JPS6340017B2 - - Google Patents

Info

Publication number
JPS6340017B2
JPS6340017B2 JP57044077A JP4407782A JPS6340017B2 JP S6340017 B2 JPS6340017 B2 JP S6340017B2 JP 57044077 A JP57044077 A JP 57044077A JP 4407782 A JP4407782 A JP 4407782A JP S6340017 B2 JPS6340017 B2 JP S6340017B2
Authority
JP
Japan
Prior art keywords
emitter
voltage
extraction
power supply
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57044077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58161234A (ja
Inventor
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57044077A priority Critical patent/JPS58161234A/ja
Publication of JPS58161234A publication Critical patent/JPS58161234A/ja
Publication of JPS6340017B2 publication Critical patent/JPS6340017B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57044077A 1982-03-19 1982-03-19 電界放出型荷電粒子発生装置 Granted JPS58161234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57044077A JPS58161234A (ja) 1982-03-19 1982-03-19 電界放出型荷電粒子発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57044077A JPS58161234A (ja) 1982-03-19 1982-03-19 電界放出型荷電粒子発生装置

Publications (2)

Publication Number Publication Date
JPS58161234A JPS58161234A (ja) 1983-09-24
JPS6340017B2 true JPS6340017B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-08-09

Family

ID=12681556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57044077A Granted JPS58161234A (ja) 1982-03-19 1982-03-19 電界放出型荷電粒子発生装置

Country Status (1)

Country Link
JP (1) JPS58161234A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10876268B2 (en) 2016-11-16 2020-12-29 Solar Pile International (Hk) Ltd Screw pile and drive tool

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2876755B1 (fr) * 2004-10-20 2007-01-26 Pcm Pompes Sa Dispositif de pompage a pompe a cavites progressives
JP2008226683A (ja) 2007-03-14 2008-09-25 Hitachi High-Technologies Corp 荷電粒子線装置
DE102018200593B4 (de) * 2018-01-15 2019-08-08 Carl Zeiss Microscopy Gmbh Steckverbindungseinheit, Teilchenstrahlerzeuger mit einer Steckverbindungseinheit sowie Teilchenstrahlgerät mit einem Teilchenstrahlerzeuger
JP7736627B2 (ja) * 2022-05-20 2025-09-09 日本電子株式会社 電子銃、３次元積層造形装置及び電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5520635B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-08-17 1980-06-04
JPS551667B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-08-24 1980-01-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10876268B2 (en) 2016-11-16 2020-12-29 Solar Pile International (Hk) Ltd Screw pile and drive tool

Also Published As

Publication number Publication date
JPS58161234A (ja) 1983-09-24

Similar Documents

Publication Publication Date Title
JP2008226683A (ja) 荷電粒子線装置
KR100679593B1 (ko) 고전압 발생 장치 및 이를 이용한 가속 장치
JPS6340017B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP0095311B1 (en) Ion source apparatus
US3938001A (en) Protection circuit for electron gun
RU2654494C1 (ru) Вакуумный искровой разрядник
JPS5916698B2 (ja) 陰極線管のスポツトノツキング方法
US3731095A (en) Electron gun device of field emission type
KR100549432B1 (ko) 음이온발생 및 전자집진시스템
JPH03133040A (ja) 高電圧電子銃装置
KR20250089799A (ko) 전계방출 엑스선 소스
WO2024247022A1 (ja) 荷電粒子線装置
JPH01319235A (ja) 電子線発生装置
US1550203A (en) Mercury-vapor apparatus
JPS6328516Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0615388Y2 (ja) 電子線発生装置
US4628226A (en) Method and arrangement for preventing cathode damage when switching on field emission electron guns
JP4260036B2 (ja) 高電圧発生装置
JP2757963B2 (ja) イオン源加速電極
JPH01227340A (ja) 荷電粒子源のエミッタ保護装置
JPH05135899A (ja) 直流電圧型加速器の加速管
JP3766571B2 (ja) 薄膜形成装置及びシャンティングアーク放電電極装置
JPS5913143B2 (ja) 荷電粒子装置
JP2671730B2 (ja) プラズマの点灯装置
SU337845A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)