JPS6334414B2 - - Google Patents
Info
- Publication number
- JPS6334414B2 JPS6334414B2 JP57001540A JP154082A JPS6334414B2 JP S6334414 B2 JPS6334414 B2 JP S6334414B2 JP 57001540 A JP57001540 A JP 57001540A JP 154082 A JP154082 A JP 154082A JP S6334414 B2 JPS6334414 B2 JP S6334414B2
- Authority
- JP
- Japan
- Prior art keywords
- weight
- point
- strain gauge
- resistance
- load cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 229910001120 nichrome Inorganic materials 0.000 claims description 15
- 229910045601 alloy Inorganic materials 0.000 claims description 14
- 239000000956 alloy Substances 0.000 claims description 14
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 239000007769 metal material Substances 0.000 claims description 9
- 239000011347 resin Substances 0.000 claims description 9
- 229920005989 resin Polymers 0.000 claims description 9
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- 238000010586 diagram Methods 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000000203 mixture Substances 0.000 description 10
- 229910019819 Cr—Si Inorganic materials 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000001552 radio frequency sputter deposition Methods 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Force In General (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP154082A JPS58118930A (ja) | 1982-01-08 | 1982-01-08 | ロ−ドセル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP154082A JPS58118930A (ja) | 1982-01-08 | 1982-01-08 | ロ−ドセル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58118930A JPS58118930A (ja) | 1983-07-15 |
| JPS6334414B2 true JPS6334414B2 (de) | 1988-07-11 |
Family
ID=11504352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP154082A Granted JPS58118930A (ja) | 1982-01-08 | 1982-01-08 | ロ−ドセル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58118930A (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3403042A1 (de) * | 1984-01-30 | 1985-08-01 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Duennfilm-dehnungsmessstreifen-system und verfahren zu seiner herstellung |
| JPS61152905U (de) * | 1985-03-15 | 1986-09-22 | ||
| US4777826A (en) * | 1985-06-20 | 1988-10-18 | Rosemount Inc. | Twin film strain gauge system |
| JP2717812B2 (ja) * | 1988-08-23 | 1998-02-25 | 株式会社イシダ | ロードセル |
| JP2008309719A (ja) * | 2007-06-15 | 2008-12-25 | Tanita Corp | ロードセル用起歪体、並びに、該ロードセル用起歪体を用いたロードセル及び重量測定装置、該ロードセル用起歪体の製造方法 |
| JP2019078726A (ja) * | 2017-10-27 | 2019-05-23 | ミネベアミツミ株式会社 | ひずみゲージ、センサモジュール |
| JP2019174387A (ja) | 2018-03-29 | 2019-10-10 | ミネベアミツミ株式会社 | ひずみゲージ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4830955A (de) * | 1971-08-26 | 1973-04-23 | ||
| JPS5114358A (ja) * | 1974-07-26 | 1976-02-04 | Shinko Tsushin Kogyo Kk | Netsukasoseitoriwake fukatsuseino purasuchitsukuhyomenni tenchakukanonahizumi geejitosono tenchakuho |
-
1982
- 1982-01-08 JP JP154082A patent/JPS58118930A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4830955A (de) * | 1971-08-26 | 1973-04-23 | ||
| JPS5114358A (ja) * | 1974-07-26 | 1976-02-04 | Shinko Tsushin Kogyo Kk | Netsukasoseitoriwake fukatsuseino purasuchitsukuhyomenni tenchakukanonahizumi geejitosono tenchakuho |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58118930A (ja) | 1983-07-15 |
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