JPS6339662U - - Google Patents

Info

Publication number
JPS6339662U
JPS6339662U JP13365786U JP13365786U JPS6339662U JP S6339662 U JPS6339662 U JP S6339662U JP 13365786 U JP13365786 U JP 13365786U JP 13365786 U JP13365786 U JP 13365786U JP S6339662 U JPS6339662 U JP S6339662U
Authority
JP
Japan
Prior art keywords
detected object
light
defect detection
detected
pixels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13365786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0443816Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13365786U priority Critical patent/JPH0443816Y2/ja
Publication of JPS6339662U publication Critical patent/JPS6339662U/ja
Application granted granted Critical
Publication of JPH0443816Y2 publication Critical patent/JPH0443816Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP13365786U 1986-08-31 1986-08-31 Expired JPH0443816Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13365786U JPH0443816Y2 (enrdf_load_stackoverflow) 1986-08-31 1986-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13365786U JPH0443816Y2 (enrdf_load_stackoverflow) 1986-08-31 1986-08-31

Publications (2)

Publication Number Publication Date
JPS6339662U true JPS6339662U (enrdf_load_stackoverflow) 1988-03-15
JPH0443816Y2 JPH0443816Y2 (enrdf_load_stackoverflow) 1992-10-15

Family

ID=31034169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13365786U Expired JPH0443816Y2 (enrdf_load_stackoverflow) 1986-08-31 1986-08-31

Country Status (1)

Country Link
JP (1) JPH0443816Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0443816Y2 (enrdf_load_stackoverflow) 1992-10-15

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