JPS6337093Y2 - - Google Patents

Info

Publication number
JPS6337093Y2
JPS6337093Y2 JP963883U JP963883U JPS6337093Y2 JP S6337093 Y2 JPS6337093 Y2 JP S6337093Y2 JP 963883 U JP963883 U JP 963883U JP 963883 U JP963883 U JP 963883U JP S6337093 Y2 JPS6337093 Y2 JP S6337093Y2
Authority
JP
Japan
Prior art keywords
liquid
gas
passage
nozzle body
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP963883U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59115456U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP963883U priority Critical patent/JPS59115456U/ja
Publication of JPS59115456U publication Critical patent/JPS59115456U/ja
Application granted granted Critical
Publication of JPS6337093Y2 publication Critical patent/JPS6337093Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Details Of Cutting Devices (AREA)
  • Nozzles (AREA)
JP963883U 1983-01-25 1983-01-25 洗浄ノズル装置 Granted JPS59115456U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP963883U JPS59115456U (ja) 1983-01-25 1983-01-25 洗浄ノズル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP963883U JPS59115456U (ja) 1983-01-25 1983-01-25 洗浄ノズル装置

Publications (2)

Publication Number Publication Date
JPS59115456U JPS59115456U (ja) 1984-08-04
JPS6337093Y2 true JPS6337093Y2 (US20100223739A1-20100909-C00005.png) 1988-09-30

Family

ID=30141094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP963883U Granted JPS59115456U (ja) 1983-01-25 1983-01-25 洗浄ノズル装置

Country Status (1)

Country Link
JP (1) JPS59115456U (US20100223739A1-20100909-C00005.png)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3315611B2 (ja) * 1996-12-02 2002-08-19 三菱電機株式会社 洗浄用2流体ジェットノズル及び洗浄装置ならびに半導体装置
JP4158515B2 (ja) * 2002-12-24 2008-10-01 三菱化学株式会社 洗浄用2流体ノズル及び洗浄方法
JP4707688B2 (ja) * 2006-04-10 2011-06-22 パシフィック電子株式会社 切削塵除去装置
KR101092563B1 (ko) * 2010-03-16 2011-12-13 신요섭 오일미스트 생성기

Also Published As

Publication number Publication date
JPS59115456U (ja) 1984-08-04

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