JPS6332379Y2 - - Google Patents
Info
- Publication number
- JPS6332379Y2 JPS6332379Y2 JP1922084U JP1922084U JPS6332379Y2 JP S6332379 Y2 JPS6332379 Y2 JP S6332379Y2 JP 1922084 U JP1922084 U JP 1922084U JP 1922084 U JP1922084 U JP 1922084U JP S6332379 Y2 JPS6332379 Y2 JP S6332379Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- leak
- relay
- stop
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005086 pumping Methods 0.000 claims 1
- 230000004913 activation Effects 0.000 description 6
- 238000001451 molecular beam epitaxy Methods 0.000 description 6
- 238000011109 contamination Methods 0.000 description 5
- 230000007257 malfunction Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1922084U JPS60133186U (ja) | 1984-02-15 | 1984-02-15 | 真空排気制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1922084U JPS60133186U (ja) | 1984-02-15 | 1984-02-15 | 真空排気制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60133186U JPS60133186U (ja) | 1985-09-05 |
| JPS6332379Y2 true JPS6332379Y2 (zh) | 1988-08-29 |
Family
ID=30508594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1922084U Granted JPS60133186U (ja) | 1984-02-15 | 1984-02-15 | 真空排気制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133186U (zh) |
-
1984
- 1984-02-15 JP JP1922084U patent/JPS60133186U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60133186U (ja) | 1985-09-05 |
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