JPS633944B2 - - Google Patents
Info
- Publication number
- JPS633944B2 JPS633944B2 JP55074934A JP7493480A JPS633944B2 JP S633944 B2 JPS633944 B2 JP S633944B2 JP 55074934 A JP55074934 A JP 55074934A JP 7493480 A JP7493480 A JP 7493480A JP S633944 B2 JPS633944 B2 JP S633944B2
- Authority
- JP
- Japan
- Prior art keywords
- molybdenum
- average particle
- surface roughness
- particles
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 53
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 46
- 229910052750 molybdenum Inorganic materials 0.000 claims description 46
- 239000011733 molybdenum Substances 0.000 claims description 46
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 25
- 230000003746 surface roughness Effects 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 5
- 238000010304 firing Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002751 molybdenum Chemical class 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
Description
【発明の詳細な説明】
本発明はセラミツクス製品を焼成するのに使用
されるモリブデン基板及びその製造方法に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a molybdenum substrate used for firing ceramic products and a method for manufacturing the same.
最近、セラミツクス製品を焼成するために、表
面を意図的に粗くしたモリブデン基板を使用する
ことが提案されている。このモリブデン基板を用
いた場合、その表面粗さのために、セラミツクス
製品焼成の際、セラミツクス製品とモリブデン基
板との焼付けを防止することができ、製品の歩留
りを上昇させることができる。 Recently, it has been proposed to use molybdenum substrates with intentionally roughened surfaces for firing ceramic products. When this molybdenum substrate is used, the surface roughness of the molybdenum substrate prevents the ceramic product and the molybdenum substrate from burning during firing of the ceramic product, thereby increasing the yield of the product.
従来、この種のモリブデン基板を製作する方法
として、焼結等によつて製作されたモリブデン板
にサンドブラストあるいは液体ホーニング等のホ
ーニング加工を施し、表面を粗くする方法が採用
されている。この方法では、ホーニング加工に使
用される砥粒の粒度を選択することによつて、表
面粗さを調整することができる。しかしながら、
このようにして得られたモリブデン基板の表面粗
さは最大高さ（Rnax：JIS B0601―1976参照）で
高々60ミクロンにすぎない。また、モリブデン基
板は約1100℃の高温で荷重をかけた状態で使用さ
れるため、その表面粗さは徐々に劣化していく。
通常、このような場合、モリブデン基板を再度ホ
ーニング加工している。しかし、この再処理は製
造コストにおいても、あるいは、再処理された基
板の品質の面においても、不都合な面が多い。 Conventionally, as a method for manufacturing this type of molybdenum substrate, a method has been adopted in which a molybdenum plate manufactured by sintering or the like is subjected to a honing process such as sandblasting or liquid honing to roughen the surface. In this method, the surface roughness can be adjusted by selecting the grain size of the abrasive grains used for honing. however,
The surface roughness of the molybdenum substrate thus obtained is only 60 microns at the maximum height (R nax : see JIS B0601-1976). Furthermore, because molybdenum substrates are used under load at high temperatures of approximately 1,100°C, their surface roughness gradually deteriorates.
Usually, in such cases, the molybdenum substrate is honed again. However, this reprocessing has many disadvantages in terms of manufacturing cost and quality of the reprocessed substrate.
本発明の目的は表面粗さを任意且つ大幅に変化
させ得るモリブデン基板の製造方法を提供するこ
とである。 An object of the present invention is to provide a method for manufacturing a molybdenum substrate in which the surface roughness can be varied arbitrarily and significantly.
本発明の他の目的は材料の強度が高く、表面粗
さの劣化が少ないモリブデン基板を提供すること
である。 Another object of the present invention is to provide a molybdenum substrate with high material strength and less deterioration in surface roughness.
本発明によれば、予め定められた平均粒子径を
有するAl2O3を重量で１〜10％含むモリブデン材
料によつて構成され、平均粒子径に依存した表面
粗さを有しているモリブデン基板が得られる。 According to the present invention, the molybdenum material is composed of a molybdenum material containing 1 to 10% by weight of Al 2 O 3 having a predetermined average particle size, and has a surface roughness depending on the average particle size. A substrate is obtained.
更に、本発明では、Al2O3を酸化物材料として
用意する段階と、モリブデン材料を用意する段階
と、酸化物材料及びモリブデン材料を予め定めら
れた混合比で混合する段階と、混合された材料を
焼成する段階とを有するモリブデン基板の製造方
法が得られる。このようにして得られた焼結体は
酸化物材料とモリブデン材料との混合比及び酸化
物材料の平均粒子径に依存した表面粗さを有して
いる。 Furthermore, the present invention includes a step of preparing Al 2 O 3 as an oxide material, a step of preparing a molybdenum material, a step of mixing the oxide material and the molybdenum material at a predetermined mixing ratio, and a step of preparing Al 2 O 3 as an oxide material. A method for manufacturing a molybdenum substrate is obtained, comprising the step of firing the material. The sintered body thus obtained has a surface roughness that depends on the mixing ratio of the oxide material and the molybdenum material and the average particle size of the oxide material.
以下、本発明の実施例を説明する。 Examples of the present invention will be described below.
まず、種々の平均粒子径を有するAl2O3粉末を
用意し、各Al2O3粉末を平均粒子径4.5ミクロンの
モリブデン粉末と混合した。より具体的に述べる
と、１、４、20、50、及び100ミクロンの平均粒
子径を有するAl2O3粉末を母相となるモリブデン
に混合すると共に、各粒度のAl2O3粉末とモリブ
デン粉末との混合比を変化させた。ここでは、前
述した各平均粒子径のAl2O3粉末を重量比で１、
５、10、30、及び50％だけモリブデン材料に加
え、25個の試料を用意した。 First, Al 2 O 3 powders having various average particle sizes were prepared, and each Al 2 O 3 powder was mixed with molybdenum powder having an average particle size of 4.5 microns. More specifically, Al 2 O 3 powder with average particle diameters of 1, 4, 20, 50, and 100 microns is mixed with molybdenum as a matrix, and Al 2 O 3 powder of each particle size and molybdenum are mixed. The mixing ratio with powder was varied. Here, the weight ratio of Al 2 O 3 powder with each average particle size mentioned above was 1,
Twenty-five samples were prepared with 5, 10, 30, and 50% additions to the molybdenum material.
次に、各試料をボールミル中で超硬ボールと共
に10時間混合した。この混合によつて、Al2O3及
びモリブデン粉末における粒度の変化は実質上観
測されなかつた。混合した後、混合物を圧縮成形
し、1850℃で焼成させモリブデン基板を作つた。
この場合、焼結されたモリブデン基板は２〜８mm
の厚さを有し、50〜100ミリ平方の大きさを有し
ていた。各モリブデン基板をＸ線結晶学的に調査
した結果、モリブデンとAl2O3粒子との間には、
何等、反応の形跡が認められず、モリブデン材料
内にAl2O3粒子が封じ込められており、モリブデ
ン材料表面には、Al2O3の粒子が配列されている
ことが判明した。このため表面に配列された
Al2O3の粒子によつて、モリブデン基板の表面粗
さを規定することができる。 Each sample was then mixed in a ball mill with carbide balls for 10 hours. Due to this mixing, virtually no particle size changes were observed in the Al 2 O 3 and molybdenum powders. After mixing, the mixture was compression molded and fired at 1850°C to produce a molybdenum substrate.
In this case, the sintered molybdenum substrate is 2-8 mm
, and had a size of 50 to 100 mm square. As a result of X-ray crystallographic investigation of each molybdenum substrate, it was found that there is a relationship between molybdenum and Al 2 O 3 particles.
No evidence of reaction was observed, and it was found that Al 2 O 3 particles were confined within the molybdenum material, and that Al 2 O 3 particles were arranged on the surface of the molybdenum material. For this reason, they were arranged on the surface.
The Al 2 O 3 particles can define the surface roughness of the molybdenum substrate.
本発明者等の実験によれば、焼結体の表面粗さ
はAl2O3の粒度と混合比に依存することが確認さ
れた。このことから、Al2O3の粒度と混合比を選
択することによつて、任意の表面粗さを有するモ
リブデン基板を製作できることがわかる。 According to experiments conducted by the present inventors, it was confirmed that the surface roughness of the sintered body depends on the particle size and mixing ratio of Al 2 O 3 . This shows that a molybdenum substrate with any desired surface roughness can be manufactured by selecting the particle size and mixing ratio of Al 2 O 3 .
第１図を参照すると、Al2O3の平均粒子径（ミ
クロン）と表面粗さ（Rnax：最大高さ）との関
係が示されている。図において、曲線Ａはモリブ
デン材料に重量で１％のAl2O3粒子を混合した試
料の平均粒子径と表面粗さとの関係を示し、以
下、同様に、曲線Ｂ，Ｃ，Ｄ、及びＥはそれぞれ
重量で５％、10％、30％、及び50％のAl2O3粒子
を混合した試料の平均粒子径と表面粗さとの関係
を示している。各曲線Ａ，Ｂ，Ｃ，Ｄ、及びＥか
らも明らかな通り、Al2O3の平均粒子径が大きく
なるほど、また、Al2O3の混合比が高いほど、表
面は粗くなることがわかる。更に、Al2O3粒子の
平均粒子径が４ミクロン以上になると、Al2O3を
重量で１％混合した曲線Ａの試料でさえも、その
表面粗さは約15ミクロン（Rnax：最大高さ）以
上であり、且つ、曲線Ｅの試料では、90ミクロン
（Rnax：最大高さ）の表面粗さが得られている。 Referring to FIG. 1, the relationship between the average particle size (microns) of Al 2 O 3 and the surface roughness (R nax : maximum height) is shown. In the figure, curve A shows the relationship between the average particle diameter and surface roughness of a sample in which 1% by weight of Al 2 O 3 particles are mixed with a molybdenum material. show the relationship between the average particle diameter and surface roughness of samples in which 5%, 10%, 30%, and 50% by weight of Al 2 O 3 particles were mixed, respectively. As is clear from each curve A, B, C, D, and E, it can be seen that the larger the average particle diameter of Al 2 O 3 and the higher the mixing ratio of Al 2 O 3 , the rougher the surface becomes. . Furthermore, when the average particle diameter of Al 2 O 3 particles becomes 4 microns or more, even the sample of curve A containing 1% Al 2 O 3 by weight has a surface roughness of about 15 microns (R nax : maximum In the sample of curve E, a surface roughness of 90 microns (R nax : maximum height) was obtained.
従来、この種のモリブデン基板では、最大高さ
で約20ミクロンの表面粗さをもつものが最適であ
り、且つ、約60ミクロン以上の最大高さをもつも
のは得難いことが指摘されている。 Conventionally, it has been pointed out that for this type of molybdenum substrate, one having a surface roughness of approximately 20 microns at the maximum height is optimal, and one having a maximum height of approximately 60 microns or more is difficult to obtain.
本発明においては、約４ミクロン以上の平均粒
子径を有するAl2O3粒子をモリブデン材料に重量
で約１％以上混合するだけで、セラミツク製品を
焼成するのに十分使用できるモリブデン基板を得
ることができると共に、Al2O3粒子の粒度及び混
合比を選択することによつて、著しく高い表面粗
さを有するモリブデン基板を容易に製作できる。 In the present invention, it is possible to obtain a molybdenum substrate that can be sufficiently used for firing ceramic products by simply mixing approximately 1% or more by weight of Al 2 O 3 particles having an average particle diameter of approximately 4 microns or more into a molybdenum material. In addition, by selecting the particle size and mixing ratio of Al 2 O 3 particles, a molybdenum substrate with extremely high surface roughness can be easily manufactured.
本発明のように、モリブデン粒子内に異種粒子
を混入させると、材料強度は低下すると考えられ
る。しかし、実際には、ある範囲までのAl2O3の
添加によつて、材料の強度は逆に強化され、分散
強化型の特性を示すことが確認された。 It is thought that when foreign particles are mixed into molybdenum particles as in the present invention, the material strength decreases. However, in reality, it was confirmed that by adding Al 2 O 3 up to a certain range, the strength of the material was strengthened, and the material exhibited dispersion-strengthened characteristics.
第２図を参照すると、各試料の強度を抗折力値
によつて示している。第２図には図示されていな
いが、従来の純モリブデン基板は約50Kg／mm2の抗
折力値を持つている。第２図において、曲線A′，
B′，C′，D′、及びE′はそれぞれAl2O3粒子を重量
で１％、５％、10％、30％、及び50％添加した試
料の抗折力値の変化を示している。１ミクロンの
平均粒子径を有するAl2O3を使用した場合、曲線
D′で示すように、Al2O3粒子を重量で約30％以下
添加しておけば、従来の純モリブデン基板以上の
抗折力値が得られる。また、４ミクロン〜50ミク
ロンの平均粒子径を有するAl2O3粒子を使用した
場合、Al2O3粒子を重量で10％添加しても、抗折
力値は50Kg／mm2以上であることがわかる。100ミ
クロンの平均粒子径を有するAl2O3を用いた場合
にも、曲線A′及びB′からも明らかな通り、その
添加量即ち混合量が重量で約１〜５％程度であれ
ば、約50Kg／mm2の抗折力値が得られ、且つ、10％
程度添加したものでも、十分使用に耐え得る。図
から明らかな通り、抗折力値はAl2O3粒子の平均
粒子径が大きくなればなるほど、減少する傾向を
持ち、且つ、Al2O3粒子の混合量が多くなるほど
小さくなる。本発明によれば、Al2O3粒子の混合
量が重量で１〜10％程度であれば、平均粒子径１
〜100ミクロンの広範囲にわたつて、従来のもの
と実質上同等乃至はそれ以上の抗折力値を有する
モリブデン基板を製作できる。 Referring to FIG. 2, the strength of each sample is shown by transverse rupture strength value. Although not shown in FIG. 2, a conventional pure molybdenum substrate has a transverse rupture strength value of approximately 50 kg/mm 2 . In Figure 2, curves A',
B', C', D', and E' indicate the changes in transverse rupture strength values of samples with 1%, 5%, 10%, 30%, and 50% Al 2 O 3 particles added by weight, respectively. There is. When using Al 2 O 3 with an average particle size of 1 micron, the curve
As shown by D', if approximately 30% or less of Al 2 O 3 particles by weight are added, a transverse rupture strength value higher than that of a conventional pure molybdenum substrate can be obtained. Furthermore, when using Al 2 O 3 particles with an average particle diameter of 4 microns to 50 microns, even if 10% by weight of Al 2 O 3 particles is added, the transverse rupture strength value is 50 Kg/mm 2 or more. I understand that. Even when Al 2 O 3 with an average particle size of 100 microns is used, as is clear from curves A' and B', if the amount added, that is, the amount mixed is about 1 to 5% by weight, A transverse rupture strength value of approximately 50Kg/mm 2 is obtained and 10%
Even if a certain amount is added, it can withstand use. As is clear from the figure, the transverse rupture strength value tends to decrease as the average particle diameter of the Al 2 O 3 particles increases, and also decreases as the amount of Al 2 O 3 particles mixed increases. According to the present invention, if the mixed amount of Al 2 O 3 particles is about 1 to 10% by weight, the average particle diameter is 1.
It is possible to produce a molybdenum substrate having transverse rupture strength values substantially equal to or higher than conventional ones over a wide range of ~100 microns.
第３図は平均粒子径20ミクロンのAl2O3を重量
で10％混合した焼結体のＸ線マイクロアナライザ
ーによる観察像である。図に示す通り、Al2O3粒
子がMo間に介在しているため、Mo単独の場合
より急峻な凹凸が出来ていることがわかる。 FIG. 3 is an image observed by an X-ray microanalyzer of a sintered body containing 10% by weight of Al 2 O 3 with an average particle diameter of 20 microns. As shown in the figure, it can be seen that because Al 2 O 3 particles are interposed between Mo, steeper unevenness is created than in the case of Mo alone.
上に述べた通り、本発明によれば、所定の酸化
物粒子群から選ばれた少くとも一種類の酸化物材
料の平均粒子径及び混合比率を変化させることに
よつて、材料強度を極度に損うことなく、良好な
表面粗さを有するモリブデン基板が得られる。 As described above, according to the present invention, material strength can be maximized by changing the average particle diameter and mixing ratio of at least one type of oxide material selected from a predetermined oxide particle group. A molybdenum substrate with good surface roughness can be obtained without damage.
第１図は本発明の実施例に係るモリブデン基板
に含まれるAl2O3粒子の平均粒子径と表面粗さと
の関係を示す図、第２図は本発明の実施例に係る
モリブデン基板に含まれるAl2O3粒子の平均粒子
径と抗折力値との関係を示す図、第３図は本発明
の一実施例に係るモリブデン基板の表面状態（×
50）を示す顕微鏡写真である。
FIG. 1 is a diagram showing the relationship between the average particle diameter of Al 2 O 3 particles contained in the molybdenum substrate according to the example of the present invention and the surface roughness, and FIG. Figure 3 shows the relationship between the average particle diameter of Al 2 O 3 particles and the transverse rupture strength value.
50).
Claims (1)
重量で１〜10％含むモリブデン材料によつて構成
され、平均粒子径に応じた表面粗さを有している
ことを特徴とするモリブデン基板。 ２ 予め定められた平均粒子径を有するAl2O3を
用意する段階と、モリブデン材料を用意する段階
と、前記Al2O3を重量で１〜10％、前記モリブデ
ン材料に混合して、混合物を形成する段階と、前
記混合物を焼結し、前記Al2O3の混合割合と平均
粒子径に応じた表面粗さを有するモリブデン基板
を形成する段階とを有することを特徴とするモリ
ブデン基板の製造方法。[Claims] 1. Constructed of a molybdenum material containing 1 to 10% by weight of Al 2 O 3 having a predetermined average particle diameter, and having a surface roughness according to the average particle diameter. A molybdenum substrate characterized by: 2. A step of preparing Al 2 O 3 having a predetermined average particle size, a step of preparing a molybdenum material, and mixing 1 to 10% by weight of the Al 2 O 3 with the molybdenum material to form a mixture. and sintering the mixture to form a molybdenum substrate having a surface roughness according to the mixing ratio of Al 2 O 3 and the average particle size. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7493480A JPS572859A (en) | 1980-06-05 | 1980-06-05 | Molybdenum substrate and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7493480A JPS572859A (en) | 1980-06-05 | 1980-06-05 | Molybdenum substrate and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS572859A JPS572859A (en) | 1982-01-08 |
| JPS633944B2 true JPS633944B2 (en) | 1988-01-26 |
Family
ID=13561668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7493480A Granted JPS572859A (en) | 1980-06-05 | 1980-06-05 | Molybdenum substrate and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS572859A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197839A (en) * | 1984-03-22 | 1985-10-07 | Toshiba Corp | Jig for sintering ceramics and its production |
| JPS63199843A (en) * | 1987-02-13 | 1988-08-18 | Natl Res Inst For Metals | Composite molded body of molybdenum or its alloy and zirconia and its production |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52139608A (en) * | 1976-05-18 | 1977-11-21 | Toho Kinzoku Kk | Molybdenummzirconia composite alloy and protecting tube for temperatureemeasuring device |
-
1980
- 1980-06-05 JP JP7493480A patent/JPS572859A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52139608A (en) * | 1976-05-18 | 1977-11-21 | Toho Kinzoku Kk | Molybdenummzirconia composite alloy and protecting tube for temperatureemeasuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS572859A (en) | 1982-01-08 |
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