a vacuum state is created, the bellows d collapses and its elasticity is extremely reduced, as shown in FIG.
This poses a problem in that a sufficient anti-vibration function cannot be achieved.

The present invention aims to solve these problems, and is designed to prevent the bellows from collapsing even in a vacuum state, and to provide a sufficient vibration damping function. The purpose is to provide a shaking device.

For this reason, the vibration isolator for the vacuum pumping system of the present invention is
In the vacuum evacuation system, a bellows-type vibration isolation mechanism is interposed between the vacuum pump side and the chamber side to be evacuated in order to prevent vibrations from the vacuum pump side from being transmitted to the chamber side. The bellows-type vibration isolation mechanism is provided outside the inner bellows to form an annular space in which fluid can be sealed between the inner bellows that forms a vacuum exhaust passage therein. It is characterized by being composed of an outer bellows.

Hereinafter, a vibration isolating device for a vacuum pumping system as an embodiment of the present invention will be explained with reference to the drawings. FIG. 3 is a schematic diagram showing its general configuration. A bellows-type vibration isolation mechanism M is interposed between the side of a vacuum pump 2 such as a pump or a diffusion pump and the side of a sample chamber 3 as a chamber to be evacuated.

The vibration isolating mechanism M is provided with an inner bellows 5 in which a vacuum exhaust passage 4 is formed, and further provided outside the inner bellows 5 with an annular gap between the inner bellows 5 and the inner bellows 5. It is provided with an outer bellows 6.

In this way, between the inner and outer bellows 4 and 5,
An annular space 7 is formed, to which a passage 9 with a valve 8 is connected, which leads the atmosphere into the annular space 7 and, by closing the valve 8, removes the atmosphere. can be enclosed within the annular space 7.

Therefore, when the sample chamber 3 and the evacuation passage 4 become evacuated and the bellows 5 and 6 contract, the pressure of the sealed gas in the annular space 7 rises, so that the contractile force and atmospheric pressure increase. When equilibrium is reached, both bellows 5 and 6 stop contracting. As a result, even if a weak bellows is used, the bellows will not collapse, and as a result, in combination with the function of the air spring, a sufficient vibration damping effect can be obtained.

Note that compressed gas may be supplied in advance into the annular space 7, and furthermore, a liquid such as oil may be supplied.

Furthermore, if the annular space 7 is to remain filled with fluid, the valve 8 or the valve 8 and passage 9 may be omitted. In other words, if the valve 8 is omitted, it is sufficient to plug the passage 9 after sealing the fluid through the passage 9. If the valve 8 and the passage 9 are omitted, the fluid may be sealed when the bellows 5 and 6 are installed. may be enclosed in the annular space 7.

As described in detail above, according to the vibration isolating device for a vacuum pumping system of the present invention, the bellows type vibration isolating mechanism interposed between the vacuum pump side and the chamber side to be evacuated has a vacuum inside. It is composed of an inner bellows that forms an exhaust passage and an outer bellows that is provided outside the inner bellows to form an annular space in which fluid can be sealed between the inner bellows and the inner bellows. Even if a weak bellows is used, the bellows will not collapse if it becomes worn out.
This has the advantage that vibrations from the vacuum pump side can be sufficiently prevented from being transmitted to the chamber side.

[Brief explanation of the drawing]

Figures 1 and 2 show a conventional vibration isolator for a vacuum pumping system, and Figure 1 is a schematic diagram showing its general configuration.
FIG. 2 is a schematic diagram for explaining its operation, and FIG. 3 is a schematic diagram showing a schematic configuration of a vibration isolator for a vacuum pumping system as an embodiment of the present invention. 1...Electron microscope, 2...Vacuum pump, 3...
Sample chamber as a chamber to be evacuated, 4...
...Vacuum exhaust passage, 5...Inner bellows, 6...Outer bellows, 7...Annular space, 8...Valve, 9
...Aisle, A...Evacuation system, M...Bellows type vibration isolation mechanism.

Claims (1)

[Scope of utility model registration request] In the vacuum evacuation system, a bellows-type vibration isolation mechanism is interposed between the vacuum pump side and the chamber side to be evacuated in order to prevent vibrations from the vacuum pump side from being transmitted to the chamber side. The bellows-type vibration isolation mechanism is provided outside the inner bellows to form an annular space in which fluid can be sealed between the inner bellows that forms a vacuum exhaust passage therein. A vacuum-exhaust system vibration isolator characterized by comprising an outer bellows.