JPS633280A - Testing and evaluating device for semiconductor integrated circuit - Google Patents

Abstract

PURPOSE:To improve operation efficiency by providing a means which sends a stop signal of one automatic sorting machine to the operation control part of a testing and evaluating device and a means which varies the wait time of another automatic sorting machine based on the stop signal. CONSTITUTION:Signals from alarm towers 13 and 14 are inputted to an AND circuit 19, whose output is inputted to a signal inverting circuit 20 and a relay 17; and the output of the circuit 20 is further inputted to a relay 18. If a trouble occurs in an automatic handler 3, the towers 13 and 14 which illuminate in case of trouble are utilized to send their signals to a timer circuit, and consequently the relay 17 is turned on and the relay 18 is turned off to disconnect a wait time timer part 4 from a tester start circuit 7, thereby eliminating the waiting time. Consequently, the automatic handler 2 can starts measuring an IC 8 once the IC 8 is set. When the trouble is removed from the handler 3, the tower 14 turns off to turn off the relay 17 and also initialize the relay 18 to the on-state, so that the original set timer is obtained.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a test and evaluation device (hereinafter referred to as an IC tester) that traces and determines the electrical characteristics of a semiconductor integrated circuit (hereinafter referred to as an IC)9. In particular, it relates to an IC tester's waiting time circuit for measurement start timing.

[Conventional technology]

In recent years, in IC sorting work, IC testers are equipped with two or more automatic sorting devices (hereinafter referred to as auto-handlers), and one auto-handler can handle a large number of ICs.
Since the above-mentioned auto-handlers can be stacked, and two or more of the above-mentioned auto-handlers operate at the same time, the time required for each IC is shortened and work efficiency is improved. This type of measurement acceptance inspection is called multiple simultaneous parallel measurement, and it is thought that this trend will continue in the future.

Figure 2 shows a single IC tester, which is currently the most common, equipped with two auto handlers 2.
．． FIG. 2 is a block diagram showing a state in which constant constant is being performed. The relationship between the conventional IC tester 1 and the auto handler 2.3 in the figure is, for example, the auto handler 2 and the auto handler 3).・A measurement preparation completion signal is transmitted from the start circuit 10 of the tester 2 to the tester start circuit 7, and the
A timer 15 set for each type of driver is counted. If the IC in the auto handler 3 is set in the measurement section within the time set by the timer 15 and a measurement ready signal is sent from the constant start circuit 12 to the tester start circuit 7, then the electrical characteristics of the IC are determined. Start the exam. However, if the measurement preparation completion signal does not come from the auto handler 3 within the set time of the timer 15, a signal is sent from the tester start circuit 7 to the IC measurement circuit 5 after the time of the timer 15 has elapsed. Suddenly, an electrical characteristic test of the IC of auto handler 2 begins. After the measurement of the IC in the auto handler is completed, the IC judgment circuit 6 of the engineering C tester 1 sends a signal to each auto handler 2.
At the same time, information on the judgment result of the IC electrical characteristic test is transmitted to 3 and 3, and the storage operation circuit 9.11 of the handler operates, the measurement method IC is stored, and a new IC is automatically activated.
It is set in the measurement section of handlers 2 and 3. Simultaneous parallel measurements are performed twice in this repetition.

[Problems to be solved by the invention] However, in order to perform simultaneous parallel measurement of a large number of ICs, the waiting time for each auto-handler varies depending on the type of auto-handler. However, if one or more of the two or more auto handlers operating at the same time stops due to a problem, etc., the currently operating auto handler should be set. The handler must wait for the set waiting time without starting measurement each time until the trouble of the auto handler that has stopped due to trouble is resolved, which is a factor that reduces efficiency. It has many drawbacks such as:

The object of the present invention is to solve the above-mentioned drawbacks and to change the waiting time of an auto-handler when the auto-handler is stopped;
An object of the present invention is to provide a semiconductor integrated circuit test and evaluation device that improves work efficiency and shortens the lead time for IC manufacturing.

[Means for solving problems]

The configuration of the present invention includes a test evaluation device for evaluating the electrical characteristics of a semiconductor integrated circuit, and two or more automatic sorting devices, and a semiconductor integrated circuit test for sorting out good products and defective products of the semiconductor integrated circuit. In the evaluation device, means for sending a stop signal of the one automatic sorting device to an operation control unit of the test and evaluation device, and means for changing the waiting time of the other one automatic sorting device based on the stop signal. It is characterized by having the following.

〔Example〕

Next, the present invention will be described in detail with reference to the drawings.

FIG. 1 is a block diagram showing a semiconductor integrated circuit test and evaluation apparatus according to an embodiment of the present invention. In the same figure, this device is
AND circuit 1 for the signal from alarm tower 13.14
9, and its output is input to the signal inverting circuit 20.9. relay 17
Enter. The output of the signal inversion circuit 20 is further input to the relay 18 . Other circuit blocks are the same as those in FIG.

Now, if we consider the case where the auto handler 3 has a problem, in the conventional figure 2, the auto handler 2 will not be able to start measurement for the timer 15 set each time until the trouble is resolved. In contrast, in this embodiment, by using the alarm tower 13.14 that lights up in the event of a trouble and sending that signal to the timer circuit), the relay 17 is turned on and the relay 18 is turned on.
(If no trouble occurs, turn relay 1 off.)
7 off and relay 18 on), waiting time timer section 4
is disconnected from the tester start circuit 5 to reduce the waiting time.
It can be done. For this, auto handler 2
The measurement can be started as soon as the IC is set. If the problem with auto handler 3 is resolved,
Clearing of alarm tower 14, relay 17 off,
Then, the relay 18 returns to the initial state of ON, and becomes the original set timer.

As described above, by shortening the waiting time when trouble occurs in the auto handler, it is possible to improve work efficiency, improve the efficiency of production equipment, and shorten the IC manufacturing period.

〔Effect of the invention〕

As explained above, according to the present invention, a function that can receive a stop signal from an auto handler is added to the waiting time control section of an IC tester, and the stop signal causes a
) By having a function that shortens the waiting time of an auto handler where a trouble has occurred, and then returning to the original waiting time when the trouble is resolved and a start signal is issued, the index of the auto handler can be significantly increased. This has the effect of shortening the time and improving work efficiency.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a semiconductor integrated circuit test and evaluation apparatus according to an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional semiconductor integrated circuit test and evaluation apparatus. 1...IC tester, 2.3...old auto handler, 4...wait time timer section, 5...river IC measurement circuit, 6...IC Judgment circuit, 7. Old... Tester start circuit, 8... IC, 9.
11... Storage operation circuit, 10.12...
・Measurement start circuit, 13.14... Alarm tower, 15... Timer, 16...
・Ground, 17.18...Relay, 19.
...AND circuit, 20...signal inversion circuit. ＼－－－N゛th? Ward

Claims (1)

[Claims] A semiconductor integrated circuit test and evaluation device that is equipped with a test and evaluation device that evaluates the electrical characteristics of a semiconductor integrated circuit and two or more automatic sorting devices, and that selects good products and defective products of the semiconductor integrated circuit. means for sending a stop signal of one automatic sorting device to the operation control unit of the test and evaluation device; and means for changing the waiting time of the other automatic sorting device based on the stop signal. A semiconductor integrated circuit test and evaluation device characterized by: