JPS6333083B2 - - Google Patents

Info

Publication number
JPS6333083B2
JPS6333083B2 JP2813680A JP2813680A JPS6333083B2 JP S6333083 B2 JPS6333083 B2 JP S6333083B2 JP 2813680 A JP2813680 A JP 2813680A JP 2813680 A JP2813680 A JP 2813680A JP S6333083 B2 JPS6333083 B2 JP S6333083B2
Authority
JP
Japan
Prior art keywords
contrast
detection signal
focusing
light spot
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2813680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56125604A (en
Inventor
Hiroshi Makihira
Yoshisada Oshida
Yukio Uto
Kazushi Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2813680A priority Critical patent/JPS56125604A/ja
Publication of JPS56125604A publication Critical patent/JPS56125604A/ja
Publication of JPS6333083B2 publication Critical patent/JPS6333083B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2813680A 1980-03-07 1980-03-07 Surface roughness measuring apparatus Granted JPS56125604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2813680A JPS56125604A (en) 1980-03-07 1980-03-07 Surface roughness measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2813680A JPS56125604A (en) 1980-03-07 1980-03-07 Surface roughness measuring apparatus

Publications (2)

Publication Number Publication Date
JPS56125604A JPS56125604A (en) 1981-10-02
JPS6333083B2 true JPS6333083B2 (enrdf_load_stackoverflow) 1988-07-04

Family

ID=12240349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2813680A Granted JPS56125604A (en) 1980-03-07 1980-03-07 Surface roughness measuring apparatus

Country Status (1)

Country Link
JP (1) JPS56125604A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6061605A (ja) * 1983-09-14 1985-04-09 Agency Of Ind Science & Technol あらさ計の非接触スキツド
JP2526543B2 (ja) * 1986-01-13 1996-08-21 ソニー株式会社 物体の高さ測定装置
CN106123813A (zh) * 2016-07-29 2016-11-16 河南省基本建设科学实验研究院有限公司 鼓包测量仪及其检测方法

Also Published As

Publication number Publication date
JPS56125604A (en) 1981-10-02

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