JPS6334941U - - Google Patents

Info

Publication number
JPS6334941U
JPS6334941U JP12788886U JP12788886U JPS6334941U JP S6334941 U JPS6334941 U JP S6334941U JP 12788886 U JP12788886 U JP 12788886U JP 12788886 U JP12788886 U JP 12788886U JP S6334941 U JPS6334941 U JP S6334941U
Authority
JP
Japan
Prior art keywords
air blowing
clean room
substantially parallel
plane
blowing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12788886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332916Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12788886U priority Critical patent/JPH0332916Y2/ja
Publication of JPS6334941U publication Critical patent/JPS6334941U/ja
Application granted granted Critical
Publication of JPH0332916Y2 publication Critical patent/JPH0332916Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP12788886U 1986-08-22 1986-08-22 Expired JPH0332916Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12788886U JPH0332916Y2 (enrdf_load_stackoverflow) 1986-08-22 1986-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12788886U JPH0332916Y2 (enrdf_load_stackoverflow) 1986-08-22 1986-08-22

Publications (2)

Publication Number Publication Date
JPS6334941U true JPS6334941U (enrdf_load_stackoverflow) 1988-03-07
JPH0332916Y2 JPH0332916Y2 (enrdf_load_stackoverflow) 1991-07-12

Family

ID=31023069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12788886U Expired JPH0332916Y2 (enrdf_load_stackoverflow) 1986-08-22 1986-08-22

Country Status (1)

Country Link
JP (1) JPH0332916Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0332916Y2 (enrdf_load_stackoverflow) 1991-07-12

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