JPS63315434A - Manufacture of hybrid integrated circuit - Google Patents
Manufacture of hybrid integrated circuitInfo
- Publication number
- JPS63315434A JPS63315434A JP15195587A JP15195587A JPS63315434A JP S63315434 A JPS63315434 A JP S63315434A JP 15195587 A JP15195587 A JP 15195587A JP 15195587 A JP15195587 A JP 15195587A JP S63315434 A JPS63315434 A JP S63315434A
- Authority
- JP
- Japan
- Prior art keywords
- adhesive sheet
- suction pad
- adhesive
- sheet
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 239000000853 adhesive Substances 0.000 claims abstract description 72
- 230000001070 adhesive effect Effects 0.000 claims abstract description 72
- 210000000078 claw Anatomy 0.000 claims abstract description 19
- 238000007664 blowing Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 2
- 238000000926 separation method Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は混成集積回路の製造方法に関し、特に基板と容
器とを接着する接着シートの供給方法の改良に関する。DETAILED DESCRIPTION OF THE INVENTION (A) Field of Industrial Application The present invention relates to a method for manufacturing a hybrid integrated circuit, and more particularly to an improvement in a method for supplying an adhesive sheet for bonding a substrate and a container.
（ロ）従来の技術
混成集積回路は混成集積回路基板上にトランジスタ、チ
ップ抵抗、及びチップコンデンサ等の回路素子を設けて
所望の回路機能を形成し、然る後、封止容器と混成集積
回路基板とを接着シートで接着して一体化を図るもので
ある。(b) Conventional technology hybrid integrated circuits are manufactured by providing circuit elements such as transistors, chip resistors, and chip capacitors on a hybrid integrated circuit board to form desired circuit functions, and then attaching a sealed container to the hybrid integrated circuit. It is intended to be integrated with the substrate by bonding it with an adhesive sheet.
上述した同様の技術は実公昭５４−１６２８５号公報に
記載されている。A technique similar to that described above is described in Japanese Utility Model Publication No. 16285/1985.
この様な混成集積回路の組立て工程においての混成集積
回路基板と封止容器とを接着する接着シートの供給方法
は、先ず第３図Ａに示す如く、収納ストッカ（２〉に枠
状に形成され接着シート（１）を多数枚積み重ね位置決
め爪（３）で接着シート（１）の四方を押え込む０次に
第３図Ｂに示す如く、吸着パッド（４）を下降させて接
着シート（１）を真空吸着した後、第３図Ｃに示す如く
、接着シート（１）の四方を押え込んでた位置決め爪（
３）を接着シート（１）から離間させ、接着シート（１
）が吸着された吸着パッド（４）を所定位置に移動させ
封止容器上に接着シートを供給配置していた。In the process of assembling such a hybrid integrated circuit, the method for supplying an adhesive sheet for bonding the hybrid integrated circuit board and the sealing container is as follows: First, as shown in FIG. A large number of adhesive sheets (1) are stacked and the positioning claws (3) are used to press down the adhesive sheets (1) on all sides. Next, as shown in Figure 3B, the suction pad (4) is lowered to remove the adhesive sheets (1). After the adhesive sheet (1) is vacuum-adsorbed, as shown in Figure 3C, the positioning claws (
3) from the adhesive sheet (1), and
) was moved to a predetermined position, and an adhesive sheet was supplied and arranged on the sealed container.
（ハ）発明が解決しようとする問題点
しかじな、がら、第３図Ａ乃至第３図Ｃに示した従来の
接着シート供給方法では、吸着パッドで一枚目の接着シ
ートを吸着し吸着パッドを上昇した際、接着シートが薄
くて軽い上にシートの切断面がパリ状のため、二枚口以
降の接着シートが持ち上がり、二枚の接着シートが一枚
目の接着シートに付着し、そのまま封止容器に供給され
たり、あるいは吸着された二枚口の接着シートが収納ス
トッカの上面に落ち次の接着シートの吸着の妨げとなり
、接着シート供給工程が停止してしまう問題点があった
。(C) Problems to be Solved by the Invention However, in the conventional adhesive sheet supply method shown in FIGS. 3A to 3C, the first adhesive sheet is sucked by the suction pad. When the pad is lifted up, the adhesive sheet is thin and light, and the cut surface of the sheet is crisp, so the adhesive sheets after the second opening are lifted up, and the two adhesive sheets adhere to the first adhesive sheet. There was a problem in that the two-piece adhesive sheet that was supplied to the sealed container as it was or was adsorbed fell onto the top surface of the storage stocker and interfered with the suction of the next adhesive sheet, stopping the adhesive sheet supply process. .
（ニ）問題点を解決するための手段
本発明は上述した問題点に鑑みて為されたものであり、
先ず第１図Ａに示す如く、収納ストッカ（２）に多数枚
積み重ねられた接着シート（１）の周辺を位置決め爪（
３）で固定し、次に第１図Ｂに示す如く、吸着パッド（
４）で接着シート（１）の一枚目を吸着し、次に第１図
Ｃに示す如く、位置決め爪（３）を接着シート（１）か
ら離間させ位置決め爪（３）の側面から空気を吹きかけ
第１図りに示す如く、吸着パッド（４）に吸着された一
枚目の接着シート（１）と二枚口以降の接着シート（１
）とを分離させて解決する。(d) Means for solving the problems The present invention has been made in view of the above-mentioned problems.
First, as shown in FIG. 1A, positioning claws (
3), and then as shown in Figure 1B, attach the suction pad (
4), adsorb the first adhesive sheet (1), then separate the positioning claw (3) from the adhesive sheet (1) and blow air out from the side of the positioning claw (3), as shown in Figure 1C. As shown in the first drawing, the first adhesive sheet (1) adsorbed on the suction pad (4) and the adhesive sheets after the second adhesive sheet (1)
) and are solved by separating them.
（＊）作用
この様に本発明によれば、位置決め爪（３）の側面から
空気（６）を吹きかけ吸着パッド（４）に吸着された一
枚目の接着シートク１）と二枚口以降の接着シート（１
）とを分離させることにより、確実に接着シートの分離
が行えるものである。(*) Effect As described above, according to the present invention, air (6) is sprayed from the side of the positioning claw (3) to connect the first adhesive sheet 1) adsorbed to the suction pad (4) and the second and subsequent sheets. Adhesive sheet (1
), the adhesive sheet can be reliably separated.
（へ）実施例
以下に第１図Ａ乃至第１図りに示した実施例に基づいて
本発明の詳細な説明する。(F) Example The present invention will be described in detail below based on the example shown in FIG. 1A to FIG.
先ず、第１図Ａに示す如く、多数枚の接着シート（１）
を収納ストッカ（２）を用いて積み重ねる。接着シート
（１）は不織布に樹脂を含浸させたものであり、その厚
みは約３００〜４４０μｍのシート状のものが通常用い
られる。その接着シート（１）は略枠状に形成きれて収
納ストッカ（２）にはめ込む様に積み重ねる。収納スト
ッカ（２）の上端部は常に積み重ねられた接着シート（
１）の一枚目よりも突出する様に配置する。これは吸着
パッドで接着シートを吸着する際、積み重ねられた接着
シート（１）に圧力が加わり、吸着後弾性により上部の
接着シート（１）の飛びはねを防止するためである。ス
トッカ（２）に接着シート（１）を積み重ねた後、位置
決め爪（３）で接着シート（１）の周辺、即ち、４個辺
を固定する。First, as shown in Figure 1A, a large number of adhesive sheets (1) are
Stack them using the storage stocker (2). The adhesive sheet (1) is a nonwoven fabric impregnated with resin, and a sheet-like sheet having a thickness of about 300 to 440 μm is usually used. The adhesive sheet (1) is formed into a substantially frame shape and stacked so as to fit into the storage stocker (2). The upper end of the storage stocker (2) is always stacked with adhesive sheets (
1) Place it so that it sticks out more than the first piece. This is because when the adhesive sheet is suctioned by the suction pad, pressure is applied to the stacked adhesive sheets (1), and the upper adhesive sheet (1) is prevented from flying away due to its elasticity after suction. After stacking the adhesive sheets (1) on the stocker (2), the periphery, that is, the four sides, of the adhesive sheets (1) are fixed with positioning claws (3).
次に第１図Ｂに示す如く、吸着パッド（４）を下降許せ
積み重ねられた接着シート（１）の一枚目を真空吸着す
る。第２図は吸着パッド（４）の形状を示す裏面図であ
り、接着シート（１）が吸着される部分には複数の真空
溝〈５〉が枠状に配置される。Next, as shown in FIG. 1B, the suction pad (4) is allowed to descend and the first of the stacked adhesive sheets (1) is vacuum suctioned. FIG. 2 is a back view showing the shape of the suction pad (4), in which a plurality of vacuum grooves (5) are arranged in a frame shape in the portion where the adhesive sheet (1) is suctioned.
斜線部分はストッカ（２）上端部と嵌合する領域である
。吸着パッド（４）で接着シート（１）を吸着する際、
位置決め爪（３）により接着シート（１〉が固定きれて
いるため吸着パッド（４）と一枚目の接着シート（１）
が完全に接触し吸着が容易に行える。The shaded area is the area that fits into the upper end of the stocker (2). When adsorbing the adhesive sheet (1) with the suction pad (4),
Since the adhesive sheet (1) is not fixed by the positioning claw (3), the suction pad (4) and the first adhesive sheet (1)
are in complete contact and adsorption can be easily performed.
次に第１図Ｃに示す如く、位置決め爪（３）を接着シー
ト（１）から離間させ位置決め爪（３）の側面から空気
（６）を吹きかけ吸着パッド（４）に吸着された接着シ
ート（１）の一枚目と二枚口以降を分離させる。即ち、
吸着パッド（４）で一枚目の接着シート（１）を吸着し
吸着パッド（４）を上昇するときに空気（６）をストッ
カ（２）の斜め下方向に吹きかけて二枚口以降の接着シ
ート（１）を吹き落す。吹き落した後、第１図りに示す
如く、吸着パッド（４）を上昇させて封止容器上に吸着
パッド（４）を移動させ封止容器内に接着シートを供給
する。Next, as shown in FIG. 1C, the positioning claw (3) is separated from the adhesive sheet (1), air (6) is blown from the side of the positioning claw (3), and the adhesive sheet (4) is adsorbed to the suction pad (4). 1) Separate the first and second sheets. That is,
The first adhesive sheet (1) is sucked with the suction pad (4), and when the suction pad (4) is raised, air (6) is sprayed diagonally downward of the stocker (2) to bond the second and subsequent sheets. Blow off the sheet (1). After blowing off, as shown in the first diagram, the suction pad (4) is raised and moved onto the sealed container to supply the adhesive sheet into the sealed container.
このとき一枚目の接着シート（１）が吸着パッド（４）
に吸着されると接着シート押し上げ台（７）により接着
シート（１〉がセンサで位置検出される所定の高さまで
押し上げられ次の接着シート（１）が吸着される。At this time, the first adhesive sheet (1) is the suction pad (4)
When the adhesive sheet (1) is adsorbed, the adhesive sheet (1) is pushed up by the adhesive sheet push-up table (7) to a predetermined height whose position is detected by the sensor, and the next adhesive sheet (1) is adsorbed.
この様に本発明に依れば確実に一枚目と二枚口の接着シ
ート（１）を分離することができる。As described above, according to the present invention, it is possible to reliably separate the first and second adhesive sheets (1).
（ト）発明の効果
以上に詳述した如く、本発明に依れば、位置決め爪の側
面から空気を吹きかけることにより、吸着パッドに吸着
された一枚目の接着シートと二枚目以降の接着シートと
を分離することができ確実に接着シートの分離が行え、
従来の如き接着シート供給工程が停止することが無くな
り、作業性が向上するものである。(g) Effects of the Invention As detailed above, according to the present invention, by blowing air from the side of the positioning claw, the first adhesive sheet adsorbed on the suction pad and the second and subsequent sheets are bonded. The adhesive sheet can be separated reliably.
This eliminates the need for stopping the adhesive sheet supply process as in the past, and improves work efficiency.
第１図Ａ乃至第１図りは本発明の実施例を示す断面図、
第２図は本実施例の吸着パッドを示す裏面図、第３図Ａ
乃至第３図Ｃは従来例を示す断面図である。
（１）は接着シート、 （２）はストッカ、 （３）は
位置決め爪、 （４）は吸着パッド、 （５）は吸着溝
。FIG. 1A to the first drawing are cross-sectional views showing embodiments of the present invention;
Figure 2 is a back view showing the suction pad of this example, Figure 3A
3C to 3C are sectional views showing a conventional example. (1) is an adhesive sheet, (2) is a stocker, (3) is a positioning claw, (4) is a suction pad, and (5) is a suction groove.
Claims (1)
記回路素子を密封する封止容器と前記絶縁性金属基板と
前記封止容器を接着する接着シートを具備した混成集積
回路の組立て工程において、収納ストッカに多数枚積み
重ねられた接着シートの周辺を位置決め爪で固定し、前
記固定後吸着パッドで前記接着シートの一枚目を吸着し
、前記吸着後前記位置決め爪を前記接着シートから離間
させ前記位置決め爪の側面から空気を吹きかけ前記吸着
パッドに吸着された前記一枚目の接着シートと二枚目以
降の前記接着シートとを分離させ、前記吸着パッドに吸
着された接着シートを前記封止容器内に供給することを
特徴とする混成集積回路の製造方法。(1) Assembly process of a hybrid integrated circuit comprising an insulating metal substrate to which a plurality of circuit elements are fixed, a sealing container for sealing the circuit elements, and an adhesive sheet for bonding the insulating metal substrate and the sealing container. , the periphery of a large number of adhesive sheets stacked in a storage stocker is fixed with a positioning claw, and after the fixing, the first sheet of the adhesive sheet is adsorbed with a suction pad, and after the adsorption, the positioning claw is separated from the adhesive sheet. The first adhesive sheet adsorbed on the suction pad is separated from the second and subsequent adhesive sheets by blowing air from the side surface of the positioning claw, and the adhesive sheets adsorbed on the suction pad are separated from the adhesive sheets adsorbed on the suction pad. 1. A method for manufacturing a hybrid integrated circuit, comprising supplying the hybrid integrated circuit in a container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15195587A JPS63315434A (en) | 1987-06-18 | 1987-06-18 | Manufacture of hybrid integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15195587A JPS63315434A (en) | 1987-06-18 | 1987-06-18 | Manufacture of hybrid integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63315434A true JPS63315434A (en) | 1988-12-23 |
Family
ID=15529860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15195587A Pending JPS63315434A (en) | 1987-06-18 | 1987-06-18 | Manufacture of hybrid integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63315434A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102020125520A1 (en) | 2020-09-30 | 2022-03-31 | Koenig & Bauer Ag | Feeder of a sheet processing machine with a blowing device |
-
1987
- 1987-06-18 JP JP15195587A patent/JPS63315434A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102020125520A1 (en) | 2020-09-30 | 2022-03-31 | Koenig & Bauer Ag | Feeder of a sheet processing machine with a blowing device |
| WO2022069083A1 (en) | 2020-09-30 | 2022-04-07 | Koenig & Bauer Ag | Feeder unit of a sheet working or processing machine having a blasting device |
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