JPS6215458B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention involves attaching a thin flexible plastic film to a metal carrier jig for supporting a disk-shaped thin plate such as a silicon wafer that serves as a substrate for forming an integrated circuit. The present invention relates to a film pasting device for a carrier jig that fully automatically performs the operation of cutting the film into a disk shape.

Conventionally, attaching the film to such a carrier jig has been done manually, which is very time-consuming, and it is difficult to do so without creating wrinkles and requires skill.

The purpose of this invention is to solve the above-mentioned problem of attaching a film to the conventional carrier jig by cutting out the film into a disk shape and removing unnecessary parts without using manual labor. The goal is to do this completely automatically.

That is, the present invention provides a holding frame for stacking and holding circular carrier jigs, extrusion means for pushing out the lowest one of a plurality of carrier jigs held by the holding frame toward the front of the holding frame, and At the same time, the top and bottom of a single carrier jig pushed out by the means are held and pulled out, and onto this carrier jig,
A pasting means comprising a pasting roller and a receiving roller for pasting a strip film having an adhesive layer on the lower surface;
a cutting means having a cutter for cutting the strip-shaped film on the carrier jig into an annular shape on the carrier jig supported by an annular support base that supports the lower part of the carrier jig which is pulled out from the sticking means together with the carrier jig and stopped; , a pair of upper and lower take-up rollers that take up the film strip cut by the cutting means and also take over a carrier jig to which the disc-shaped film separated from the film strip is stuck.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the pasting device of the present invention will be explained below based on an embodiment shown in the accompanying drawings.

In the figure, reference numeral 1 denotes a carrier jig, which is made of a metal plate and has a circular ring shape, and has a straight edge 13 on one side for positioning.

Reference numeral 2 denotes a holding frame that holds a large number of carrier jigs 1 in a stacked manner.As shown in FIG.
3, and a front wall 15 that contacts front and rear.
It consists of a rear wall 16 and front and rear side pieces 17 and 18 that contact the outer periphery of the other side, and a receiving plate 1 that is movable in the lower part of the holding frame 2 and that constitutes the extrusion means A.
9, and a slit 20 is formed in the lower part of the front wall 15 through which one jig 1 on this receiving plate 19 can advance forward.

The sliding portion 21 at the bottom of the receiving plate 19 is connected to the support base 2.
It is slidably attached to a pair of guide frames 23 in the front and back directions provided on the support plate 19, and is moved forward and backward by an air cylinder 24, and a pair of left and right push pieces 25 are fixed on the support plate 19 as shown in FIG. This pushing piece 25 is made to be slightly thinner than the thickness of one jig 1, as shown in Fig. 1, so that it can be pressed against the two jigs 1 when moving forward. I have made sure that there is no such thing.

Therefore, when a plurality of carrier jigs 1 are stacked and housed in the holding frame 2 as shown in FIG. Carrier jig 1 is push piece 2
When the jig 1 advances to a certain position by being pushed by the jig 1, the receiving plate 19 returns to its original position, leaving the jig 1 behind, and repeats the stopping action.

Reference numeral 26 in FIG. 1 is a frame that supports the entire apparatus of this invention, the support stand 22 is fixed on this frame 26, and 27 is a vertical machine box provided on the side of the frame 26.

In front of the slit 20, a pasting roller 4 and a receiving roller 5 as pasting means B are arranged vertically,
The rollers 4 and 5 are intermittently driven in the direction of the arrow in FIG. 1 by a drive mechanism provided in the machine box 27. The rear end of the upper sticking roller 4 is attached to a swinging arm 28 attached to the machine box 27 as shown in FIG. It is designed to be pressed onto the jig 1, and both rollers 4 and 5 are made of silicone rubber with a hardness of 60°.

3 is a film stretched over the jig 1, which is not shown, but is supplied from an upper reel, passed through a guide roller 30 attached to the machine box, and is supplied between rollers 4 and 5 with the adhesive side facing down. Further, this film 3 has a separator 31 stacked thereon to prevent wrinkles, and this separator 31 is attached to a guide roller 30.
The film is wound onto an upper take-up reel (not shown) via a guide roller 32 facing the .

Therefore, the single carrier jig 1 pushed out by the pushing piece 25 of the pushing means A as described above is activated under the condition that it is pushed between the lower side of the sticking roller 4 and the receiving roller 5, and as shown in FIG. The jig 1 is moved forward together with the film 3 while the film 3 is adhered to the upper surface of the jig 1 by moving the upper and lower rollers 4 and 5 rotating in the direction of the arrow and the film 3 forward.

Reference numeral 33 in FIG. 3 denotes an air cylinder, which is fixed to a bracket 34 attached to the machine box 27, and a cutting means C is attached to an elevating frame 35 fixed to the piston rod of this air cylinder 33.

As shown in FIGS. 1, 2, and 3, this cutting means C has a cutter arm 39 that swings about a shaft 38 attached to a rotating frame 37 driven by a gear motor 36 fixed on an elevator frame 35. This arm 39
A freely rotating disc-shaped cutter 7 is attached to the tip of the arm 39, and the tip of the arm 39 is pressed down by a spring 40.

Also, a vertical shaft 4 fixed at the center of the rotating frame 37
A disc-shaped presser plate 42 is rotatably attached to the lower end of the rotating frame 37, and a circular ring-shaped rubber 43 is attached to the lower surface of the outer periphery of the presser plate 42. A roller 44 is provided at the lower part to be in contact with the presser plate 42.

45 in FIG. 1 is a cylindrical heater cover fixed to the frame 26, and an air cylinder 46 is installed inside the heater cover.
It has a heater 47 that moves up and down. Also,
A circular support stand 6 supported by a bracket 48 is provided outside the heater cover 45 to support the carrier jig 1 sent by the rollers 4 and 5.

Therefore, an appropriate detector detects that the carrier jig 1 to which the film 3 is attached as described above has come onto the support stand 6 together with the film 3, and the rollers 4, 5
At the same time, when the film 3 stops, the cylinder 33 shown in FIG. presses the film on the carrier jig 1 together with the jig 1 onto the support base 6 and stops.

When this state is detected by some detection means, the gear motor 36 is activated and the outer blade of the cutter 7 rotates around the shaft 41 while cutting the film 3 on the jig 1. During this time, the shaft 41 and The roller 44 rotates, but the presser plate 42 does not rotate. Thus film 3
When the cutter 7 rotates twice in order to completely cut the cutter 7, the gear motor 36 stops, the cylinder 33 works, and the lifting frame 35 rises.

In addition, when heat-shrinkable plastic is used for the film 3, the cylinder 46 is activated to heat-shrink the film inside the jig 1 with the heater while cutting the film 3 on the carrier jig 1 as described above. Eliminate wrinkles by applying tension.

Reference numerals 9 and 10 in FIG. 1 denote a pair of upper and lower take-up rollers provided in front of the cutting means, which are driven in the direction of the arrow in FIG. 1 by a drive mechanism provided within the machine box 27. Further, the upper take-up roller 9 is attached to a swinging arm 49 attached to the machine box 27 and is pressed onto a roller 10 by an appropriate pressing mechanism, and the lower roller 10 is attached to the rear of the mounting base 53 of the conveyor 11.

Therefore, the disc-shaped film 8 cut by the cutter 7 on the carrier jig 1 as described above and stuck on the jig 1 as shown in FIG. However, the remaining perforated film 3 is directed upward along the upper take-up roller 9, passes through a guide roller 61, and is wound onto a take-up reel (not shown).

D is a cartridge support means in front of the mounting base 53. This support means D is provided with a lifting platform 52 that is raised and lowered by a lifting mechanism 51 on a base frame 50 fixed to the frame 26, and a lifting table 52 that is raised and lowered by a lifting mechanism 51 is provided at the upper end of an obliquely upward arm 54 provided at the front of the mounting table 53. A receiving roller 55 is provided to receive the front part of the carrier jig 1.

A cartridge 12 for storing carrier jigs is placed on the lifting table 52, and this cartridge 12 has a front shape as shown in FIG. 4.
That is, the cartridge 12 has a pair of left and right side plates 5.
The upper and lower sides of 6 are connected by two horizontal connecting rods 57, 5
A large number of lateral grooves 59 into which both sides of the carrier jig 1 are fitted are formed at regular intervals on opposing surfaces of the side plates 56.

Further, the lower connecting rod 58 is moved forward to avoid the roller 55, and reinforcing members 60 located below the connecting rod 57 are attached near the upper portions of the pair of left and right side plates 56. The lifting table 52 is also provided with a notch to avoid the roller 55.

In the above-mentioned cartridge support means D, the elevating table 52 is initially at the lowest position, and at this time, the groove 59 at the uppermost stage of the cartridge 12 is flush with the upper surface of the conveyor 11. Therefore, the carrier jig 1 sent out by the conveyor 11 is placed on the receiving roller 55.
It enters the carriage 12 through the top and enters the uppermost lateral groove 59 on both sides.

In this way, the lifting mechanism 51 operates under the condition that the carriage 1 is supported by the horizontal groove 59 at the top of the jig 1.
2 to a position where the second lateral groove 59 from the top matches the top surface of the conveyor 11.

By repeating this action, the carrier jig 1 with the disc-shaped film 8 pasted thereon is housed in each horizontal groove 59 of the carriage 12, and the inside of the carriage 12 is filled with the jig 1.
When it is full, the lifting platform 52 is lowered and another empty carriage 12 is placed on it.

As described above, this invention has the function of feeding the carrier jig one by one toward the pasting means for pasting a long strip of plastic film onto the circular ring-shaped carrier jig, and the action of feeding the long plastic film onto the carrier jig. The cut film is cut into a disk shape on a carrier jig, is left on the carrier jig, and other perforated films are picked up as appropriate, which is done fully automatically, so there is almost no need for manpower. It also has the advantage of being able to attach films extremely accurately.

[Brief explanation of the drawing]

FIG. 1 is a partially longitudinal side view showing an embodiment of the present invention, FIG. 2 is a plan view of the same carrier jig holding frame and extrusion means, and FIG. 3 is an enlarged longitudinal front view of the main part of the cutting means. FIG. 4 is an enlarged front view of a carrier jig cartridge, and FIG. 5 is a plan view of the carrier jig to which a film is attached. DESCRIPTION OF SYMBOLS 1... Carrier jig, 2... Holding frame, 3... Band-shaped film, 4... Sticking roller, 5... Receiving roller, 6... Support stand, 7... Cutter, 8... Disc-shaped film , 9, 10... Take-up roller, A... Extrusion means, B... Sticking means, C... Cutting means.

Claims (1)

[Claims] 1. A holding frame for stacking and holding circular ring-shaped carrier jigs, extrusion means for pushing out the lowest one of the plurality of carrier jigs held by this holding frame toward the front of the holding frame, and a a pasting means consisting of a pasting roller and a receiving roller for pasting a strip-shaped film having an adhesive layer on the lower surface onto the carrier jig at the same time as the carrier jig is pulled out by holding the top and bottom of the carrier jig; An annular support stand that supports the lower part of the carrier jig that has been pulled out together with the film strip from the attaching means and stopped, and the film strip on the carrier jig supported by this support is placed on the carrier jig and cut into an annular shape. For a carrier jig consisting of a cutting means having a cutter, and a pair of upper and lower take-up rollers that pick up the strip-shaped film cut by the cutting means and also pick up the carrier jig to which the disc-shaped film separated from the strip-shaped film is affixed. Film pasting device.