JPS6331553B2 - - Google Patents

Info

Publication number
JPS6331553B2
JPS6331553B2 JP56060154A JP6015481A JPS6331553B2 JP S6331553 B2 JPS6331553 B2 JP S6331553B2 JP 56060154 A JP56060154 A JP 56060154A JP 6015481 A JP6015481 A JP 6015481A JP S6331553 B2 JPS6331553 B2 JP S6331553B2
Authority
JP
Japan
Prior art keywords
layer
photoconductive
raw material
photoconductive layer
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56060154A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57174449A (en
Inventor
Isamu Shimizu
Kyosuke Ogawa
Junichiro Kanbe
Hidekazu Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56060154A priority Critical patent/JPS57174449A/ja
Priority to US06/354,898 priority patent/US4468443A/en
Priority to DE19823209055 priority patent/DE3209055A1/de
Publication of JPS57174449A publication Critical patent/JPS57174449A/ja
Publication of JPS6331553B2 publication Critical patent/JPS6331553B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
JP56060154A 1981-03-12 1981-04-21 Production of photoconductive member Granted JPS57174449A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP56060154A JPS57174449A (en) 1981-04-21 1981-04-21 Production of photoconductive member
US06/354,898 US4468443A (en) 1981-03-12 1982-03-04 Process for producing photoconductive member from gaseous silicon compounds
DE19823209055 DE3209055A1 (de) 1981-03-12 1982-03-12 Verfahren zur herstellung eines fotoleitfaehigen elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56060154A JPS57174449A (en) 1981-04-21 1981-04-21 Production of photoconductive member

Publications (2)

Publication Number Publication Date
JPS57174449A JPS57174449A (en) 1982-10-27
JPS6331553B2 true JPS6331553B2 (enrdf_load_stackoverflow) 1988-06-24

Family

ID=13133944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56060154A Granted JPS57174449A (en) 1981-03-12 1981-04-21 Production of photoconductive member

Country Status (1)

Country Link
JP (1) JPS57174449A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220127248A (ko) 2020-01-10 2022-09-19 신에쓰 가가꾸 고교 가부시끼가이샤 Iii 족 질화물 기판의 제조 방법 및 iii 족 질화물 기판

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4637938A (en) * 1983-08-19 1987-01-20 Energy Conversion Devices, Inc. Methods of using selective optical excitation in deposition processes and the detection of new compositions

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220127248A (ko) 2020-01-10 2022-09-19 신에쓰 가가꾸 고교 가부시끼가이샤 Iii 족 질화물 기판의 제조 방법 및 iii 족 질화물 기판

Also Published As

Publication number Publication date
JPS57174449A (en) 1982-10-27

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