JPS6335293B2 - - Google Patents

Info

Publication number
JPS6335293B2
JPS6335293B2 JP55142973A JP14297380A JPS6335293B2 JP S6335293 B2 JPS6335293 B2 JP S6335293B2 JP 55142973 A JP55142973 A JP 55142973A JP 14297380 A JP14297380 A JP 14297380A JP S6335293 B2 JPS6335293 B2 JP S6335293B2
Authority
JP
Japan
Prior art keywords
air
adsorbent
packed tower
outlet
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55142973A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5768116A (en
Inventor
Mitsuru Kono
Koji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP55142973A priority Critical patent/JPS5768116A/ja
Publication of JPS5768116A publication Critical patent/JPS5768116A/ja
Publication of JPS6335293B2 publication Critical patent/JPS6335293B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Drying Of Gases (AREA)
JP55142973A 1980-10-15 1980-10-15 Air drying equipment Granted JPS5768116A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55142973A JPS5768116A (en) 1980-10-15 1980-10-15 Air drying equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55142973A JPS5768116A (en) 1980-10-15 1980-10-15 Air drying equipment

Publications (2)

Publication Number Publication Date
JPS5768116A JPS5768116A (en) 1982-04-26
JPS6335293B2 true JPS6335293B2 (enExample) 1988-07-14

Family

ID=15327955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55142973A Granted JPS5768116A (en) 1980-10-15 1980-10-15 Air drying equipment

Country Status (1)

Country Link
JP (1) JPS5768116A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016019981A (ja) * 2015-09-16 2016-02-04 月島機械株式会社 シロキサン除去方法及びシロキサン除去装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54121461A (en) * 1978-03-14 1979-09-20 Toshiba Corp Dehumidifier for ozone generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016019981A (ja) * 2015-09-16 2016-02-04 月島機械株式会社 シロキサン除去方法及びシロキサン除去装置

Also Published As

Publication number Publication date
JPS5768116A (en) 1982-04-26

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