JPS6335937Y2 - - Google Patents

Info

Publication number
JPS6335937Y2
JPS6335937Y2 JP1983049581U JP4958183U JPS6335937Y2 JP S6335937 Y2 JPS6335937 Y2 JP S6335937Y2 JP 1983049581 U JP1983049581 U JP 1983049581U JP 4958183 U JP4958183 U JP 4958183U JP S6335937 Y2 JPS6335937 Y2 JP S6335937Y2
Authority
JP
Japan
Prior art keywords
valve
valve seat
partition plate
vacuum
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983049581U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59153809U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4958183U priority Critical patent/JPS59153809U/ja
Publication of JPS59153809U publication Critical patent/JPS59153809U/ja
Application granted granted Critical
Publication of JPS6335937Y2 publication Critical patent/JPS6335937Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
  • Supplying Of Containers To The Packaging Station (AREA)
JP4958183U 1983-04-01 1983-04-01 差圧作動弁 Granted JPS59153809U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4958183U JPS59153809U (ja) 1983-04-01 1983-04-01 差圧作動弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4958183U JPS59153809U (ja) 1983-04-01 1983-04-01 差圧作動弁

Publications (2)

Publication Number Publication Date
JPS59153809U JPS59153809U (ja) 1984-10-16
JPS6335937Y2 true JPS6335937Y2 (enrdf_load_stackoverflow) 1988-09-22

Family

ID=30180086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4958183U Granted JPS59153809U (ja) 1983-04-01 1983-04-01 差圧作動弁

Country Status (1)

Country Link
JP (1) JPS59153809U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5231455A (en) * 1975-09-05 1977-03-09 Hitachi Ltd Vacuum chuck device

Also Published As

Publication number Publication date
JPS59153809U (ja) 1984-10-16

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