JPS6337018B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is a method of combining a circular thin plate, such as a silicon wafer, which serves as a base for forming an integrated circuit, and a ring, such as a circular ring, which serves as a carrier jig for the thin plate, into a single adhesive film. This relates to the method of attaching the paper to the .

Previously, the attachment of the film to the ring-shaped carrier jig as described above and the attachment of silicon wafers, etc. to the film were done by hand, and the film protruding from around the ring was also cut by hand. Therefore, it is extremely time-consuming.
In addition, it was difficult to apply the material without wrinkles, and it required skill.

An object of the present invention is to provide a method for efficiently and continuously performing the operations of attaching a film to a ring as described above, attaching a thin plate to the film, and cutting the film along the ring. It consists of a series of steps in which thin plates and rings are successively attached while a film-like adhesive tape is moved intermittently at a fixed pitch, and the tape is cut along the rings.

The method of the present invention will be described below based on embodiments shown in the accompanying drawings.

In the figure, reference numeral 1 denotes a thin plate such as a silicon wafer, and in the example shown in FIG. 2, it is disk-shaped, but there are also disks with a portion cut out in a straight line, squares, triangles, etc.

A thin plate 1 like this is placed in a magazine 2 as shown in Fig. 1.
Stack them up at regular intervals. This magazine 2 is placed on a pedestal 3, and the pedestal 3 is lowered intermittently at a constant pitch by a unitized elevating mechanism 4 such as a screw jack type, rack and pinion type, or cylinder type. The sheets are taken out one by one by the feeding means 5.

The feeding means 5 has an endless conveyor belt 7 that is continuously driven by a drive pulley 6 in the direction of the arrow in FIG.
When the magazine 2 is lowered one pitch, the lowermost thin plate 1 is placed on the belt 7 and taken out, but a mechanism other than that shown in the drawings may be used.

Although not shown, if the thin plate 1 has a notch for determining the direction, positioning means such as a plurality of vertical rotating rods is provided in front of the magazine to correct the notch to a fixed direction such as facing forward. .

Reference numeral 10 denotes a machine base to which the elevating mechanism 4, delivery means 5, etc. are attached, and a machine box 11 is provided on the upper side of the machine base.

12 and 13 are upper and lower rollers provided on the machine box 11 and the machine stand 10, and are intermittently driven in the direction of the arrow in FIG.

In addition, as shown in FIG.
Adhesive tape 15 pulled out from 4 is guided onto roller 13 via guide roller 16. This tape 15 is a film made of polyethylene or the like with an adhesive surface on one side, and is directed onto the roller 13 with the adhesive surface facing up.

Further, the machine box 11 is provided with a winding shaft 18 and a winding shaft 19, a protective tape 20 made of polyethylene film or the like is wound around the winding shaft 18, and the protective tape 20 pulled out from the winding shaft 18 is wound around the lower side of the roller 12. The film is wound onto a winding shaft 19, and the roller 12 is attached to a swing lever provided on the machine box 11 and pressed onto a roller 13 by a spring.

The thin plate 1 sent out by the sending means 5 is sandwiched between the adhesive tape 15 on the roller 13 and the protective tape 20 on the lower part of the roller 12, and is stuck onto the tape 15. Since the rollers 13 and 12 are rubber rollers, in the absence of the protective tape 20, if the thin plate 1 were to break, the fragments would stick to the surface of the roller 12, and there is a risk of damaging the surface of the next thin plate 1. However, if the protective tape 20 is used as in the embodiment, the fragments will be attached to the protective tape 20 and wound up, so there is no such fear as described above.

In the plan view of FIG. 2, reference numeral 22 denotes a magazine with a ring 23 like a carrier jig.Although not shown, it has almost the same structure as the thin plate magazine 2 shown in FIG. 1 on a similar pedestal
It is intermittently lowered for each pitch, and is intermittently pushed out in the direction of the arrow from the lowest end by a pushing member 24 driven by a drive mechanism (not shown) to the position a.

The ring 23 at position a is transferred onto the tape cutting means 26 by a transfer means 25 as shown in FIG. 3, for example.

This transfer means 25 consists of a transfer table 29 that moves forward and backward along a guide arm 27 fixed to the machine box 11 using a feed screw or the like, and a suction device 30 that is attached to this table 29 so as to be raised and lowered by an air cylinder or the like. This suction device 30 has a hollow ring-shaped bottom protrusion with a large number of suction holes, and the inside of the suction device 30 is connected to a vacuum suction device (not shown) through a flexible tube (not shown), as shown in FIG. As shown in the figure, the ring 23 on the machine stand 10 is sucked and raised, moved to the position indicated by the chain line and lowered, and the ring 23 is lowered onto the tape 15 on the tape cutting means 26 to release the suction and rise. , perform the movement to return to the original position.

The cutting means 26 is provided at the end of an arm 34 that is raised and lowered by an air cylinder 33 attached to the machine box 11, as shown in FIG. A gear motor 35 is fixed to the lower part of the end of the arm 34, and a rotating frame 36 is rotated by the motor 35.
The cutter arm 3 swings upward with the shaft 37 as a fulcrum.
8 is attached, and a freely rotating disc-shaped cutter 39 is attached to the tip of this arm 38.
The tip of is pushed up by a spring 40.

Also, a vertical shaft 4 fixed at the center of the rotating frame 36
A disc-shaped presser plate 42 is rotatably attached to the upper end of the rotation frame 36, and a circular annular rubber 43 is attached to the upper surface of the outer periphery of the presser plate 42. roller 4 in contact with the lower peripheral surface of
4 will be provided.

Therefore, as the tape 15 with the thin plate 1 adhered to its upper surface moves, when the thin plate 1 comes onto the cutting means 26 and stops, the transfer means 25 operates as described above and the ring 23 is placed on the tape 15. Then, the air cylinder 33 acts, the arm 34 rises, the rubber 43 on the holding plate 42 and the suction device 30 sandwich the ring 23 and the tape 15, the cutter 39 cuts into the tape 15, and the motor 35 moves the shaft 41. , rotating frame 36
rotates and cuts the tape 15 on the lower surface of the ring 23. When the rotating frame 36 rotates about two times to completely cut the tape 15, the motor 35 stops, the cylinder 33 lowers the arm 34, and the suction device 30 returns to its original position.

The cut tape 15 is guided by a roller 45 in front of the cutting means 26 as shown in FIGS. 1 and 4, passed through a guide roller 46, and then wound onto a take-up shaft 47.
Therefore, the adhesive tape 15 to be wound up has a hole 32 formed by cutting as shown in FIG. It moves onto the conveyor 49, but the rollers 48 and the conveyor 4
9 is one attached to the machine box 11 or the machine stand 10.

Reference numeral 51 in FIG. 1 is a magazine that stores the ring 23 on which the thin plate 1 and film 15' are stretched as described above. This magazine 51 includes each of the magazines 2, 2.
2, it is placed on a pedestal 53 that is raised and lowered by a suitable unitized lifting mechanism 52, and every time one ring 23 moves on a conveyor 49 enters the magazine 51, the pedestal 53 increases by one pitch.

In this invention, as described above, a film-like adhesive tape is moved intermittently in the longitudinal direction with the adhesive side facing upward, and the thin plates, which are delivered one by one by the delivery means, are attached to the adhesive tape and above the adhesive tape. Similar to the tape, it is sandwiched between protective tapes that move intermittently, and both tapes are pressed by upper and lower rollers to adhere a thin plate onto the adhesive tape, and then the protective tape is peeled off from the adhesive tape and the thin plate. a winding process using a winding roller; a ring is supplied onto the adhesive tape to which the thin plate is attached; the ring is attached to the adhesive tape at a position surrounding the outside of the thin plate;
Next, the tape is cut along the ring from the bottom surface of the ring, the ring covered with the thin film is appropriately collected, and the remaining perforated tape is appropriately wound. Attaching the thin plate sent out from the means onto the adhesive tape and attaching a ring surrounding the attached thin plate can be done automatically without manual intervention, but it is possible to use a protective film when attaching the thin plate. When the thin plate breaks, the pieces are prevented from getting stuck in the roller, which has the effect of preventing flaws from forming on subsequent thin plates. Furthermore, these attachments are carried out on the tape stretched between the rollers, and the cutting means acts on the underside of the ring to cut the tape while it is still attached to the ring, making it possible to cut the tape with great precision and to ensure that the film remains intact. No wrinkles appear on the skin. Furthermore, since the perforated tape after being cut is wound up by a winding roller, there is an effect that the tape after being cut can be easily disposed of.

[Brief explanation of drawings]

Fig. 1 is a front view showing an example of an apparatus for carrying out the method of the present invention, Fig. 2 is a plan view of the same as above, Fig. 3 is an enlarged longitudinal sectional side view taken along line A-A in Fig. 1, and Fig. 4 is a main part. FIG. DESCRIPTION OF SYMBOLS 1... Thin plate, 5... Delivery means, 14, 18... Winding shaft, 15... Tape, 15'... Film, 19, 4
7... Winding shaft, 20... Protective tape, 23... Ring,
26...Tape cutting means.

Claims (1)

[Claims] 1. A film-like adhesive tape is moved intermittently in the longitudinal direction with the adhesive side facing up, and the thin plates sent out one by one by the delivery means are intermittently moved in the same way as the adhesive tape. The protective tape is sandwiched between the moving protective tapes, and both tapes are pressed by upper and lower rollers to adhere a thin plate onto the adhesive tape.The protective tape is then peeled off from the adhesive tape and the thin plate, and is removed by a take-up roller. The winding process involves supplying a ring onto the adhesive tape to which the thin plate is attached, attaching the ring to the adhesive tape at a position surrounding the outside of the thin plate, and then rolling the tape along the ring on the underside of the ring. A method for attaching a thin plate and a ring, which comprises the steps of cutting it off, attaching a thin plate to the top surface, appropriately collecting the film-covered ring separated from the adhesive tape, and appropriately winding up the remaining perforated tape.